[Scan]
initial_time=2016-01-15T21:04:16
final_time=2016-01-15T21:04:36
ip_count=19
run=1023
dataset=2
scan=103
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.19016E-1
ql1_imon=1.37943E-8
ql2_vset=
ql2_vmon=-7.99227E-1
ql2_imon=1.99121E-9
ql3_vset=
ql3_vmon=-9.13262E0
ql3_imon=4.12595E-10
ql4_vset=
ql4_vmon=-9.14342E0
ql4_imon=5.45979E-11
mult1=-1.00414E-8
mult2=-2.78049E-9
rf_tmon=-4.54247E-3
rf_agc=3.31413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.68434E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19388E1
lens5a_imon=2.01731E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.86845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04469E1
cs_ea1_imon=2.55246E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36017E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65059E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03596E1
cs_ea2_imon=1.50621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.847E1
cs_ef1a_imon=2.94089E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.32612E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.35496E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64044E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=1.18838E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=2.98198E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.33075E-8
tplens_vset=1.4E-1
tplens_vmon=1.66916E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.49277E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26422E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03106E2
lens6_imon=2.97911E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=4.23578E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3105E0
ionrepsh_imon=1.78477E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.14295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42494E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00786E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11033E1
os_restr2_imon=3.41806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.27274E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.08007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.48409E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.87233E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17579E0
cs_ionaccel_imon=-1.9816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57072E1
einzel_imon=7.96895E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82688E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-4.78747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.70018E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.80825E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=5.96233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.41825E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64804E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.9499E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6224E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66254E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81666E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22461E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=2.41876E-2
chamber_ion_pmon=2.2467E-9
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.18896E-1	-7.98845E-1	-9.13239E0	-9.14354E0	4.3869E-3	9.60112E-2	2.73476E1	-3.2652E1	-3.26248E1	2.68563E1	2.23964E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.4223E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.18896E-1	-7.98917E-1	-9.13217E0	-9.14338E0	4.17233E-3	9.61781E-2	2.73101E1	-3.26603E1	-3.25917E1	2.68136E1	2.23964E-9	2.52599E-3	2.52599E-3	6.30202E-3	2.41611E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18658E-1	-7.99298E-1	-9.13255E0	-9.14345E0	4.36306E-3	9.60112E-2	2.73246E1	-3.26726E1	-3.26337E1	2.68352E1	2.23306E-9	2.51952E-3	2.51952E-3	6.3131E-3	2.41409E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18753E-1	-7.9906E-1	-9.13267E0	-9.14326E0	4.36306E-3	9.62973E-2	2.73231E1	-3.26242E1	-3.26206E1	2.68406E1	2.23678E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.41405E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.19016E-1	-7.98917E-1	-9.13205E0	-9.1435E0	4.07696E-3	9.62019E-2	2.73303E1	-3.26759E1	-3.26266E1	2.68394E1	2.24155E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.40583E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18992E-1	-7.9906E-1	-9.13231E0	-9.14326E0	4.00543E-3	9.63211E-2	2.72865E1	-3.26452E1	-3.26561E1	2.6834E1	2.24359E-9	2.5225E-3	2.5225E-3	6.29624E-3	2.41265E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.18944E-1	-7.98893E-1	-9.13234E0	-9.14342E0	4.26769E-3	9.61542E-2	2.73454E1	-3.26909E1	-3.26212E1	2.684E1	2.24012E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.41756E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18944E-1	-7.99012E-1	-9.13222E0	-9.14347E0	4.48227E-3	9.62496E-2	2.73231E1	-3.26633E1	-3.25978E1	2.68436E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41546E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.18849E-1	-7.98965E-1	-9.13217E0	-9.1433E0	4.45843E-3	9.60588E-2	2.72933E1	-3.26366E1	-3.26113E1	2.68412E1	2.23964E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.41405E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.18992E-1	-7.98678E-1	-9.13224E0	-9.14319E0	3.98159E-3	9.63211E-2	2.73309E1	-3.26422E1	-3.26374E1	2.68615E1	2.24012E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.41756E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.19016E-1	-7.99108E-1	-9.13222E0	-9.14326E0	4.05312E-3	9.61781E-2	2.73724E1	-3.26957E1	-3.26128E1	2.68454E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41756E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.19063E-1	-7.98965E-1	-9.13234E0	-9.14369E0	4.29153E-3	9.64642E-2	2.73291E1	-3.2653E1	-3.26002E1	2.68581E1	2.24304E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.40918E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18872E-1	-7.99108E-1	-9.13215E0	-9.14369E0	3.86238E-3	9.61542E-2	2.73104E1	-3.26714E1	-3.26142E1	2.6843E1	2.23583E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.41405E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.19206E-1	-7.98965E-1	-9.13227E0	-9.14304E0	4.26769E-3	9.62734E-2	2.73478E1	-3.26759E1	-3.26224E1	2.68394E1	2.24304E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.41546E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.18896E-1	-7.98941E-1	-9.13234E0	-9.1434E0	4.33922E-3	9.61542E-2	2.73269E1	-3.26372E1	-3.25918E1	2.68406E1	2.23332E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.42387E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.18777E-1	-7.99108E-1	-9.13219E0	-9.14319E0	4.8399E-3	9.59635E-2	2.73315E1	-3.26597E1	-3.26506E1	2.68331E1	2.24251E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.40173E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18753E-1	-7.98893E-1	-9.13212E0	-9.14335E0	4.86374E-3	9.62734E-2	2.73004E1	-3.26744E1	-3.26508E1	2.68382E1	2.24402E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18896E-1	-7.9906E-1	-9.13243E0	-9.14338E0	4.57764E-3	9.61304E-2	2.73429E1	-3.26416E1	-3.26404E1	2.68376E1	2.2406E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.41199E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.18849E-1	-7.99084E-1	-9.1325E0	-9.14326E0	4.60148E-3	9.62496E-2	2.73341E1	-3.26666E1	-3.26434E1	2.68569E1	2.23915E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.41756E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.19016E-1	-7.99227E-1	-9.13262E0	-9.14342E0	4.36306E-3	9.64165E-2	2.73267E1	-3.26422E1	-3.2632E1	2.68472E1	2.2467E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.41876E-2