[Scan]
initial_time=2016-01-15T21:04:43
final_time=2016-01-15T21:05:02
ip_count=19
run=1023
dataset=2
scan=104
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.19016E-1
ql1_imon=1.36961E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=2.01836E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=3.73292E-10
ql4_vset=
ql4_vmon=-9.14369E0
ql4_imon=5.99861E-11
mult1=-9.22264E-9
mult2=-2.61282E-9
rf_tmon=-4.15193E-3
rf_agc=3.31413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.69334E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=2.00614E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=2.8598E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02034E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04165E1
cs_ea1_imon=2.5696E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3299E0
lens1_imon=2.72161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65089E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.50289E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84755E1
cs_ef1a_imon=2.95531E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.32245E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=4.26319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14789E1
os_ea1_imon=2.37096E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.06235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92008E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.96973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20375E0
olens4_imon=3.34086E-8
tplens_vset=1.4E-1
tplens_vmon=1.64924E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25737E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.56237E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03057E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=4.18302E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.77867E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34048E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43956E0
os_ea2_imon=-9.37423E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.09589E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.45203E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.85449E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.99418E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82744E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=8.10019E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.70868E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3338E1
os_fil1_imon=9.41237E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65095E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30734E1
cs_fil1_imon=9.94762E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62571E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.42024E-2
chamber_ion_pmon=2.23487E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18467E-1	-7.98869E-1	-9.13219E0	-9.14345E0	4.41074E-3	9.62973E-2	2.73322E1	-3.26502E1	-3.2636E1	2.68684E1	2.23866E-9	2.51826E-3	2.51826E-3	6.33211E-3	2.41337E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.18682E-1	-7.9875E-1	-9.13236E0	-9.14347E0	4.81606E-3	9.6488E-2	2.73322E1	-3.26897E1	-3.26685E1	2.6816E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.18586E-1	-7.98988E-1	-9.13231E0	-9.14352E0	4.48227E-3	9.6488E-2	2.73153E1	-3.26345E1	-3.25964E1	2.6816E1	2.23918E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.41674E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.18658E-1	-7.99203E-1	-9.13236E0	-9.14314E0	4.33922E-3	9.62496E-2	2.7328E1	-3.26775E1	-3.26718E1	2.68679E1	2.23825E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.41067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18515E-1	-7.99227E-1	-9.13229E0	-9.14345E0	4.673E-3	9.62734E-2	2.73177E1	-3.26494E1	-3.26206E1	2.68575E1	2.24012E-9	2.52066E-3	2.52066E-3	6.3074E-3	2.41409E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18944E-1	-7.99251E-1	-9.13205E0	-9.14352E0	4.64916E-3	9.63926E-2	2.73488E1	-3.2659E1	-3.25965E1	2.68505E1	2.24012E-9	2.52099E-3	2.52099E-3	6.27461E-3	2.40918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.19063E-1	-7.98988E-1	-9.13236E0	-9.1435E0	4.673E-3	9.61542E-2	2.73111E1	-3.26392E1	-3.26164E1	2.68617E1	2.23818E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.40918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.19135E-1	-7.98917E-1	-9.13219E0	-9.14319E0	4.55379E-3	9.61542E-2	2.72809E1	-3.26496E1	-3.26272E1	2.68124E1	2.2394E-9	2.52297E-3	2.52297E-3	6.29926E-3	2.41683E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09673E0	-8.19182E-1	-7.9906E-1	-9.13193E0	-9.14323E0	4.26769E-3	9.61542E-2	2.72937E1	-3.26741E1	-3.26098E1	2.6831E1	2.2372E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41337E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.18968E-1	-7.98965E-1	-9.13203E0	-9.14321E0	4.43459E-3	9.62973E-2	2.7285E1	-3.26425E1	-3.26331E1	2.68274E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.18777E-1	-7.98774E-1	-9.13193E0	-9.1433E0	4.33922E-3	9.6035E-2	2.73576E1	-3.26596E1	-3.26231E1	2.68209E1	2.24155E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.4223E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.18872E-1	-7.98702E-1	-9.13217E0	-9.14326E0	4.33922E-3	9.61542E-2	2.73003E1	-3.26512E1	-3.26104E1	2.6846E1	2.24347E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.40583E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09704E0	-8.18872E-1	-7.99346E-1	-9.1321E0	-9.14338E0	4.43459E-3	9.60827E-2	2.7344E1	-3.26413E1	-3.26183E1	2.68292E1	2.24109E-9	2.51116E-3	2.51116E-3	6.31288E-3	2.40918E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.18872E-1	-7.99251E-1	-9.13205E0	-9.14319E0	4.41074E-3	9.62973E-2	2.73388E1	-3.26622E1	-3.26485E1	2.68484E1	2.24155E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.41199E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09673E0	-8.19182E-1	-7.99179E-1	-9.1321E0	-9.14321E0	4.52995E-3	9.62496E-2	2.73339E1	-3.26681E1	-3.26585E1	2.68262E1	2.23963E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.41479E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09742E0	-8.19111E-1	-7.99227E-1	-9.13217E0	-9.14333E0	4.50611E-3	9.62734E-2	2.73202E1	-3.26579E1	-3.26249E1	2.68364E1	2.23764E-9	2.52139E-3	2.52139E-3	6.29624E-3	2.42121E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.19111E-1	-7.99131E-1	-9.13219E0	-9.1435E0	4.45843E-3	9.60588E-2	2.73135E1	-3.26789E1	-3.26512E1	2.68499E1	2.24294E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.41876E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09673E0	-8.18801E-1	-7.9906E-1	-9.13227E0	-9.14371E0	4.12464E-3	9.56059E-2	2.73311E1	-3.26826E1	-3.26413E1	2.6825E1	2.23964E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.41817E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09696E0	-8.19087E-1	-7.98965E-1	-9.13208E0	-9.14364E0	4.12464E-3	9.61542E-2	2.73132E1	-3.26063E1	-3.26017E1	2.68511E1	2.23964E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.41199E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.19016E-1	-7.98798E-1	-9.13224E0	-9.14369E0	4.24385E-3	9.64165E-2	2.73285E1	-3.26735E1	-3.25737E1	2.67974E1	2.23487E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.42024E-2