[Scan]
initial_time=2016-01-15T21:05:36
final_time=2016-01-15T21:05:56
ip_count=19
run=1023
dataset=2
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08882E-4
ql1_vset=
ql1_vmon=-8.18896E-1
ql1_imon=1.36532E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=2.00174E-9
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=3.28946E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=5.82457E-11
mult1=-9.8018E-9
mult2=-2.89866E-9
rf_tmon=-3.8365E-3
rf_agc=3.38371E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.70975E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68173E0
bslens_imon=2.40342E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19678E1
lens5a_imon=1.97596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05011E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54313E1
cs_ef1b_imon=2.86122E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04573E1
cs_ea1_imon=2.56747E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32532E0
lens1_imon=2.85081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64592E1
os_ef1alow_imon=2.97027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0365E1
cs_ea2_imon=1.51354E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.95517E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.32871E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.26748E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15385E1
os_ea1_imon=2.33899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63535E1
os_ef1bup_imon=3.0904E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19062E0
cs_ionrep_imon=1.1785E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01776E1
cs_anode1_imon=2.98369E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2037E0
olens4_imon=3.3399E-8
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-2.05807E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26044E1
iondef3_imon=1.4968E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2692E1
iondef2_imon=1.54769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03049E2
lens6_imon=2.98267E-4
ql6_vset=1.0E-1
ql6_vmon=9.61304E-2
ql6_imon=4.13346E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25836E0
ionrepsh_imon=1.78197E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34022E1
lens5b_imon=2.15833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74921E1
cs_ef2b_imon=3.1216E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41603E0
os_ea2_imon=-6.53201E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00438E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7147E1
cs_ef2a_imon=3.15449E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05624E0
os_ef2alow_imon=-2.50592E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04321E-1
os_ef2bup_imon=-5.26742E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11409E1
os_restr2_imon=3.42728E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.27845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01972E1
cs_anode2_imon=2.23611E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73446E1
iondef1_imon=1.102E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67195E1
iondef4_imon=1.10533E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.4112E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.84161E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14412E0
cs_ionaccel_imon=-1.88516E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56819E1
einzel_imon=7.65429E-6
window_vset=0.0E0
window_vmon=2.56033E-1
window_imon=-8.51696E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82708E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86238E1
mask2_imon=-5.53064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92692E3
multa_neg_imon=7.10276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.51534E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.06861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33049E0
defgridb_imon=6.15333E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33387E1
os_fil1_imon=9.40675E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07005E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65146E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30699E1
cs_fil1_imon=9.95682E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61919E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66978E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88025E-2
os_fil2_imon=-2.72811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70956E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35679E-1
cs_fil2_imon=-2.38697E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16977E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32039E-3
inlet_lpb_pmon=2.41337E-2
chamber_ion_pmon=2.23598E-9
chamber_cvt_pmon=2.51938E-3
foreline_cvt_pmon=2.51938E-3
chamber_tmon=1.4008E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62482E-1
res40_imon=-2.50256E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09665E0	-8.18729E-1	-7.98988E-1	-9.1325E0	-9.14342E0	4.45843E-3	9.61781E-2	2.73751E1	-3.26286E1	-3.2626E1	2.68328E1	2.23918E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.41876E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.18825E-1	-7.98821E-1	-9.13253E0	-9.14335E0	4.50611E-3	9.63211E-2	2.72967E1	-3.26813E1	-3.26008E1	2.6834E1	2.2427E-9	2.51527E-3	2.51527E-3	6.31902E-3	2.41337E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.19039E-1	-7.98917E-1	-9.13229E0	-9.14354E0	4.33922E-3	9.62257E-2	2.73654E1	-3.26782E1	-3.26446E1	2.68348E1	2.24012E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.41127E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.18944E-1	-7.98917E-1	-9.13219E0	-9.14397E0	4.19617E-3	9.62496E-2	2.73195E1	-3.26663E1	-3.2626E1	2.68617E1	2.24106E-9	2.51393E-3	2.51393E-3	6.31798E-3	2.40865E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.19063E-1	-7.99131E-1	-9.13236E0	-9.14345E0	4.57764E-3	9.62734E-2	2.72841E1	-3.26524E1	-3.26422E1	2.68575E1	2.24109E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41966E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.18729E-1	-7.99322E-1	-9.13231E0	-9.14345E0	4.31538E-3	9.62496E-2	2.73641E1	-3.26585E1	-3.26313E1	2.68406E1	2.23915E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18753E-1	-7.9937E-1	-9.13236E0	-9.14323E0	4.14848E-3	9.59635E-2	2.73285E1	-3.26663E1	-3.26392E1	2.6837E1	2.23297E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.40378E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.19016E-1	-7.99417E-1	-9.13215E0	-9.14297E0	4.57764E-3	9.61781E-2	2.73165E1	-3.26693E1	-3.26188E1	2.6846E1	2.23915E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.41337E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.19111E-1	-7.99322E-1	-9.13215E0	-9.1433E0	4.8399E-3	9.61781E-2	2.73216E1	-3.2685E1	-3.26396E1	2.68377E1	2.24694E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41127E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.1923E-1	-7.99537E-1	-9.13205E0	-9.1433E0	4.60148E-3	9.61065E-2	2.73063E1	-3.26735E1	-3.2605E1	2.68821E1	2.23869E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.41611E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.19278E-1	-7.9937E-1	-9.1321E0	-9.14342E0	4.72069E-3	9.59396E-2	2.73688E1	-3.26573E1	-3.26681E1	2.68124E1	2.24304E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41966E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.19325E-1	-7.99012E-1	-9.13191E0	-9.14335E0	4.36306E-3	9.60588E-2	2.72582E1	-3.26963E1	-3.26536E1	2.68316E1	2.23773E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.41405E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.19325E-1	-7.98798E-1	-9.13215E0	-9.14314E0	4.29153E-3	9.59873E-2	2.73653E1	-3.26437E1	-3.26331E1	2.68389E1	2.23041E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.41337E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.19349E-1	-7.99084E-1	-9.13198E0	-9.1433E0	4.48227E-3	9.61542E-2	2.73279E1	-3.26855E1	-3.26392E1	2.68927E1	2.24109E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.41966E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.19111E-1	-7.99084E-1	-9.132E0	-9.1433E0	4.26769E-3	9.61542E-2	2.73208E1	-3.26434E1	-3.26915E1	2.68552E1	2.23623E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.41756E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.19206E-1	-7.9906E-1	-9.13231E0	-9.14326E0	4.05312E-3	9.62257E-2	2.73706E1	-3.26462E1	-3.26536E1	2.68259E1	2.2356E-9	2.51142E-3	2.51142E-3	6.32784E-3	2.42184E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.19063E-1	-7.98965E-1	-9.13198E0	-9.14314E0	4.48227E-3	9.63688E-2	2.72943E1	-3.265E1	-3.2587E1	2.68208E1	2.23863E-9	2.51359E-3	2.51359E-3	6.34099E-3	2.41052E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18634E-1	-7.98869E-1	-9.13196E0	-9.14333E0	4.33922E-3	9.6488E-2	2.71729E1	-3.25329E1	-3.25882E1	2.68172E1	2.23818E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41127E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.18872E-1	-7.98988E-1	-9.13236E0	-9.14335E0	4.673E-3	9.63449E-2	2.73135E1	-3.26609E1	-3.2602E1	2.68286E1	2.24499E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.41546E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18896E-1	-7.98988E-1	-9.13191E0	-9.14316E0	4.33922E-3	9.61304E-2	2.73446E1	-3.2692E1	-3.26044E1	2.67195E1	2.23598E-9	2.51938E-3	2.51938E-3	6.32039E-3	2.41337E-2