[Scan]
initial_time=2016-01-15T21:06:03
final_time=2016-01-15T21:06:23
ip_count=19
run=1023
dataset=2
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.18753E-1
ql1_imon=1.36633E-8
ql2_vset=
ql2_vmon=-7.99346E-1
ql2_imon=2.00869E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=2.99001E-10
ql4_vset=
ql4_vmon=-9.14319E0
ql4_imon=6.69837E-11
mult1=-9.97222E-9
mult2=-2.67818E-9
rf_tmon=-3.93727E-3
rf_agc=3.28549E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.69374E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.26738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=2.01479E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54298E1
cs_ef1b_imon=2.89286E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=2.56924E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.80812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.94394E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03306E1
cs_ea2_imon=1.52596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84742E1
cs_ef1a_imon=2.98183E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.33079E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11911E1
os_restr1_imon=4.25377E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.36303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6374E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22686E0
cs_ionrep_imon=1.19539E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9201E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01966E1
cs_anode1_imon=2.9787E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.33065E-8
tplens_vset=1.4E-1
tplens_vmon=1.66306E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26124E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03074E2
lens6_imon=2.98072E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=4.14454E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=1.78155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74762E1
cs_ef2b_imon=3.14238E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44616E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.1469E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06846E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19241E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.44925E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.24333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73452E1
iondef1_imon=1.11139E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68827E1
iondef4_imon=1.12326E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.46572E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.85443E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16142E0
cs_ionaccel_imon=-2.06024E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47494E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56834E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=2.88929E-1
window_imon=-7.01421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82725E2
mask1_imon=2.38952E-4
mask2_vset=0.0E0
mask2_vmon=-1.85886E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.36261E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50086E3
multb_neg_imon=7.72167E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33401E1
os_fil1_imon=9.4125E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65546E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=9.95748E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62018E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6693E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.37435E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38017E-1
cs_fil2_imon=-2.88349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.77107E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.41546E-2
chamber_ion_pmon=2.24402E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.22716E-1
res40_imon=-2.70664E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.19159E-1	-7.98845E-1	-9.13217E0	-9.14338E0	4.48227E-3	9.59635E-2	2.73198E1	-3.26626E1	-3.26579E1	2.68232E1	2.2406E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.41405E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.19182E-1	-7.98845E-1	-9.13229E0	-9.1433E0	4.33922E-3	9.61065E-2	2.73259E1	-3.26321E1	-3.26156E1	2.68207E1	2.23818E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.41127E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.1892E-1	-7.99108E-1	-9.13236E0	-9.14314E0	4.45843E-3	9.63211E-2	2.73375E1	-3.26555E1	-3.26425E1	2.6854E1	2.23863E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.402E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18801E-1	-7.98941E-1	-9.13234E0	-9.14311E0	4.41074E-3	9.61781E-2	2.72986E1	-3.26543E1	-3.26107E1	2.68484E1	2.242E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.41876E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.19254E-1	-7.99012E-1	-9.13205E0	-9.14304E0	4.19617E-3	9.60112E-2	2.73363E1	-3.26434E1	-3.26404E1	2.68047E1	2.23818E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.19182E-1	-7.98941E-1	-9.13236E0	-9.14345E0	4.50611E-3	9.63211E-2	2.73183E1	-3.26783E1	-3.2635E1	2.68268E1	2.24155E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.41611E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.19254E-1	-7.98702E-1	-9.13217E0	-9.1435E0	4.72069E-3	9.60588E-2	2.73508E1	-3.26344E1	-3.25924E1	2.68484E1	2.23566E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.41479E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.19063E-1	-7.98893E-1	-9.13219E0	-9.14335E0	4.93526E-3	9.61065E-2	2.73063E1	-3.26573E1	-3.26366E1	2.68689E1	2.23773E-9	2.52384E-3	2.52384E-3	6.29128E-3	2.42644E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09688E0	-8.18825E-1	-7.98917E-1	-9.13224E0	-9.1434E0	4.57764E-3	9.61304E-2	2.72997E1	-3.26494E1	-3.26284E1	2.684E1	2.23526E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.41546E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09727E0	-8.1954E-1	-7.99131E-1	-9.13217E0	-9.14321E0	4.07696E-3	9.59158E-2	2.72895E1	-3.26512E1	-3.2611E1	2.6849E1	2.23964E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.42024E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0975E0	-8.19159E-1	-7.99513E-1	-9.13196E0	-9.14328E0	4.26769E-3	9.60112E-2	2.73735E1	-3.26791E1	-3.26219E1	2.6854E1	2.24109E-9	2.52757E-3	2.52757E-3	6.29098E-3	2.41966E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09711E0	-8.18992E-1	-7.99084E-1	-9.1321E0	-9.14326E0	4.31538E-3	9.57966E-2	2.73057E1	-3.26567E1	-3.2629E1	2.68492E1	2.23773E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.41405E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09719E0	-8.18896E-1	-7.99203E-1	-9.13203E0	-9.1435E0	4.31538E-3	9.59158E-2	2.73445E1	-3.26735E1	-3.2622E1	2.68235E1	2.23665E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.41693E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09758E0	-8.19111E-1	-7.99417E-1	-9.13193E0	-9.14347E0	4.17233E-3	9.60112E-2	2.73547E1	-3.26793E1	-3.26046E1	2.6819E1	2.24012E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.41269E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09719E0	-8.18849E-1	-7.99227E-1	-9.13248E0	-9.14326E0	4.19617E-3	9.6035E-2	2.73027E1	-3.26856E1	-3.26343E1	2.68286E1	2.24062E-9	2.52473E-3	2.52473E-3	6.33538E-3	2.41052E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.19039E-1	-7.99322E-1	-9.1321E0	-9.14328E0	4.52995E-3	9.59158E-2	2.72943E1	-3.26506E1	-3.2617E1	2.68621E1	2.23202E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.40788E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0968E0	-8.18896E-1	-7.99322E-1	-9.13191E0	-9.14326E0	4.05312E-3	9.60588E-2	2.73201E1	-3.26458E1	-3.2629E1	2.68256E1	2.23915E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.18992E-1	-7.99274E-1	-9.13212E0	-9.1434E0	3.93391E-3	9.59873E-2	2.71983E1	-3.25411E1	-3.28142E1	2.68376E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41127E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.18825E-1	-7.99441E-1	-9.13205E0	-9.14316E0	4.12464E-3	9.61065E-2	2.73293E1	-3.2688E1	-3.26319E1	2.6836E1	2.24012E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.41471E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.18753E-1	-7.99346E-1	-9.13236E0	-9.14319E0	4.22001E-3	9.61065E-2	2.73452E1	-3.26767E1	-3.26124E1	2.68827E1	2.24402E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.41546E-2