[Scan]
initial_time=2016-01-15T21:06:30
final_time=2016-01-15T21:06:49
ip_count=19
run=1023
dataset=2
scan=108
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08833E-4
ql1_vset=
ql1_vmon=-8.18586E-1
ql1_imon=1.36907E-8
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=1.99176E-9
ql3_vset=
ql3_vmon=-9.13217E0
ql3_imon=3.17025E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=5.2619E-11
mult1=-8.09083E-9
mult2=-2.71661E-9
rf_tmon=-4.88494E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.70904E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67695E0
bslens_imon=2.426E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=2.86737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04315E1
cs_ea1_imon=2.55878E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38638E0
lens1_imon=2.91627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03444E1
cs_ea2_imon=1.51407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.95639E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.32689E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=4.24409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.35042E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.17809E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9195E2
cs_nozzle_imon=1.9355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=3.00396E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.3411E-8
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.48018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03062E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.58204E-2
ql6_imon=4.1658E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=1.78696E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38608E0
os_ea2_imon=-8.86953E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00821E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73484E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68051E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.47788E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.88836E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17339E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02134E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82706E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.02952E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=9.4218E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65581E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30728E1
cs_fil1_imon=9.97218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62564E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67171E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4865E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.43095E-2
chamber_ion_pmon=2.23918E-9
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6621E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.18634E-1	-7.99322E-1	-9.13229E0	-9.14338E0	4.48227E-3	9.59635E-2	2.73305E1	-3.2675E1	-3.26343E1	2.68458E1	2.23202E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.41199E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.18634E-1	-7.99012E-1	-9.1321E0	-9.14326E0	4.36306E-3	9.59158E-2	2.73458E1	-3.26862E1	-3.26785E1	2.6828E1	2.23869E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.40173E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.18849E-1	-7.98941E-1	-9.13203E0	-9.14311E0	4.29153E-3	9.61781E-2	2.73512E1	-3.26328E1	-3.26653E1	2.68569E1	2.24251E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.41611E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.18586E-1	-7.99179E-1	-9.13219E0	-9.14319E0	4.07696E-3	9.60112E-2	2.72854E1	-3.2647E1	-3.26432E1	2.68387E1	2.2369E-9	2.51886E-3	2.51886E-3	6.3126E-3	2.41734E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.18706E-1	-7.99155E-1	-9.13198E0	-9.14323E0	4.36306E-3	9.59158E-2	2.73213E1	-3.26518E1	-3.26206E1	2.68322E1	2.23549E-9	2.52454E-3	2.52454E-3	6.3016E-3	2.40672E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.18872E-1	-7.99203E-1	-9.13241E0	-9.1435E0	4.29153E-3	9.58681E-2	2.73502E1	-3.26831E1	-3.26939E1	2.68623E1	2.24012E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.41546E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18992E-1	-7.99203E-1	-9.13246E0	-9.14316E0	4.29153E-3	9.5892E-2	2.73116E1	-3.26207E1	-3.26248E1	2.68623E1	2.24207E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.42387E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.19159E-1	-7.99131E-1	-9.13219E0	-9.1434E0	4.29153E-3	9.59635E-2	2.73015E1	-3.26777E1	-3.2611E1	2.68435E1	2.24402E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.43442E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.19087E-1	-7.99012E-1	-9.13241E0	-9.14359E0	4.3869E-3	9.60588E-2	2.73279E1	-3.26603E1	-3.26603E1	2.68316E1	2.24347E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.42851E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18729E-1	-7.99012E-1	-9.13217E0	-9.14338E0	4.26769E-3	9.6035E-2	2.7337E1	-3.26661E1	-3.26296E1	2.67914E1	2.23623E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.40918E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.18753E-1	-7.99084E-1	-9.13231E0	-9.14366E0	4.45843E-3	9.60112E-2	2.73493E1	-3.26396E1	-3.26313E1	2.68785E1	2.2372E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.41756E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.18825E-1	-7.98893E-1	-9.13243E0	-9.14376E0	4.79221E-3	9.6035E-2	2.73165E1	-3.26506E1	-3.26404E1	2.6843E1	2.23773E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.41199E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.19087E-1	-7.99084E-1	-9.13181E0	-9.14347E0	4.673E-3	9.60112E-2	2.73222E1	-3.26767E1	-3.26107E1	2.68418E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.41756E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.19016E-1	-7.99155E-1	-9.13203E0	-9.14371E0	4.43459E-3	9.59635E-2	2.73075E1	-3.27059E1	-3.26044E1	2.68142E1	2.24482E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.42282E-2
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.18992E-1	-7.99251E-1	-9.13222E0	-9.14352E0	4.69685E-3	9.59158E-2	2.73405E1	-3.26815E1	-3.26054E1	2.68713E1	2.23623E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.42809E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.18872E-1	-7.99084E-1	-9.13231E0	-9.14335E0	4.43459E-3	9.62496E-2	2.73865E1	-3.26815E1	-3.26602E1	2.6855E1	2.24133E-9	2.5208E-3	2.5208E-3	6.30469E-3	2.421E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18825E-1	-7.99227E-1	-9.13234E0	-9.14323E0	4.62532E-3	9.61304E-2	2.73339E1	-3.26957E1	-3.26134E1	2.68076E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1861E-1	-7.99131E-1	-9.13224E0	-9.14323E0	4.19617E-3	9.61304E-2	2.73446E1	-3.26986E1	-3.26349E1	2.6858E1	2.2406E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.40994E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.18706E-1	-7.99298E-1	-9.13222E0	-9.14345E0	4.24385E-3	9.6035E-2	2.73399E1	-3.26967E1	-3.26121E1	2.68302E1	2.23583E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.41405E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.18586E-1	-7.98941E-1	-9.13217E0	-9.14328E0	4.17233E-3	9.58204E-2	2.73484E1	-3.26278E1	-3.26332E1	2.68051E1	2.23918E-9	2.52342E-3	2.52342E-3	6.3074E-3	2.43095E-2