[Scan]
initial_time=2016-01-15T21:07:23
final_time=2016-01-15T21:07:43
ip_count=19
run=1023
dataset=2
scan=110
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.18896E-1
ql1_imon=1.36894E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=2.01267E-9
ql3_vset=
ql3_vmon=-9.13258E0
ql3_imon=3.09515E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=7.27296E-11
mult1=-8.35986E-9
mult2=-2.75348E-9
rf_tmon=-5.26778E-3
rf_agc=3.1937E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.71077E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68033E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19694E1
lens5a_imon=2.01323E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12535E2
lens4a_imon=2.04995E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5378E1
cs_ef1b_imon=2.88334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02031E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04726E1
cs_ea1_imon=2.55081E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30767E0
lens1_imon=2.54108E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64964E1
os_ef1alow_imon=2.96867E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84525E1
cs_ef1a_imon=2.93462E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.33072E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12271E1
os_restr1_imon=4.24003E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.3539E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.07833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23463E0
cs_ionrep_imon=1.20498E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.98739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.35682E-8
tplens_vset=1.4E-1
tplens_vmon=1.6327E0
tplens_imon=-3.48983E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26118E1
iondef3_imon=1.50035E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57335E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03021E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=4.15806E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28392E0
ionrepsh_imon=1.78112E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33939E1
lens5b_imon=2.18618E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74695E1
cs_ef2b_imon=3.118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43366E0
os_ea2_imon=-7.04626E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00454E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71195E1
cs_ef2a_imon=3.16815E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08512E0
os_ef2alow_imon=-2.36099E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05741E-1
os_ef2bup_imon=-5.25026E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11167E1
os_restr2_imon=3.44772E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.28318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0199E1
cs_anode2_imon=2.23064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72914E1
iondef1_imon=1.08444E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68457E1
iondef4_imon=1.1116E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.46474E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.85923E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1395E0
cs_ionaccel_imon=-1.88568E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47574E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56723E1
einzel_imon=7.77766E-6
window_vset=0.0E0
window_vmon=2.54399E-1
window_imon=-9.5752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82676E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86388E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.53131E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.38202E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.127E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44621E0
defgridb_imon=5.81673E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33378E1
os_fil1_imon=9.42314E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07073E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65196E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30734E1
cs_fil1_imon=9.94773E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60182E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67139E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00972E-2
os_fil2_imon=-2.78726E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37719E-1
cs_fil2_imon=-2.83716E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.24335E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22599E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41269E-2
chamber_ion_pmon=2.23637E-9
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09285E-1
res40_imon=-2.63045E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.19397E-1	-7.98893E-1	-9.13227E0	-9.14335E0	4.31538E-3	9.59635E-2	2.73222E1	-3.26602E1	-3.26278E1	2.68557E1	2.23963E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.41022E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.19182E-1	-7.99108E-1	-9.13212E0	-9.14335E0	4.50611E-3	9.60112E-2	2.72782E1	-3.26591E1	-3.26291E1	2.68151E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.19445E-1	-7.98988E-1	-9.13231E0	-9.14335E0	4.43459E-3	9.6035E-2	2.73448E1	-3.26557E1	-3.26215E1	2.67937E1	2.24161E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.41907E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.19373E-1	-7.9906E-1	-9.13236E0	-9.1435E0	4.17233E-3	9.58681E-2	2.73287E1	-3.26543E1	-3.26325E1	2.68105E1	2.24427E-9	2.52197E-3	2.52197E-3	6.31779E-3	2.42132E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.19111E-1	-7.9906E-1	-9.13215E0	-9.14323E0	4.43459E-3	9.6035E-2	2.73135E1	-3.26669E1	-3.2638E1	2.68244E1	2.242E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.41269E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.19111E-1	-7.99108E-1	-9.13217E0	-9.14316E0	4.17233E-3	9.62496E-2	2.73045E1	-3.26437E1	-3.25888E1	2.68286E1	2.24597E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.40708E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.19087E-1	-7.98893E-1	-9.1321E0	-9.14354E0	4.33922E-3	9.61781E-2	2.73009E1	-3.26621E1	-3.26458E1	2.68611E1	2.2406E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.41611E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.18944E-1	-7.99298E-1	-9.13222E0	-9.14345E0	4.22001E-3	9.61542E-2	2.73303E1	-3.26338E1	-3.2614E1	2.68352E1	2.23332E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.42177E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.18682E-1	-7.98869E-1	-9.13224E0	-9.14335E0	4.26769E-3	9.63211E-2	2.72957E1	-3.26638E1	-3.25865E1	2.68466E1	2.24012E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.40918E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18992E-1	-7.9906E-1	-9.13217E0	-9.1434E0	4.48227E-3	9.6035E-2	2.73135E1	-3.26398E1	-3.26482E1	2.68047E1	2.24109E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41127E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.18729E-1	-7.99227E-1	-9.13219E0	-9.14354E0	4.673E-3	9.60112E-2	2.73269E1	-3.26885E1	-3.26349E1	2.6834E1	2.23773E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.42024E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.18419E-1	-7.99417E-1	-9.132E0	-9.14347E0	4.26769E-3	9.63449E-2	2.7364E1	-3.26404E1	-3.26561E1	2.68376E1	2.24155E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.40378E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.18491E-1	-7.99227E-1	-9.13219E0	-9.1433E0	4.33922E-3	9.6035E-2	2.73393E1	-3.26561E1	-3.26354E1	2.68286E1	2.23764E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.40839E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.1861E-1	-7.99036E-1	-9.13229E0	-9.14342E0	4.31538E-3	9.61065E-2	2.72886E1	-3.26468E1	-3.26401E1	2.68286E1	2.24442E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.41817E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.18563E-1	-7.98965E-1	-9.13253E0	-9.14347E0	4.33922E-3	9.62973E-2	2.73706E1	-3.2688E1	-3.26201E1	2.68274E1	2.24402E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.41546E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.18586E-1	-7.99155E-1	-9.13234E0	-9.14319E0	4.24385E-3	9.59873E-2	2.73393E1	-3.26753E1	-3.26026E1	2.68279E1	2.23429E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.42177E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.18515E-1	-7.99012E-1	-9.1321E0	-9.14316E0	4.3869E-3	9.61542E-2	2.73309E1	-3.26146E1	-3.26579E1	2.68569E1	2.23964E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.41817E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.18682E-1	-7.98845E-1	-9.13227E0	-9.14333E0	4.64916E-3	9.59396E-2	2.73346E1	-3.2652E1	-3.26366E1	2.68516E1	2.23171E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.41479E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.18658E-1	-7.98869E-1	-9.13255E0	-9.14314E0	4.50611E-3	9.59873E-2	2.73462E1	-3.26677E1	-3.26364E1	2.68383E1	2.23678E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.40173E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.18896E-1	-7.98774E-1	-9.13258E0	-9.14314E0	4.55379E-3	9.62257E-2	2.72914E1	-3.26554E1	-3.26118E1	2.68457E1	2.23637E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.41269E-2