[Scan]
initial_time=2016-01-15T21:08:17
final_time=2016-01-15T21:08:36
ip_count=19
run=1023
dataset=2
scan=112
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.19135E-1
ql1_imon=1.36371E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.03472E-9
ql3_vset=
ql3_vmon=-9.13248E0
ql3_imon=2.77865E-10
ql4_vset=
ql4_vmon=-9.14364E0
ql4_imon=6.88314E-11
mult1=-9.46345E-9
mult2=-2.74656E-9
rf_tmon=-3.46699E-3
rf_agc=3.35739E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.70325E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.38274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20301E1
lens5a_imon=1.96973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05262E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.86089E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02034E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.5577E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31428E0
lens1_imon=2.82975E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65209E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.49821E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.33299E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1206E1
os_restr1_imon=4.25959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.37349E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63293E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20764E0
cs_ionrep_imon=1.17809E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91992E2
cs_nozzle_imon=1.932E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.99315E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.34635E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=2.50998E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.47658E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.54795E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03011E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=4.1698E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31518E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34168E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39089E0
os_ea2_imon=-8.68929E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06164E2
lens4b_imon=2.00345E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.4177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.3119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.2529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7346E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.38988E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.88596E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82707E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.78656E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.17875E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50094E3
multb_neg_imon=6.91777E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29028E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33418E1
os_fil1_imon=9.44721E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06602E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65467E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30745E1
cs_fil1_imon=9.96558E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67019E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.81013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65535E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.09747E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.40788E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46988E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=319
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18729E-1	-7.98774E-1	-9.13234E0	-9.14323E0	4.24385E-3	9.60827E-2	2.73592E1	-3.26404E1	-3.26356E1	2.6837E1	2.24109E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.43231E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.18634E-1	-7.9906E-1	-9.13212E0	-9.14338E0	4.31538E-3	9.61304E-2	2.73479E1	-3.27007E1	-3.26566E1	2.68537E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.40918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.18491E-1	-7.98941E-1	-9.13205E0	-9.14357E0	4.24385E-3	9.63926E-2	2.7312E1	-3.26828E1	-3.25953E1	2.68479E1	2.23369E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.41265E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.18777E-1	-7.98988E-1	-9.13234E0	-9.14321E0	4.19617E-3	9.66072E-2	2.73129E1	-3.26693E1	-3.26248E1	2.6852E1	2.23825E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.40865E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.18944E-1	-7.99203E-1	-9.132E0	-9.14357E0	4.29153E-3	9.64165E-2	2.73216E1	-3.26284E1	-3.26101E1	2.68352E1	2.23915E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.40708E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.18825E-1	-7.99394E-1	-9.13212E0	-9.14352E0	4.50611E-3	9.6035E-2	2.73399E1	-3.26476E1	-3.26392E1	2.68797E1	2.23583E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.40994E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.19182E-1	-7.99274E-1	-9.1321E0	-9.14354E0	4.52995E-3	9.6035E-2	2.73493E1	-3.26703E1	-3.26325E1	2.68274E1	2.23623E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41756E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.19182E-1	-7.98821E-1	-9.13224E0	-9.1434E0	4.45843E-3	9.62257E-2	2.73532E1	-3.26607E1	-3.26495E1	2.6846E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.40708E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.19159E-1	-7.98798E-1	-9.13212E0	-9.14347E0	4.48227E-3	9.62496E-2	2.73283E1	-3.26704E1	-3.26651E1	2.68143E1	2.24235E-9	2.51723E-3	2.51723E-3	6.28737E-3	2.42041E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.18777E-1	-7.98893E-1	-9.13236E0	-9.14333E0	4.93526E-3	9.58681E-2	2.73033E1	-3.26644E1	-3.2616E1	2.68454E1	2.23744E-9	2.52312E-3	2.52312E-3	6.31949E-3	2.40491E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.18801E-1	-7.99012E-1	-9.13231E0	-9.14338E0	4.45843E-3	9.60827E-2	2.73472E1	-3.26561E1	-3.26356E1	2.68268E1	2.24109E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.42809E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.19016E-1	-7.99298E-1	-9.13239E0	-9.1435E0	4.64916E-3	9.62257E-2	2.73508E1	-3.26567E1	-3.26104E1	2.68325E1	2.23964E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41405E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.18992E-1	-7.99036E-1	-9.13212E0	-9.14366E0	4.52995E-3	9.61304E-2	2.73201E1	-3.26753E1	-3.26554E1	2.68587E1	2.23138E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41337E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.19135E-1	-7.99227E-1	-9.13212E0	-9.14345E0	4.64916E-3	9.62257E-2	2.73484E1	-3.26687E1	-3.26567E1	2.68456E1	2.23332E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41127E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.19325E-1	-7.9906E-1	-9.1325E0	-9.1433E0	4.95911E-3	9.61781E-2	2.73424E1	-3.2645E1	-3.26419E1	2.684E1	2.24459E-9	2.51915E-3	2.51915E-3	6.29067E-3	2.40839E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.19039E-1	-7.99203E-1	-9.13236E0	-9.14342E0	4.69685E-3	9.61781E-2	2.73098E1	-3.26903E1	-3.25977E1	2.68626E1	2.2372E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.42177E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.19039E-1	-7.98988E-1	-9.13229E0	-9.1435E0	4.8399E-3	9.62973E-2	2.73128E1	-3.26921E1	-3.26531E1	2.6825E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41405E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.1923E-1	-7.99227E-1	-9.13217E0	-9.14338E0	4.3869E-3	9.61781E-2	2.73116E1	-3.26667E1	-3.25971E1	2.68262E1	2.23773E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.40994E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.19421E-1	-7.98821E-1	-9.1321E0	-9.14366E0	4.673E-3	9.62734E-2	2.73051E1	-3.26691E1	-3.26526E1	2.68364E1	2.23869E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.42024E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.19135E-1	-7.98845E-1	-9.13248E0	-9.14364E0	4.41074E-3	9.63688E-2	2.7346E1	-3.2638E1	-3.26368E1	2.6834E1	2.23773E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.40788E-2