[Scan]
initial_time=2016-01-15T21:08:43
final_time=2016-01-15T21:09:03
ip_count=19
run=1023
dataset=2
scan=113
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0968E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.19039E-1
ql1_imon=1.36859E-8
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=1.96606E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=2.70474E-10
ql4_vset=
ql4_vmon=-9.14304E0
ql4_imon=7.0715E-11
mult1=-9.84219E-9
mult2=-2.74057E-9
rf_tmon=-2.70831E-3
rf_agc=3.37279E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.7097E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70633E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.88278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.57795E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34778E0
lens1_imon=3.10248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63803E1
os_ef1alow_imon=2.96653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.52816E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84701E1
cs_ef1a_imon=2.94047E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.33246E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.21936E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1471E1
os_ea1_imon=2.36275E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=1.17811E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=2.99885E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.34635E-8
tplens_vset=1.4E-1
tplens_vmon=1.6898E0
tplens_imon=-4.51082E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26103E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.5501E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03077E2
lens6_imon=2.98049E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=4.14122E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=1.76672E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.16419E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74397E1
cs_ef2b_imon=3.1257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46092E0
os_ea2_imon=-8.2272E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71657E1
cs_ef2a_imon=3.13995E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04587E0
os_ef2alow_imon=-2.84913E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88543E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11552E1
os_restr2_imon=3.39781E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.27592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02111E1
cs_anode2_imon=2.25897E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.11157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68731E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.45052E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.86605E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09075E0
cs_ionaccel_imon=-1.67797E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02134E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5666E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.11894E-1
window_imon=-5.79787E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.38872E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-4.68579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.44015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37307E0
defgridb_imon=5.84553E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33418E1
os_fil1_imon=9.40242E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07399E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65323E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30775E1
cs_fil1_imon=9.96107E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62789E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67243E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77914E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72554E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37642E-1
cs_fil2_imon=-2.57072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.9176E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22582E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41471E-2
chamber_ion_pmon=2.23731E-9
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.32186E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.18872E-1	-7.98941E-1	-9.13229E0	-9.14321E0	4.22001E-3	9.60827E-2	2.73204E1	-3.26868E1	-3.26266E1	2.68522E1	2.24155E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.40378E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.19159E-1	-7.98941E-1	-9.13246E0	-9.14345E0	4.24385E-3	9.60588E-2	2.7321E1	-3.26909E1	-3.26376E1	2.68375E1	2.23583E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.41199E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.19039E-1	-7.98774E-1	-9.13227E0	-9.14345E0	4.43459E-3	9.59396E-2	2.73283E1	-3.26816E1	-3.2582E1	2.68395E1	2.23369E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.41052E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.18753E-1	-7.98798E-1	-9.1327E0	-9.1434E0	4.41074E-3	9.60112E-2	2.73339E1	-3.26999E1	-3.26122E1	2.68526E1	2.23918E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.41876E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18729E-1	-7.9875E-1	-9.13205E0	-9.14333E0	4.62532E-3	9.6035E-2	2.73237E1	-3.26549E1	-3.26603E1	2.68563E1	2.24012E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.41546E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18753E-1	-7.98965E-1	-9.13246E0	-9.1433E0	4.45843E-3	9.59396E-2	2.73315E1	-3.26567E1	-3.26182E1	2.68635E1	2.23138E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.41337E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18825E-1	-7.98893E-1	-9.13217E0	-9.14333E0	4.29153E-3	9.59158E-2	2.73252E1	-3.26573E1	-3.26054E1	2.67949E1	2.23818E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.19063E-1	-7.98774E-1	-9.13208E0	-9.14326E0	4.05312E-3	9.59158E-2	2.7311E1	-3.26691E1	-3.26236E1	2.68166E1	2.23773E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.41405E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.18896E-1	-7.98774E-1	-9.13215E0	-9.14316E0	4.29153E-3	9.60112E-2	2.73321E1	-3.26645E1	-3.26585E1	2.6831E1	2.23487E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.42024E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.18992E-1	-7.98893E-1	-9.13219E0	-9.14333E0	4.29153E-3	9.59396E-2	2.73468E1	-3.26706E1	-3.26451E1	2.68215E1	2.23623E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.42598E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.19087E-1	-7.98941E-1	-9.1321E0	-9.1434E0	4.24385E-3	9.61065E-2	2.73269E1	-3.26647E1	-3.26535E1	2.68051E1	2.23869E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.43681E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.18992E-1	-7.99036E-1	-9.13191E0	-9.14333E0	4.12464E-3	9.60588E-2	2.73629E1	-3.26644E1	-3.26136E1	2.68296E1	2.23764E-9	2.51693E-3	2.51693E-3	6.29067E-3	2.42336E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.19039E-1	-7.98798E-1	-9.13222E0	-9.14319E0	4.1008E-3	9.62973E-2	2.73111E1	-3.26615E1	-3.26044E1	2.68563E1	2.23678E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.41199E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.19087E-1	-7.98702E-1	-9.13239E0	-9.14345E0	4.07696E-3	9.63211E-2	2.73135E1	-3.26404E1	-3.26176E1	2.68286E1	2.23623E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.42177E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.19063E-1	-7.98845E-1	-9.13219E0	-9.14333E0	4.52995E-3	9.63688E-2	2.73387E1	-3.26753E1	-3.26188E1	2.68034E1	2.23915E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.40918E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.18992E-1	-7.98798E-1	-9.13212E0	-9.14342E0	4.45843E-3	9.63926E-2	2.73207E1	-3.26657E1	-3.26488E1	2.68621E1	2.23818E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.41337E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18992E-1	-7.99012E-1	-9.13236E0	-9.14323E0	4.52995E-3	9.6488E-2	2.73297E1	-3.27017E1	-3.26146E1	2.68117E1	2.24207E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.19087E-1	-7.99131E-1	-9.13234E0	-9.14299E0	4.19617E-3	9.61304E-2	2.72853E1	-3.26248E1	-3.26543E1	2.6798E1	2.24304E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.40918E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.18944E-1	-7.99155E-1	-9.13215E0	-9.14319E0	4.17233E-3	9.59873E-2	2.73074E1	-3.26619E1	-3.2626E1	2.68412E1	2.24499E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.43231E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0968E0	-8.19039E-1	-7.99203E-1	-9.13208E0	-9.14304E0	4.22001E-3	9.62019E-2	2.73257E1	-3.26476E1	-3.26103E1	2.68731E1	2.23731E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.41471E-2