[Scan]
initial_time=2016-01-15T21:09:37
final_time=2016-01-15T21:09:56
ip_count=19
run=1023
dataset=2
scan=115
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.1892E-1
ql1_imon=1.35976E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.0004E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=2.61378E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=5.29528E-11
mult1=-9.34568E-9
mult2=-2.6527E-9
rf_tmon=-4.32661E-3
rf_agc=3.19287E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.70029E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19789E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53951E1
cs_ef1b_imon=2.85776E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04711E1
cs_ea1_imon=2.57087E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35545E0
lens1_imon=2.69899E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65697E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03413E1
cs_ea2_imon=1.51683E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84591E1
cs_ef1a_imon=2.96028E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.33465E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12322E1
os_restr1_imon=4.25168E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15016E1
os_ea1_imon=2.36452E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63502E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.1774E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=2.99364E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.34594E-8
tplens_vset=1.4E-1
tplens_vmon=1.66385E0
tplens_imon=-4.12148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26054E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27074E1
iondef2_imon=1.55258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03021E2
lens6_imon=2.98056E-4
ql6_vset=1.0E-1
ql6_vmon=9.5892E-2
ql6_imon=4.1447E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=1.79645E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33498E1
lens5b_imon=2.1557E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42612E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.0046E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.16428E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05398E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06498E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11257E1
os_restr2_imon=3.4416E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.24438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72962E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68611E1
iondef4_imon=1.10067E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.45838E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.86207E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.80655E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47337E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56683E1
einzel_imon=7.8477E-6
window_vset=0.0E0
window_vmon=2.31008E-1
window_imon=-8.71708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.38956E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.43307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.1905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25201E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33377E1
os_fil1_imon=9.4366E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65434E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30716E1
cs_fil1_imon=9.97109E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62546E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67274E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.77107E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.40994E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94538E-1
res40_imon=-2.36607E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.19039E-1	-7.99084E-1	-9.13179E0	-9.14328E0	4.43459E-3	9.61065E-2	2.7361E1	-3.26615E1	-3.26212E1	2.67956E1	2.23392E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.42851E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.18634E-1	-7.98678E-1	-9.13191E0	-9.14304E0	4.62532E-3	9.6035E-2	2.73021E1	-3.26741E1	-3.26266E1	2.68593E1	2.23915E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.43654E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.18515E-1	-7.98774E-1	-9.13188E0	-9.14314E0	4.62532E-3	9.59396E-2	2.73328E1	-3.26732E1	-3.26443E1	2.67992E1	2.2372E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.42598E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18515E-1	-7.99012E-1	-9.132E0	-9.14328E0	4.8399E-3	9.61065E-2	2.73231E1	-3.26771E1	-3.26392E1	2.68076E1	2.23678E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.42437E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18801E-1	-7.99179E-1	-9.13212E0	-9.14297E0	4.76837E-3	9.61542E-2	2.73526E1	-3.26885E1	-3.26543E1	2.68304E1	2.24207E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.42387E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18872E-1	-7.99084E-1	-9.13217E0	-9.14295E0	4.52995E-3	9.57489E-2	2.74107E1	-3.26526E1	-3.26461E1	2.68574E1	2.24012E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.43654E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.18753E-1	-7.98845E-1	-9.13222E0	-9.14307E0	4.81606E-3	9.5892E-2	2.73207E1	-3.26476E1	-3.26422E1	2.68502E1	2.23918E-9	2.51603E-3	2.51603E-3	6.33388E-3	2.42688E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.18706E-1	-7.9875E-1	-9.13222E0	-9.14321E0	4.72069E-3	9.58681E-2	2.73472E1	-3.26681E1	-3.2626E1	2.68743E1	2.24086E-9	2.51953E-3	2.51953E-3	6.3074E-3	2.41937E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18849E-1	-7.98869E-1	-9.13184E0	-9.14328E0	4.64916E-3	9.60112E-2	2.73448E1	-3.26308E1	-3.26392E1	2.6825E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.18992E-1	-7.99036E-1	-9.13184E0	-9.14326E0	4.64916E-3	9.58204E-2	2.73424E1	-3.26549E1	-3.26452E1	2.68496E1	2.24109E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.40499E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.19159E-1	-7.9875E-1	-9.13217E0	-9.14338E0	4.64916E-3	9.62019E-2	2.7334E1	-3.26514E1	-3.26307E1	2.6804E1	2.24402E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41127E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.19135E-1	-7.98559E-1	-9.13222E0	-9.14323E0	4.86374E-3	9.62734E-2	2.73081E1	-3.26921E1	-3.25701E1	2.68304E1	2.23869E-9	2.53246E-3	2.53246E-3	6.3074E-3	2.42851E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.19135E-1	-7.98726E-1	-9.13231E0	-9.14333E0	4.45843E-3	9.61304E-2	2.73111E1	-3.26747E1	-3.26152E1	2.68502E1	2.24109E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.41337E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.18944E-1	-7.98535E-1	-9.1326E0	-9.14335E0	4.52995E-3	9.58204E-2	2.73231E1	-3.26735E1	-3.26428E1	2.68059E1	2.23818E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.41966E-2
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.18801E-1	-7.98702E-1	-9.13234E0	-9.14338E0	4.50611E-3	9.61065E-2	2.73538E1	-3.2608E1	-3.26615E1	2.68328E1	2.23637E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.41674E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.19016E-1	-7.98821E-1	-9.13241E0	-9.14369E0	4.55379E-3	9.61304E-2	2.73201E1	-3.26819E1	-3.26116E1	2.6846E1	2.24304E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.41756E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09688E0	-8.19039E-1	-7.98726E-1	-9.13215E0	-9.1433E0	4.62532E-3	9.61781E-2	2.73747E1	-3.26826E1	-3.25965E1	2.68436E1	2.24207E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.42177E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.18872E-1	-7.98774E-1	-9.13217E0	-9.14378E0	4.55379E-3	9.62257E-2	2.73351E1	-3.26314E1	-3.26146E1	2.68023E1	2.24155E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.41405E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.18801E-1	-7.98774E-1	-9.13217E0	-9.14347E0	4.48227E-3	9.57727E-2	2.73297E1	-3.26326E1	-3.26146E1	2.6837E1	2.23623E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.40499E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.1892E-1	-7.98869E-1	-9.13219E0	-9.14316E0	4.8399E-3	9.5892E-2	2.72962E1	-3.27074E1	-3.26054E1	2.68611E1	2.23869E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.40994E-2