[Scan]
initial_time=2016-01-15T21:10:03
final_time=2016-01-15T21:10:23
ip_count=19
run=1023
dataset=2
scan=116
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.18825E-1
ql1_imon=1.37395E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=2.01747E-9
ql3_vset=
ql3_vmon=-9.13239E0
ql3_imon=2.6412E-10
ql4_vset=
ql4_vmon=-9.14345E0
ql4_imon=6.32048E-11
mult1=-9.2511E-9
mult2=-2.8624E-9
rf_tmon=-5.97833E-3
rf_agc=3.12798E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.65318E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60545E0
bslens_imon=2.2809E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19855E1
lens5a_imon=2.00054E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12571E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5388E1
cs_ef1b_imon=2.85943E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02116E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05272E1
cs_ea1_imon=2.5714E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33849E0
lens1_imon=2.83084E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64414E1
os_ef1alow_imon=2.94944E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03114E1
cs_ea2_imon=1.51484E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84686E1
cs_ef1a_imon=2.95819E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.33871E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1118E1
os_restr1_imon=4.29471E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14918E1
os_ea1_imon=2.35094E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64138E1
os_ef1bup_imon=3.05891E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24399E0
cs_ionrep_imon=1.20483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9197E2
cs_nozzle_imon=1.93605E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=3.00393E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.35911E-8
tplens_vset=1.4E-1
tplens_vmon=1.68361E0
tplens_imon=-3.90912E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.47737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.52604E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03047E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.59873E-2
ql6_imon=4.15332E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29022E0
ionrepsh_imon=1.80976E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3383E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74607E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46218E0
os_ea2_imon=-1.62177E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00229E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71477E1
cs_ef2a_imon=3.12994E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04402E0
os_ef2alow_imon=-2.43696E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78233E-1
os_ef2bup_imon=-5.42916E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.43062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.27057E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01693E1
cs_anode2_imon=2.24834E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.09144E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6814E1
iondef4_imon=1.08698E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.40923E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.88464E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08635E0
cs_ionaccel_imon=-1.73635E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02136E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56624E1
einzel_imon=7.63432E-6
window_vset=0.0E0
window_vmon=3.08042E-1
window_imon=-8.16799E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.38821E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-2.0863E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.19858E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.56612E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58863E0
defgridb_imon=6.27158E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3339E1
os_fil1_imon=9.42396E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05115E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=9.96109E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61991E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66772E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1182E-2
os_fil2_imon=-2.68309E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03631E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56055E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37168E-1
cs_fil2_imon=-2.48036E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.09136E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22619E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.41127E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40096E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77162E-1
res40_imon=-2.31046E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.18968E-1	-7.99012E-1	-9.13265E0	-9.14299E0	5.22137E-3	9.59158E-2	2.73375E1	-3.26669E1	-3.26152E1	2.68282E1	2.24538E-9	2.52828E-3	2.52828E-3	6.3148E-3	2.40583E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.18944E-1	-7.99227E-1	-9.13222E0	-9.1428E0	5.03063E-3	9.61065E-2	2.73594E1	-3.26903E1	-3.26142E1	2.68645E1	2.24012E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.42809E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.18849E-1	-7.99084E-1	-9.13241E0	-9.14299E0	4.72069E-3	9.56535E-2	2.73352E1	-3.26868E1	-3.26451E1	2.68224E1	2.23911E-9	2.51611E-3	2.51611E-3	6.3131E-3	2.42939E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18729E-1	-7.98941E-1	-9.13236E0	-9.14326E0	4.88758E-3	9.59635E-2	2.73201E1	-3.26807E1	-3.26278E1	2.68275E1	2.23544E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.42282E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.18968E-1	-7.99036E-1	-9.132E0	-9.1433E0	4.72069E-3	9.63211E-2	2.73027E1	-3.26819E1	-3.26038E1	2.68163E1	2.24109E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.40291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.19063E-1	-7.9937E-1	-9.13224E0	-9.14309E0	4.62532E-3	9.61304E-2	2.73112E1	-3.26707E1	-3.26346E1	2.68331E1	2.23915E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.19254E-1	-7.99084E-1	-9.13205E0	-9.14311E0	4.72069E-3	9.61065E-2	2.73098E1	-3.26738E1	-3.26236E1	2.68142E1	2.23429E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.42598E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18658E-1	-7.99036E-1	-9.13215E0	-9.14335E0	4.55379E-3	9.60588E-2	2.7412E1	-3.26482E1	-3.26008E1	2.68354E1	2.23429E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.42598E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.19087E-1	-7.98965E-1	-9.13224E0	-9.14314E0	4.62532E-3	9.62973E-2	2.73183E1	-3.26687E1	-3.262E1	2.68418E1	2.23915E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.42387E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.19159E-1	-7.98798E-1	-9.13239E0	-9.14328E0	4.81606E-3	9.62019E-2	2.73635E1	-3.26272E1	-3.25806E1	2.68202E1	2.23623E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.41127E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.18753E-1	-7.98774E-1	-9.13231E0	-9.1429E0	4.95911E-3	9.63926E-2	2.72991E1	-3.27257E1	-3.25251E1	2.68376E1	2.23964E-9	2.52599E-3	2.52599E-3	6.29128E-3	2.42437E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.18825E-1	-7.98965E-1	-9.13253E0	-9.14295E0	4.8399E-3	9.63926E-2	2.73303E1	-3.26693E1	-3.26134E1	2.68857E1	2.23915E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.42177E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18515E-1	-7.98988E-1	-9.13241E0	-9.14311E0	4.81606E-3	9.62257E-2	2.73442E1	-3.26242E1	-3.2632E1	2.68244E1	2.23187E-9	2.51716E-3	2.51716E-3	6.3074E-3	2.41756E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.18419E-1	-7.9875E-1	-9.13236E0	-9.14333E0	4.45843E-3	9.61781E-2	2.72862E1	-3.26337E1	-3.26366E1	2.68587E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.18563E-1	-7.99155E-1	-9.13215E0	-9.1433E0	4.64916E-3	9.5892E-2	2.73742E1	-3.26711E1	-3.26272E1	2.68136E1	2.23487E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.43681E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18801E-1	-7.98917E-1	-9.13208E0	-9.14342E0	4.62532E-3	9.59396E-2	2.73502E1	-3.26777E1	-3.26122E1	2.68667E1	2.24012E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.41966E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.18825E-1	-7.98988E-1	-9.13222E0	-9.14314E0	4.74453E-3	9.61542E-2	2.73249E1	-3.26561E1	-3.26284E1	2.68308E1	2.23818E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.18634E-1	-7.98988E-1	-9.13236E0	-9.14297E0	4.74453E-3	9.60588E-2	2.72817E1	-3.26338E1	-3.26885E1	2.68277E1	2.23623E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.42387E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.18658E-1	-7.98774E-1	-9.132E0	-9.14316E0	4.79221E-3	9.57251E-2	2.73116E1	-3.26679E1	-3.2616E1	2.68082E1	2.23678E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.42851E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.18825E-1	-7.98917E-1	-9.13239E0	-9.14345E0	4.74453E-3	9.59873E-2	2.73411E1	-3.26885E1	-3.2629E1	2.6814E1	2.23623E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.41127E-2