[Scan]
initial_time=2016-01-15T21:10:30
final_time=2016-01-15T21:10:49
ip_count=19
run=1023
dataset=2
scan=117
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08855E-4
ql1_vset=
ql1_vmon=-8.19039E-1
ql1_imon=1.36049E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=1.97352E-9
ql3_vset=
ql3_vmon=-9.13234E0
ql3_imon=2.58398E-10
ql4_vset=
ql4_vmon=-9.14352E0
ql4_imon=6.3014E-11
mult1=-1.02581E-8
mult2=-2.74456E-9
rf_tmon=-6.05054E-3
rf_agc=3.20899E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.67598E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.62788E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19352E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.8753E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04285E1
cs_ea1_imon=2.56239E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35754E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65119E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.50397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84875E1
cs_ef1a_imon=2.96216E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.33903E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11748E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.37709E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.18602E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.9654E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.33942E-8
tplens_vset=1.4E-1
tplens_vmon=1.68289E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98003E-4
ql6_vset=1.0E-1
ql6_vmon=9.57251E-2
ql6_imon=4.23825E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=1.77975E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34036E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.1074E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43595E0
os_ea2_imon=-8.29274E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14242E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.41301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.27369E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.24425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7266E1
iondef1_imon=1.11139E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68294E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.39857E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.89937E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-6.04886E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8272E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.40226E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50082E3
multb_neg_imon=7.54864E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33402E1
os_fil1_imon=9.43099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06789E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3074E1
cs_fil1_imon=9.95627E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66803E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60766E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.15753E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22461E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=2.41817E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25965E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.19087E-1	-7.98702E-1	-9.13219E0	-9.14347E0	4.62532E-3	9.60112E-2	2.72802E1	-3.26561E1	-3.26306E1	2.6831E1	2.2372E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.41966E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.18849E-1	-7.99108E-1	-9.13236E0	-9.14326E0	4.33922E-3	9.5892E-2	2.72696E1	-3.26242E1	-3.26432E1	2.68707E1	2.24106E-9	2.52025E-3	2.52025E-3	6.30212E-3	2.42282E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.18777E-1	-7.98941E-1	-9.13229E0	-9.14361E0	4.60148E-3	9.61304E-2	2.73399E1	-3.26638E1	-3.25788E1	2.68684E1	2.23665E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.43842E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.19063E-1	-7.99108E-1	-9.1321E0	-9.14354E0	4.64916E-3	9.59158E-2	2.73617E1	-3.26632E1	-3.26272E1	2.68046E1	2.23869E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.42024E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.19135E-1	-7.98869E-1	-9.1321E0	-9.14333E0	4.31538E-3	9.59396E-2	2.73646E1	-3.26717E1	-3.26182E1	2.67956E1	2.23678E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.41405E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.19278E-1	-7.98726E-1	-9.13205E0	-9.14321E0	4.64916E-3	9.60112E-2	2.72522E1	-3.26362E1	-3.26506E1	2.68082E1	2.23623E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.19111E-1	-7.99036E-1	-9.13184E0	-9.1434E0	4.26769E-3	9.60588E-2	2.73153E1	-3.26561E1	-3.26254E1	2.67974E1	2.22916E-9	2.51096E-3	2.51096E-3	6.31817E-3	2.41817E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.19278E-1	-7.98583E-1	-9.13205E0	-9.14347E0	4.19617E-3	9.61304E-2	2.72985E1	-3.26416E1	-3.26446E1	2.68905E1	2.23963E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.41907E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.19087E-1	-7.98607E-1	-9.13215E0	-9.14314E0	4.55379E-3	9.61304E-2	2.72835E1	-3.26158E1	-3.25966E1	2.68569E1	2.23818E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.42598E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18992E-1	-7.98631E-1	-9.13181E0	-9.14328E0	4.74453E-3	9.57966E-2	2.73472E1	-3.26624E1	-3.26602E1	2.68881E1	2.23332E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.42598E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.18801E-1	-7.9906E-1	-9.13179E0	-9.14347E0	4.86374E-3	9.61542E-2	2.73308E1	-3.26621E1	-3.26383E1	2.68166E1	2.23598E-9	2.51679E-3	2.51679E-3	6.31779E-3	2.42931E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.18872E-1	-7.99108E-1	-9.13222E0	-9.14357E0	4.74453E-3	9.63211E-2	2.72806E1	-3.26474E1	-3.26358E1	2.68184E1	2.24062E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.41052E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.18896E-1	-7.99108E-1	-9.1321E0	-9.14323E0	4.88758E-3	9.64165E-2	2.73021E1	-3.26254E1	-3.26372E1	2.68154E1	2.23963E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.40839E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.18968E-1	-7.98845E-1	-9.13217E0	-9.14311E0	4.8399E-3	9.62496E-2	2.73261E1	-3.26326E1	-3.2611E1	2.68268E1	2.24084E-9	2.51918E-3	2.51918E-3	6.31012E-3	2.41475E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.19516E-1	-7.98774E-1	-9.132E0	-9.14328E0	4.76837E-3	9.63211E-2	2.72973E1	-3.26506E1	-3.26554E1	2.68635E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.19421E-1	-7.98917E-1	-9.13236E0	-9.14342E0	4.95911E-3	9.60827E-2	2.73147E1	-3.26536E1	-3.26212E1	2.68629E1	2.23964E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.42024E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.18896E-1	-7.98821E-1	-9.13219E0	-9.14309E0	4.95911E-3	9.60112E-2	2.7298E1	-3.26579E1	-3.2662E1	2.68406E1	2.24012E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.18777E-1	-7.99131E-1	-9.13253E0	-9.14335E0	4.74453E-3	9.62496E-2	2.73151E1	-3.26673E1	-3.26484E1	2.68424E1	2.24109E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.41127E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09673E0	-8.19182E-1	-7.99108E-1	-9.13231E0	-9.14319E0	4.673E-3	9.63449E-2	2.72827E1	-3.2652E1	-3.2672E1	2.68499E1	2.23487E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.4223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.19039E-1	-7.98798E-1	-9.13234E0	-9.14352E0	4.72069E-3	9.57251E-2	2.7266E1	-3.26633E1	-3.2632E1	2.68294E1	2.23869E-9	2.52061E-3	2.52061E-3	6.35059E-3	2.41817E-2