[Scan]
initial_time=2016-01-15T21:10:57
final_time=2016-01-15T21:11:16
ip_count=19
run=1023
dataset=2
scan=118
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.19087E-1
ql1_imon=1.36297E-8
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=2.04926E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=2.56205E-10
ql4_vset=
ql4_vmon=-9.14292E0
ql4_imon=6.50883E-11
mult1=-9.33101E-9
mult2=-2.74057E-9
rf_tmon=-4.01975E-3
rf_agc=3.24924E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.69001E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.4123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19848E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.86918E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04666E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03979E1
cs_ea1_imon=2.57016E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35781E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.52887E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84767E1
cs_ef1a_imon=2.94234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.33688E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11742E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.33798E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=1.20183E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02194E1
cs_anode1_imon=2.98703E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.34566E-8
tplens_vset=1.4E-1
tplens_vmon=1.69511E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.54196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03024E2
lens6_imon=2.98201E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.20055E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=1.77309E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7497E1
cs_ef2b_imon=3.1074E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4621E0
os_ea2_imon=-8.72271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03714E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.24454E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.44076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.26389E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.22911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.1275E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68635E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.44112E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.87386E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.86419E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.38926E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92498E3
multa_neg_imon=8.34081E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=7.35685E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.16053E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5532E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.403E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06909E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65524E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30731E1
cs_fil1_imon=9.95464E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6708E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91401E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57874E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38715E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.79714E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.42387E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61695E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.19159E-1	-7.99131E-1	-9.13243E0	-9.14328E0	4.64916E-3	9.60827E-2	2.73466E1	-3.26789E1	-3.25821E1	2.68274E1	2.23773E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.41817E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.19373E-1	-7.98965E-1	-9.13243E0	-9.1433E0	4.673E-3	9.58443E-2	2.73651E1	-3.26842E1	-3.26003E1	2.68532E1	2.23623E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.41966E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.19373E-1	-7.99084E-1	-9.13234E0	-9.14314E0	5.00679E-3	9.62019E-2	2.7326E1	-3.27094E1	-3.25773E1	2.68679E1	2.23863E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.41907E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.19325E-1	-7.99179E-1	-9.13219E0	-9.14335E0	4.8399E-3	9.65118E-2	2.73484E1	-3.26158E1	-3.26506E1	2.68328E1	2.23918E-9	2.51919E-3	2.51919E-3	6.33388E-3	2.42079E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.19254E-1	-7.99203E-1	-9.13241E0	-9.14338E0	4.81606E-3	9.64642E-2	2.72961E1	-3.26717E1	-3.25846E1	2.68611E1	2.23964E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.41611E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.19159E-1	-7.9906E-1	-9.13205E0	-9.14347E0	4.74453E-3	9.64642E-2	2.72762E1	-3.26838E1	-3.25776E1	2.68514E1	2.2372E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.40918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.19087E-1	-7.9906E-1	-9.13217E0	-9.14326E0	4.43459E-3	9.64403E-2	2.73129E1	-3.265E1	-3.25791E1	2.68713E1	2.24012E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.42177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.19063E-1	-7.98869E-1	-9.13191E0	-9.14321E0	4.81606E-3	9.63926E-2	2.73363E1	-3.26747E1	-3.2635E1	2.68334E1	2.24012E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.42177E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.19039E-1	-7.99131E-1	-9.13193E0	-9.14328E0	5.10216E-3	9.62019E-2	2.73027E1	-3.26482E1	-3.26242E1	2.68154E1	2.23818E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.41337E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.18968E-1	-7.99203E-1	-9.13196E0	-9.14342E0	4.81606E-3	9.66549E-2	2.72528E1	-3.27047E1	-3.2614E1	2.67649E1	2.24304E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.41756E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.19159E-1	-7.99227E-1	-9.13219E0	-9.14338E0	4.74453E-3	9.59635E-2	2.73033E1	-3.27209E1	-3.26248E1	2.68545E1	2.23869E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.41817E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18896E-1	-7.99108E-1	-9.1321E0	-9.14352E0	4.48227E-3	9.61304E-2	2.73824E1	-3.26461E1	-3.26101E1	2.6836E1	2.23764E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.41907E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.18896E-1	-7.99155E-1	-9.13217E0	-9.14323E0	4.74453E-3	9.63926E-2	2.7352E1	-3.26554E1	-3.26536E1	2.68356E1	2.23964E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.40994E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.19087E-1	-7.9906E-1	-9.13229E0	-9.14319E0	4.60148E-3	9.61542E-2	2.74037E1	-3.26321E1	-3.25972E1	2.68016E1	2.24402E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.40499E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.18992E-1	-7.98988E-1	-9.13224E0	-9.14333E0	4.93526E-3	9.6035E-2	2.73327E1	-3.26789E1	-3.26326E1	2.68556E1	2.23665E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.42336E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.18777E-1	-7.98988E-1	-9.13212E0	-9.14342E0	4.72069E-3	9.60112E-2	2.73369E1	-3.26783E1	-3.26134E1	2.69193E1	2.23773E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.42437E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1892E-1	-7.99298E-1	-9.13191E0	-9.14376E0	4.57764E-3	9.62019E-2	2.73086E1	-3.26278E1	-3.26219E1	2.68198E1	2.24012E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.41966E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.18706E-1	-7.98988E-1	-9.13184E0	-9.14321E0	4.64916E-3	9.61542E-2	2.73428E1	-3.27009E1	-3.26384E1	2.68112E1	2.24012E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41546E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.18896E-1	-7.99036E-1	-9.13184E0	-9.14309E0	4.79221E-3	9.59158E-2	2.73393E1	-3.26783E1	-3.26296E1	2.68232E1	2.24347E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.41611E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.19087E-1	-7.99108E-1	-9.13212E0	-9.14292E0	4.76837E-3	9.58443E-2	2.73237E1	-3.26518E1	-3.26332E1	2.68635E1	2.23526E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.42387E-2