[Scan]
initial_time=2016-01-15T21:11:50
final_time=2016-01-15T21:12:09
ip_count=19
run=1023
dataset=2
scan=120
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08749E-4
ql1_vset=
ql1_vmon=-8.18896E-1
ql1_imon=1.36861E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=1.99785E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=2.61664E-10
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=5.90086E-11
mult1=-9.05407E-9
mult2=-2.77849E-9
rf_tmon=-5.22741E-3
rf_agc=3.26607E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.68927E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68922E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19665E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04948E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.84899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04669E1
cs_ea1_imon=2.53972E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3702E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65035E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.50515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.97045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.33664E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.25526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14934E1
os_ea1_imon=2.34895E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25505E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.99063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20375E0
olens4_imon=3.34946E-8
tplens_vset=1.4E-1
tplens_vmon=1.68037E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.56037E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03064E2
lens6_imon=2.98247E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=4.13249E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=1.78406E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34059E1
lens5b_imon=2.15676E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.13947E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42022E0
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00775E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11412E1
os_restr2_imon=3.44329E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29079E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73598E1
iondef1_imon=1.11086E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.41977E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.85917E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8272E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-8.1752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.28607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.52509E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.84364E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.1959E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.41693E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65365E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30769E1
cs_fil1_imon=9.97789E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62113E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67283E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22513E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=2.42079E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25965E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.19159E-1	-7.9906E-1	-9.13217E0	-9.14323E0	4.8399E-3	9.58681E-2	2.73484E1	-3.26765E1	-3.2653E1	2.68118E1	2.23678E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.42851E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18753E-1	-7.98893E-1	-9.13205E0	-9.14316E0	4.55379E-3	9.62257E-2	2.73749E1	-3.27276E1	-3.26168E1	2.684E1	2.24597E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.42809E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.18801E-1	-7.99108E-1	-9.13208E0	-9.14326E0	4.673E-3	9.63211E-2	2.73178E1	-3.26196E1	-3.26446E1	2.68117E1	2.23963E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.43195E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18825E-1	-7.99179E-1	-9.13205E0	-9.14333E0	4.8399E-3	9.62257E-2	2.73417E1	-3.27041E1	-3.2599E1	2.68244E1	2.24243E-9	2.51472E-3	2.51472E-3	6.3282E-3	2.42731E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.1892E-1	-7.99179E-1	-9.13227E0	-9.14321E0	4.74453E-3	9.62734E-2	2.73004E1	-3.2675E1	-3.25835E1	2.68406E1	2.23818E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.4302E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0968E0	-8.18682E-1	-7.99251E-1	-9.13212E0	-9.14333E0	4.72069E-3	9.62734E-2	2.73171E1	-3.26362E1	-3.26254E1	2.68274E1	2.23429E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.41546E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.18658E-1	-7.98869E-1	-9.13196E0	-9.14359E0	4.62532E-3	9.62734E-2	2.72937E1	-3.26945E1	-3.26368E1	2.6849E1	2.2372E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.41337E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09696E0	-8.1892E-1	-7.99155E-1	-9.13217E0	-9.14373E0	4.79221E-3	9.63926E-2	2.73216E1	-3.26077E1	-3.26644E1	2.68719E1	2.23623E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41127E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.18849E-1	-7.99108E-1	-9.13227E0	-9.14357E0	4.8399E-3	9.64165E-2	2.73381E1	-3.26723E1	-3.26014E1	2.68298E1	2.2406E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.42851E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.18706E-1	-7.99084E-1	-9.13217E0	-9.14359E0	4.74453E-3	9.62734E-2	2.73243E1	-3.26488E1	-3.26476E1	2.68988E1	2.23297E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.40788E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.18467E-1	-7.98988E-1	-9.13219E0	-9.14354E0	4.55379E-3	9.64403E-2	2.73345E1	-3.26879E1	-3.26056E1	2.68159E1	2.22974E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.41907E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.18634E-1	-7.98941E-1	-9.13253E0	-9.14361E0	5.05447E-3	9.62019E-2	2.73327E1	-3.2641E1	-3.26272E1	2.68593E1	2.22654E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.41546E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.18825E-1	-7.98988E-1	-9.13229E0	-9.14376E0	5.126E-3	9.65357E-2	2.73482E1	-3.26614E1	-3.25995E1	2.68292E1	2.22558E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.43442E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.18539E-1	-7.99036E-1	-9.13239E0	-9.14335E0	4.93526E-3	9.64642E-2	2.73181E1	-3.26732E1	-3.25971E1	2.68701E1	2.21401E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.42437E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.18586E-1	-7.98893E-1	-9.13243E0	-9.14366E0	4.64916E-3	9.64642E-2	2.73431E1	-3.26505E1	-3.25825E1	2.68442E1	2.21401E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.42809E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09673E0	-8.18634E-1	-7.98917E-1	-9.13246E0	-9.1434E0	4.64916E-3	9.64403E-2	2.73472E1	-3.26633E1	-3.26681E1	2.67481E1	2.21401E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41127E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.19016E-1	-7.98988E-1	-9.13229E0	-9.14354E0	4.36306E-3	9.65118E-2	2.73252E1	-3.26661E1	-3.26207E1	2.6854E1	2.21401E-9	2.50989E-3	2.50989E-3	6.29665E-3	2.4223E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.19111E-1	-7.98869E-1	-9.13205E0	-9.14352E0	4.50611E-3	9.61304E-2	2.73424E1	-3.26981E1	-3.26056E1	2.68448E1	2.21401E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.42809E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.19039E-1	-7.98726E-1	-9.13217E0	-9.14333E0	4.57764E-3	9.62019E-2	2.73647E1	-3.26614E1	-3.2688E1	2.68635E1	2.21401E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.42387E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.18896E-1	-7.98965E-1	-9.13222E0	-9.14278E0	4.52995E-3	9.63211E-2	2.73598E1	-3.26747E1	-3.2641E1	2.68556E1	2.21401E-9	2.52236E-3	2.52236E-3	6.30212E-3	2.42079E-2