[Scan]
initial_time=2016-01-15T21:12:16
final_time=2016-01-15T21:12:36
ip_count=19
run=1023
dataset=2
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.18992E-1
ql1_imon=1.3676E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.98165E-9
ql3_vset=
ql3_vmon=-9.13243E0
ql3_imon=2.2763E-10
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=6.73532E-11
mult1=-9.25877E-9
mult2=-2.56491E-9
rf_tmon=-5.60593E-3
rf_agc=3.22881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.71593E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63554E0
bslens_imon=2.21763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19565E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54096E1
cs_ef1b_imon=2.85706E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=2.556E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34424E0
lens1_imon=2.90782E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64533E1
os_ef1alow_imon=3.0131E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.5094E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.93178E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.33549E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12143E1
os_restr1_imon=4.24821E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.35284E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63357E1
os_ef1bup_imon=3.10763E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=2.95819E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.34018E-8
tplens_vset=1.4E-1
tplens_vmon=1.67329E0
tplens_imon=-3.90912E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.51896E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03037E2
lens6_imon=2.98006E-4
ql6_vset=1.0E-1
ql6_vmon=9.61304E-2
ql6_imon=4.1384E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=1.77592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3807E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.14794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11653E0
os_ef2alow_imon=-2.79352E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4878E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11737E1
os_restr2_imon=3.40303E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.24021E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.07356E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.44729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.86473E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19327E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47501E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56729E1
einzel_imon=7.50018E-6
window_vset=0.0E0
window_vmon=2.368E-1
window_imon=-4.12975E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39067E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-8.71708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.0737E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50176E3
multb_neg_imon=6.74808E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=6.29503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.40816E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07022E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65326E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=9.96148E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67115E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95869E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52052E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36269E-1
cs_fil2_imon=-2.72711E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37369E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.42437E-2
chamber_ion_pmon=2.2406E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2987E-1
res40_imon=-2.8109E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.18825E-1	-7.9906E-1	-9.13224E0	-9.14352E0	5.03063E-3	9.62019E-2	2.73171E1	-3.26284E1	-3.26194E1	2.68298E1	2.21401E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.41611E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.19159E-1	-7.98774E-1	-9.13219E0	-9.14354E0	4.69685E-3	9.60827E-2	2.73514E1	-3.26476E1	-3.26266E1	2.68478E1	2.21401E-9	2.51826E-3	2.51826E-3	6.31837E-3	2.42072E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.18872E-1	-7.98774E-1	-9.13231E0	-9.1435E0	4.88758E-3	9.63449E-2	2.73265E1	-3.26839E1	-3.26422E1	2.68372E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.18872E-1	-7.99012E-1	-9.13231E0	-9.14342E0	4.31538E-3	9.63211E-2	2.73326E1	-3.26185E1	-3.26198E1	2.68257E1	2.21401E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.42282E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.18849E-1	-7.98869E-1	-9.13229E0	-9.14304E0	4.74453E-3	9.61542E-2	2.73196E1	-3.26509E1	-3.26098E1	2.68597E1	2.21401E-9	2.5147E-3	2.5147E-3	6.34099E-3	2.42765E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.18992E-1	-7.98845E-1	-9.1326E0	-9.14347E0	4.57764E-3	9.59396E-2	2.73328E1	-3.27169E1	-3.26437E1	2.68262E1	2.21401E-9	2.51632E-3	2.51632E-3	6.34518E-3	2.42851E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18801E-1	-7.99227E-1	-9.13219E0	-9.1435E0	4.48227E-3	9.58443E-2	2.73284E1	-3.26597E1	-3.26358E1	2.68545E1	2.24036E-9	2.51972E-3	2.51972E-3	6.3074E-3	2.42517E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.18825E-1	-7.98845E-1	-9.13222E0	-9.14345E0	4.29153E-3	9.63449E-2	2.73285E1	-3.26314E1	-3.26398E1	2.6831E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.18968E-1	-7.98655E-1	-9.13227E0	-9.14314E0	4.45843E-3	9.60827E-2	2.73063E1	-3.26472E1	-3.26101E1	2.68971E1	2.24207E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.42598E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.19373E-1	-7.9875E-1	-9.13227E0	-9.14333E0	4.45843E-3	9.60588E-2	2.73316E1	-3.26667E1	-3.259E1	2.68047E1	2.2372E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.41756E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.19516E-1	-7.98559E-1	-9.13229E0	-9.14354E0	4.36306E-3	9.61781E-2	2.73584E1	-3.26572E1	-3.26823E1	2.68855E1	2.24106E-9	2.51603E-3	2.51603E-3	6.2863E-3	2.42079E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.19159E-1	-7.98821E-1	-9.13241E0	-9.14311E0	4.50611E-3	9.6035E-2	2.73249E1	-3.26284E1	-3.25966E1	2.6825E1	2.24062E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.42336E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.19182E-1	-7.98678E-1	-9.13231E0	-9.14347E0	4.62532E-3	9.61304E-2	2.73375E1	-3.26691E1	-3.26178E1	2.68124E1	2.24304E-9	2.52867E-3	2.52867E-3	6.28006E-3	2.41966E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.18992E-1	-7.99084E-1	-9.13234E0	-9.1434E0	4.81606E-3	9.62496E-2	2.72967E1	-3.26512E1	-3.27161E1	2.68528E1	2.23623E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.41546E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18968E-1	-7.98965E-1	-9.13248E0	-9.1434E0	4.62532E-3	9.60588E-2	2.73399E1	-3.26627E1	-3.25888E1	2.68202E1	2.23964E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.41199E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.19159E-1	-7.98702E-1	-9.13229E0	-9.14354E0	4.74453E-3	9.57966E-2	2.73706E1	-3.26496E1	-3.26537E1	2.69253E1	2.24597E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.41546E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.18944E-1	-7.98798E-1	-9.13208E0	-9.14335E0	4.48227E-3	9.61065E-2	2.73333E1	-3.26278E1	-3.26284E1	2.68046E1	2.24109E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.42598E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.1892E-1	-7.98726E-1	-9.13215E0	-9.14364E0	4.52995E-3	9.61304E-2	2.73405E1	-3.26708E1	-3.26172E1	2.68603E1	2.23869E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.42851E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.18968E-1	-7.98988E-1	-9.13215E0	-9.14354E0	4.88758E-3	9.60112E-2	2.73228E1	-3.26638E1	-3.26797E1	2.68202E1	2.23964E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.43266E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18992E-1	-7.9875E-1	-9.13243E0	-9.14323E0	4.45843E-3	9.61304E-2	2.73189E1	-3.26759E1	-3.26554E1	2.6825E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.42437E-2