[Scan]
initial_time=2016-01-15T21:12:43
final_time=2016-01-15T21:13:03
ip_count=19
run=1023
dataset=2
scan=122
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.18586E-1
ql1_imon=1.36551E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=1.97743E-9
ql3_vset=
ql3_vmon=-9.13215E0
ql3_imon=2.27869E-10
ql4_vset=
ql4_vmon=-9.14364E0
ql4_imon=6.48379E-11
mult1=-9.00591E-9
mult2=-2.73458E-9
rf_tmon=-4.45234E-3
rf_agc=3.33216E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.69983E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60991E0
bslens_imon=2.40925E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19236E1
lens5a_imon=1.98072E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05134E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54634E1
cs_ef1b_imon=2.85153E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0481E1
cs_ea1_imon=2.55251E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32803E0
lens1_imon=2.84439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.97541E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.53146E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.95445E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.33546E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11947E1
os_restr1_imon=4.24938E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15147E1
os_ea1_imon=2.32501E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6318E1
os_ef1bup_imon=3.05924E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19612E0
cs_ionrep_imon=1.19861E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93764E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02171E1
cs_anode1_imon=2.98664E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.3449E-8
tplens_vset=1.4E-1
tplens_vmon=1.68024E0
tplens_imon=-2.58843E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.49977E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.54062E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03068E2
lens6_imon=2.98369E-4
ql6_vset=1.0E-1
ql6_vmon=9.57966E-2
ql6_imon=4.16222E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28709E0
ionrepsh_imon=1.79483E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.16241E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74801E1
cs_ef2b_imon=3.14046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38951E0
os_ea2_imon=-8.23761E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00699E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.13971E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07701E0
os_ef2alow_imon=-2.33479E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76424E-1
os_ef2bup_imon=-5.22406E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11198E1
os_restr2_imon=3.43575E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23124E2
cs_ionfoca_imon=6.30119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02127E1
cs_anode2_imon=2.25421E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.09746E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.09626E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.42853E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.88594E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12078E0
cs_ionaccel_imon=-1.84451E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02168E2
cs_ionfocb_imon=1.47672E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55912E1
einzel_imon=7.62047E-6
window_vset=0.0E0
window_vmon=2.38181E-1
window_imon=-7.81619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.38916E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-8.78926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=7.57748E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.45909E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.07363E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59883E0
defgridb_imon=6.08121E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33381E1
os_fil1_imon=9.4272E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0688E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65419E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30789E1
cs_fil1_imon=9.94536E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62783E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66808E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18068E-2
os_fil2_imon=-2.53775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36106E-1
cs_fil2_imon=-2.40052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44186E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22637E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31902E-3
inlet_lpb_pmon=2.42226E-2
chamber_ion_pmon=2.23961E-9
chamber_cvt_pmon=2.51642E-3
foreline_cvt_pmon=2.51642E-3
chamber_tmon=1.40097E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.68939E-1
res40_imon=-2.61923E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=378
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.18634E-1	-7.98917E-1	-9.13231E0	-9.14347E0	4.91142E-3	9.62734E-2	2.73267E1	-3.26522E1	-3.26289E1	2.68082E1	2.23344E-9	2.52686E-3	2.52686E-3	6.31321E-3	2.41337E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.18229E-1	-7.98965E-1	-9.13215E0	-9.14302E0	4.95911E-3	9.64165E-2	2.73123E1	-3.26527E1	-3.26303E1	2.68464E1	2.24243E-9	2.51575E-3	2.51575E-3	6.3126E-3	2.41933E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.18419E-1	-7.99274E-1	-9.13215E0	-9.14333E0	4.74453E-3	9.59396E-2	2.73281E1	-3.26826E1	-3.25859E1	2.6843E1	2.23773E-9	2.52303E-3	2.52303E-3	6.3074E-3	2.42282E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18491E-1	-7.99084E-1	-9.13227E0	-9.14366E0	4.43459E-3	9.62496E-2	2.73588E1	-3.26832E1	-3.26236E1	2.68551E1	2.24482E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.42892E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.18491E-1	-7.99012E-1	-9.13196E0	-9.14364E0	4.69685E-3	9.58443E-2	2.73015E1	-3.2653E1	-3.26008E1	2.6837E1	2.23678E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.42851E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18634E-1	-7.99036E-1	-9.13215E0	-9.14373E0	4.72069E-3	9.59158E-2	2.73381E1	-3.26855E1	-3.2623E1	2.68827E1	2.23915E-9	2.5199E-3	2.5199E-3	6.28006E-3	2.44078E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.18586E-1	-7.9875E-1	-9.13219E0	-9.14366E0	4.33922E-3	9.60112E-2	2.73442E1	-3.26368E1	-3.2641E1	2.68545E1	2.24109E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.42177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.18515E-1	-7.98702E-1	-9.13217E0	-9.14352E0	4.3869E-3	9.56774E-2	2.73075E1	-3.27281E1	-3.25809E1	2.68382E1	2.24109E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.42598E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.18396E-1	-7.98917E-1	-9.13224E0	-9.14371E0	4.41074E-3	9.61065E-2	2.73057E1	-3.26476E1	-3.26134E1	2.68659E1	2.23623E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.41966E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09673E0	-8.18467E-1	-7.98607E-1	-9.13222E0	-9.14361E0	4.673E-3	9.60112E-2	2.73364E1	-3.26803E1	-3.26083E1	2.68448E1	2.24012E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.41756E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.18372E-1	-7.98726E-1	-9.13246E0	-9.14364E0	4.673E-3	9.6035E-2	2.73661E1	-3.2645E1	-3.26255E1	2.68272E1	2.23392E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.40994E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.18348E-1	-7.98774E-1	-9.13229E0	-9.14347E0	4.69685E-3	9.60827E-2	2.73115E1	-3.26973E1	-3.25828E1	2.68113E1	2.24012E-9	2.51854E-3	2.51854E-3	6.3023E-3	2.42184E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.18467E-1	-7.98869E-1	-9.13198E0	-9.1434E0	4.41074E-3	9.5892E-2	2.73766E1	-3.2644E1	-3.26182E1	2.6849E1	2.23487E-9	2.51557E-3	2.51557E-3	6.33112E-3	2.43536E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.18276E-1	-7.98965E-1	-9.132E0	-9.14333E0	4.81606E-3	9.5582E-2	2.73291E1	-3.26867E1	-3.2632E1	2.67986E1	2.23773E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.41611E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.18348E-1	-7.99012E-1	-9.13212E0	-9.14335E0	4.64916E-3	9.59158E-2	2.73243E1	-3.27215E1	-3.26056E1	2.68208E1	2.23915E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.43442E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.18205E-1	-7.98941E-1	-9.13239E0	-9.14323E0	4.41074E-3	9.58204E-2	2.73526E1	-3.26927E1	-3.26615E1	2.68917E1	2.23915E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.42809E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.18419E-1	-7.98941E-1	-9.13224E0	-9.14338E0	4.43459E-3	9.59396E-2	2.73075E1	-3.26428E1	-3.26188E1	2.68659E1	2.2372E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.42387E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09704E0	-8.18491E-1	-7.98941E-1	-9.13219E0	-9.14316E0	4.33922E-3	9.56535E-2	2.73473E1	-3.27146E1	-3.26317E1	2.68385E1	2.23526E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.42387E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.1861E-1	-7.98893E-1	-9.13236E0	-9.14319E0	4.52995E-3	9.57012E-2	2.73388E1	-3.26357E1	-3.2628E1	2.6853E1	2.23504E-9	2.52022E-3	2.52022E-3	6.32652E-3	2.42741E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.18586E-1	-7.98965E-1	-9.13215E0	-9.14364E0	4.26769E-3	9.57966E-2	2.73267E1	-3.26795E1	-3.26176E1	2.68262E1	2.23961E-9	2.51642E-3	2.51642E-3	6.31902E-3	2.42226E-2