[Scan]
initial_time=2016-01-15T21:13:10
final_time=2016-01-15T21:13:29
ip_count=19
run=1023
dataset=2
scan=123
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08884E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=1.36801E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.9994E-9
ql3_vset=
ql3_vmon=-9.13234E0
ql3_imon=2.406E-10
ql4_vset=
ql4_vmon=-9.1435E0
ql4_imon=7.27296E-11
mult1=-9.25877E-9
mult2=-2.7246E-9
rf_tmon=-4.76477E-3
rf_agc=3.18015E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.66539E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.33227E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1952E1
lens5a_imon=1.99353E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.86161E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.01908E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04393E1
cs_ea1_imon=2.56852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34492E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.51335E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.94702E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.3395E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14933E1
os_ea1_imon=2.33455E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91994E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.9827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.35272E-8
tplens_vset=1.4E-1
tplens_vmon=1.65946E0
tplens_imon=-4.47149E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.52921E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.55012E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.97877E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=4.10389E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=1.7675E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74417E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44376E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36467E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.07895E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68352E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.44376E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.89221E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.30557E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-8.1752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=8.16869E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.23643E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.51259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=5.94804E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33398E1
os_fil1_imon=9.43507E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65684E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30792E1
cs_fil1_imon=9.95963E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62432E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67144E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65922E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22513E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41052E-2
chamber_ion_pmon=2.24459E-9
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30771E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.18706E-1	-7.99203E-1	-9.13196E0	-9.14323E0	4.36306E-3	9.59635E-2	2.73195E1	-3.26573E1	-3.26344E1	2.68382E1	2.24402E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41546E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.18419E-1	-7.99298E-1	-9.13219E0	-9.14323E0	4.81606E-3	9.61065E-2	2.73553E1	-3.26591E1	-3.26578E1	2.68406E1	2.24109E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.42177E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.18157E-1	-7.99203E-1	-9.13205E0	-9.14369E0	4.69685E-3	9.59396E-2	2.73353E1	-3.27165E1	-3.25964E1	2.68418E1	2.23623E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.42387E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18062E-1	-7.99155E-1	-9.13236E0	-9.14333E0	4.69685E-3	9.59873E-2	2.73131E1	-3.26933E1	-3.26597E1	2.68148E1	2.2415E-9	2.5199E-3	2.5199E-3	6.31779E-3	2.42132E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18181E-1	-7.99179E-1	-9.13177E0	-9.14345E0	4.74453E-3	9.61304E-2	2.72738E1	-3.26903E1	-3.26142E1	2.68328E1	2.24161E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.43195E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.18491E-1	-7.99179E-1	-9.13212E0	-9.14316E0	4.673E-3	9.60112E-2	2.73228E1	-3.26805E1	-3.26095E1	2.68232E1	2.23526E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.42598E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.18801E-1	-7.99203E-1	-9.13198E0	-9.14326E0	4.55379E-3	9.57489E-2	2.73712E1	-3.26868E1	-3.25989E1	2.68412E1	2.23603E-9	2.51809E-3	2.51809E-3	6.31012E-3	2.42308E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.18586E-1	-7.99203E-1	-9.13184E0	-9.14347E0	4.74453E-3	9.59396E-2	2.73449E1	-3.26536E1	-3.2634E1	2.68418E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.18682E-1	-7.9906E-1	-9.13177E0	-9.14354E0	4.55379E-3	9.60112E-2	2.73514E1	-3.26868E1	-3.25721E1	2.68458E1	2.23963E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.4255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.1892E-1	-7.99012E-1	-9.13222E0	-9.14359E0	4.52995E-3	9.60588E-2	2.73454E1	-3.26338E1	-3.26651E1	2.67926E1	2.23869E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.42851E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.18825E-1	-7.98893E-1	-9.13219E0	-9.1435E0	4.76837E-3	9.56535E-2	2.73718E1	-3.26723E1	-3.26014E1	2.68101E1	2.2372E-9	2.51225E-3	2.51225E-3	6.32936E-3	2.42809E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.18777E-1	-7.99084E-1	-9.13186E0	-9.14328E0	4.93526E-3	9.57251E-2	2.73346E1	-3.26962E1	-3.26496E1	2.68395E1	2.2372E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.42809E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.18825E-1	-7.99179E-1	-9.13191E0	-9.14338E0	5.14984E-3	9.57727E-2	2.73437E1	-3.26511E1	-3.2626E1	2.68292E1	2.24388E-9	2.51393E-3	2.51393E-3	6.32858E-3	2.41067E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.18849E-1	-7.98798E-1	-9.13196E0	-9.14371E0	4.98295E-3	9.59158E-2	2.73622E1	-3.26879E1	-3.26326E1	2.68599E1	2.23863E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.40413E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18563E-1	-7.98512E-1	-9.13222E0	-9.1435E0	4.91142E-3	9.57251E-2	2.73551E1	-3.26679E1	-3.26355E1	2.68046E1	2.23679E-9	2.51755E-3	2.51755E-3	6.3074E-3	2.42057E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18825E-1	-7.98798E-1	-9.13231E0	-9.14347E0	4.88758E-3	9.62496E-2	2.7344E1	-3.26785E1	-3.26384E1	2.67577E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.18419E-1	-7.98821E-1	-9.13219E0	-9.14364E0	4.52995E-3	9.59635E-2	2.73445E1	-3.26794E1	-3.26266E1	2.68331E1	2.23369E-9	2.52418E-3	2.52418E-3	6.31019E-3	2.41907E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.18467E-1	-7.98965E-1	-9.13219E0	-9.14354E0	4.8399E-3	9.61304E-2	2.73285E1	-3.2669E1	-3.26222E1	2.68151E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.18396E-1	-7.98965E-1	-9.13241E0	-9.14352E0	4.57764E-3	9.60827E-2	2.73069E1	-3.26609E1	-3.26297E1	2.68514E1	2.24073E-9	2.52494E-3	2.52494E-3	6.33499E-3	2.41688E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.18205E-1	-7.98869E-1	-9.13234E0	-9.1435E0	4.57764E-3	9.61065E-2	2.73141E1	-3.26711E1	-3.26296E1	2.68352E1	2.24459E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.41052E-2