[Scan]
initial_time=2016-01-15T21:13:37
final_time=2016-01-15T21:13:56
ip_count=19
run=1023
dataset=2
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.18658E-1
ql1_imon=1.37221E-8
ql2_vset=
ql2_vmon=-7.99179E-1
ql2_imon=2.03631E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=2.06399E-10
ql4_vset=
ql4_vmon=-9.14361E0
ql4_imon=5.15819E-11
mult1=-9.8065E-9
mult2=-2.77887E-9
rf_tmon=-5.88673E-3
rf_agc=3.19632E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.72037E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62468E0
bslens_imon=2.38995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.96757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12561E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=2.86413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=2.57573E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33471E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65077E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03396E1
cs_ea2_imon=1.50938E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.95747E-5
olens2_vset=9.7E-1
olens2_vmon=9.69553E-1
olens2_imon=1.33981E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.2567E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14963E1
os_ea1_imon=2.34609E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27733E0
cs_ionrep_imon=1.20548E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92005E2
cs_nozzle_imon=1.93644E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.97982E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20375E0
olens4_imon=3.35274E-8
tplens_vset=1.4E-1
tplens_vmon=1.67748E0
tplens_imon=-3.73979E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26487E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26848E1
iondef2_imon=1.55228E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.98299E-4
ql6_vset=1.0E-1
ql6_vmon=9.59873E-2
ql6_imon=4.17982E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30076E0
ionrepsh_imon=1.77507E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34186E1
lens5b_imon=2.14133E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45277E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71504E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26256E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.43212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.22767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68695E1
iondef4_imon=1.11837E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.45415E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.91074E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02139E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=6.96463E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.0151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29931E0
defgridb_imon=6.31574E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33392E1
os_fil1_imon=9.41687E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65627E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=9.96155E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62186E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53419E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.41611E-2
chamber_ion_pmon=2.24442E-9
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.29259E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.18062E-1	-7.99131E-1	-9.13241E0	-9.14342E0	4.52995E-3	9.60112E-2	2.73216E1	-3.26655E1	-3.26372E1	2.68435E1	2.23988E-9	2.51809E-3	2.51809E-3	6.3074E-3	2.42935E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18253E-1	-7.98893E-1	-9.13253E0	-9.14304E0	4.86374E-3	9.6035E-2	2.73326E1	-3.26236E1	-3.26321E1	2.68244E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.183E-1	-7.98893E-1	-9.13229E0	-9.14321E0	4.98295E-3	9.61065E-2	2.73529E1	-3.26679E1	-3.26166E1	2.68256E1	2.2426E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.41907E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.18157E-1	-7.98821E-1	-9.13205E0	-9.14311E0	4.98295E-3	9.59635E-2	2.73382E1	-3.26707E1	-3.26034E1	2.68569E1	2.23964E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41199E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.18205E-1	-7.98869E-1	-9.13203E0	-9.1434E0	5.03063E-3	9.59158E-2	2.73193E1	-3.26567E1	-3.26455E1	2.68273E1	2.23171E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.40839E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18157E-1	-7.98893E-1	-9.13184E0	-9.1435E0	4.79221E-3	9.58681E-2	2.73544E1	-3.26603E1	-3.2632E1	2.68364E1	2.24251E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.43266E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.18419E-1	-7.99084E-1	-9.13177E0	-9.14342E0	4.69685E-3	9.6035E-2	2.73429E1	-3.26789E1	-3.26224E1	2.6816E1	2.24402E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.40708E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.18253E-1	-7.98988E-1	-9.13203E0	-9.14319E0	4.81606E-3	9.57966E-2	2.73039E1	-3.26368E1	-3.25936E1	2.68298E1	2.24109E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.41337E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.18443E-1	-7.99203E-1	-9.1321E0	-9.14326E0	4.33922E-3	9.58681E-2	2.73472E1	-3.26747E1	-3.26374E1	2.68737E1	2.23235E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.4302E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.18491E-1	-7.98941E-1	-9.13203E0	-9.14326E0	4.45843E-3	9.60588E-2	2.73201E1	-3.26705E1	-3.26164E1	2.67764E1	2.24304E-9	2.51116E-3	2.51116E-3	6.32386E-3	2.42387E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09294E0	-8.18563E-1	-7.98774E-1	-9.13212E0	-9.14309E0	4.45843E-3	9.57727E-2	2.73063E1	-3.26472E1	-3.26567E1	2.68118E1	2.23915E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.42598E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.18706E-1	-7.98869E-1	-9.13219E0	-9.1429E0	4.29153E-3	9.60588E-2	2.73345E1	-3.26823E1	-3.2607E1	2.68611E1	2.23332E-9	2.52264E-3	2.52264E-3	6.32112E-3	2.40813E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18586E-1	-7.98821E-1	-9.13208E0	-9.14321E0	4.43459E-3	9.58443E-2	2.73291E1	-3.26488E1	-3.2587E1	2.68148E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.18539E-1	-7.98821E-1	-9.13227E0	-9.14316E0	4.33922E-3	9.60112E-2	2.7358E1	-3.26579E1	-3.2641E1	2.68304E1	2.23235E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.42177E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.18348E-1	-7.98869E-1	-9.13253E0	-9.14304E0	4.45843E-3	9.5892E-2	2.73021E1	-3.26443E1	-3.26225E1	2.68436E1	2.24207E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.41127E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.18205E-1	-7.98798E-1	-9.13229E0	-9.14345E0	4.673E-3	9.62257E-2	2.73339E1	-3.26549E1	-3.2635E1	2.67259E1	2.23869E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.40173E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.18586E-1	-7.99203E-1	-9.13243E0	-9.14354E0	4.79221E-3	9.59396E-2	2.73165E1	-3.26879E1	-3.26338E1	2.6834E1	2.24061E-9	2.51607E-3	2.51607E-3	6.3074E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.18443E-1	-7.99036E-1	-9.13215E0	-9.14364E0	4.69685E-3	9.61781E-2	2.73635E1	-3.26254E1	-3.26248E1	2.68285E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.18706E-1	-7.9906E-1	-9.13203E0	-9.14338E0	4.81606E-3	9.6035E-2	2.73145E1	-3.26649E1	-3.26543E1	2.68238E1	2.23202E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.40994E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.18658E-1	-7.99179E-1	-9.13203E0	-9.14361E0	4.91142E-3	9.59873E-2	2.73369E1	-3.26848E1	-3.26487E1	2.68695E1	2.24442E-9	2.51096E-3	2.51096E-3	6.32356E-3	2.41611E-2