[Scan]
initial_time=2016-01-15T21:14:56
final_time=2016-01-15T21:15:16
ip_count=19
run=1023
dataset=2
scan=127
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.18682E-1
ql1_imon=1.36107E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=2.0074E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=2.09284E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=6.10352E-11
mult1=-9.46345E-9
mult2=-2.72061E-9
rf_tmon=-3.79143E-3
rf_agc=3.38443E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.6814E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62197E0
bslens_imon=2.41584E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19642E1
lens5a_imon=2.01447E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12561E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.86575E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04498E1
cs_ea1_imon=2.59387E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33245E0
lens1_imon=2.84765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.9641E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.49135E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84215E1
cs_ef1a_imon=2.95854E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.34762E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.25863E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.36452E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.07149E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25505E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.98739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.36009E-8
tplens_vset=1.4E-1
tplens_vmon=1.66208E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.54869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.14842E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28985E0
ionrepsh_imon=1.78052E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.14225E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74843E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48865E0
os_ea2_imon=-4.93555E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.14968E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06614E0
os_ef2alow_imon=-2.39734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28508E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11378E1
os_restr2_imon=3.43674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.27698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.23534E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.119E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.08295E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.44862E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.90519E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-1.99769E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5659E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.66339E-1
window_imon=-7.81352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.37101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.64189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.86134E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52072E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33433E1
os_fil1_imon=9.42287E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65917E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=9.962E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62615E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66999E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.77924E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48762E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.5881E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16548E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.1861E-1	-7.99084E-1	-9.13262E0	-9.1433E0	4.76837E-3	9.63449E-2	2.73123E1	-3.26392E1	-3.2617E1	2.68238E1	2.23964E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.41817E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.18801E-1	-7.99274E-1	-9.13236E0	-9.14307E0	4.57764E-3	9.61065E-2	2.73051E1	-3.26603E1	-3.2596E1	2.68469E1	2.23429E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.4302E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.18467E-1	-7.99322E-1	-9.13219E0	-9.14299E0	4.62532E-3	9.65118E-2	2.73132E1	-3.26474E1	-3.2637E1	2.68609E1	2.23468E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.4255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.18539E-1	-7.99203E-1	-9.1321E0	-9.14321E0	4.45843E-3	9.62019E-2	2.73502E1	-3.26705E1	-3.26723E1	2.68358E1	2.23731E-9	2.52342E-3	2.52342E-3	6.32858E-3	2.41471E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.18634E-1	-7.98893E-1	-9.13191E0	-9.14311E0	4.52995E-3	9.61781E-2	2.73169E1	-3.26738E1	-3.25664E1	2.68099E1	2.23964E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.42024E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.18753E-1	-7.98988E-1	-9.13196E0	-9.14326E0	4.57764E-3	9.62019E-2	2.73237E1	-3.26338E1	-3.25966E1	2.68707E1	2.23332E-9	2.52757E-3	2.52757E-3	6.29645E-3	2.42809E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09719E0	-8.18634E-1	-7.98917E-1	-9.13234E0	-9.14309E0	4.50611E-3	9.5892E-2	2.73484E1	-3.26549E1	-3.26098E1	2.6813E1	2.23429E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.42387E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.18253E-1	-7.99012E-1	-9.13229E0	-9.14302E0	4.33922E-3	9.59635E-2	2.73328E1	-3.26573E1	-3.25658E1	2.68448E1	2.23623E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.41966E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.183E-1	-7.98869E-1	-9.13227E0	-9.14314E0	4.41074E-3	9.57012E-2	2.73189E1	-3.26819E1	-3.26158E1	2.68028E1	2.23297E-9	2.51632E-3	2.51632E-3	6.29128E-3	2.41611E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.183E-1	-7.98702E-1	-9.13246E0	-9.14309E0	4.26769E-3	9.6035E-2	2.73669E1	-3.26646E1	-3.26138E1	2.68286E1	2.24109E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.40082E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.18515E-1	-7.98893E-1	-9.13236E0	-9.14314E0	4.48227E-3	9.58681E-2	2.7321E1	-3.26579E1	-3.26278E1	2.6837E1	2.22974E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.41479E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.18396E-1	-7.99108E-1	-9.13241E0	-9.14314E0	4.26769E-3	9.59396E-2	2.73263E1	-3.26437E1	-3.26142E1	2.68383E1	2.23678E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.41199E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.18515E-1	-7.99012E-1	-9.13224E0	-9.1429E0	4.19617E-3	9.60588E-2	2.73604E1	-3.26681E1	-3.26296E1	2.68496E1	2.23107E-9	2.51739E-3	2.51739E-3	6.35601E-3	2.40378E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09673E0	-8.18467E-1	-7.98726E-1	-9.13212E0	-9.1433E0	3.91006E-3	9.59158E-2	2.7364E1	-3.26428E1	-3.25906E1	2.68617E1	2.24012E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.41337E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.18491E-1	-7.98774E-1	-9.13224E0	-9.14295E0	4.24385E-3	9.58204E-2	2.73171E1	-3.26639E1	-3.26044E1	2.6837E1	2.2372E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.41337E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.18539E-1	-7.98893E-1	-9.13217E0	-9.14288E0	4.41074E-3	9.56297E-2	2.73033E1	-3.2698E1	-3.26225E1	2.68442E1	2.23487E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.40378E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.18467E-1	-7.9906E-1	-9.13239E0	-9.14288E0	4.52995E-3	9.57489E-2	2.73729E1	-3.2688E1	-3.26219E1	2.68581E1	2.23526E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.41127E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.18396E-1	-7.9875E-1	-9.13229E0	-9.1434E0	4.45843E-3	9.60588E-2	2.73588E1	-3.26921E1	-3.26298E1	2.68178E1	2.23297E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.41405E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.18682E-1	-7.98631E-1	-9.13241E0	-9.14304E0	4.55379E-3	9.59158E-2	2.73886E1	-3.26506E1	-3.2608E1	2.6846E1	2.23566E-9	2.51971E-3	2.51971E-3	6.3074E-3	2.418E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.18682E-1	-7.98774E-1	-9.13246E0	-9.14309E0	4.69685E-3	9.58443E-2	2.73424E1	-3.26879E1	-3.26182E1	2.68184E1