[Scan]
initial_time=2016-01-15T21:15:23
final_time=2016-01-15T21:15:43
ip_count=19
run=1023
dataset=2
scan=128
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.18586E-1
ql1_imon=1.37248E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=1.95013E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=2.52831E-10
ql4_vset=
ql4_vmon=-9.1434E0
ql4_imon=5.67913E-11
mult1=-9.7697E-9
mult2=-2.78497E-9
rf_tmon=-5.16438E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.71468E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19436E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.85548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04447E1
cs_ea1_imon=2.55157E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.80091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.51515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.96072E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.3406E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.24481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.34501E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20824E0
cs_ionrep_imon=1.19575E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0238E1
cs_anode1_imon=2.98306E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.35452E-8
tplens_vset=1.4E-1
tplens_vmon=1.65886E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26395E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03035E2
lens6_imon=2.98097E-4
ql6_vset=1.0E-1
ql6_vmon=9.59396E-2
ql6_imon=4.13984E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.78444E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.16044E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74898E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45337E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.14812E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36467E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11556E1
os_restr2_imon=3.42238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73786E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.42555E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.90229E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02126E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.93291E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=6.82404E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.35179E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=6.83846E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29329E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33415E1
os_fil1_imon=9.40546E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06885E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65493E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=9.95188E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6242E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66917E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79585E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22593E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41405E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50883E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.18348E-1	-7.98798E-1	-9.13215E0	-9.14314E0	4.31538E-3	9.58204E-2	2.73381E1	-3.26573E1	-3.2639E1	2.68532E1	2.23623E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.4302E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.18539E-1	-7.98941E-1	-9.13239E0	-9.14304E0	4.41074E-3	9.58443E-2	2.73128E1	-3.26732E1	-3.2603E1	2.68586E1	2.23583E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.41611E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.18563E-1	-7.99036E-1	-9.1325E0	-9.14299E0	4.29153E-3	9.58681E-2	2.73321E1	-3.26633E1	-3.26032E1	2.68274E1	2.23678E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.40994E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.18563E-1	-7.98917E-1	-9.13224E0	-9.14333E0	4.12464E-3	9.62496E-2	2.72871E1	-3.26717E1	-3.26068E1	2.68238E1	2.2372E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.41546E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18396E-1	-7.99036E-1	-9.13217E0	-9.14321E0	4.33922E-3	9.61304E-2	2.73263E1	-3.26561E1	-3.2629E1	2.68226E1	2.24304E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.41546E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.183E-1	-7.99108E-1	-9.13224E0	-9.1434E0	4.43459E-3	9.59873E-2	2.7318E1	-3.26854E1	-3.2626E1	2.6846E1	2.23678E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.41611E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.18729E-1	-7.99131E-1	-9.13222E0	-9.1434E0	4.33922E-3	9.58204E-2	2.72968E1	-3.26508E1	-3.26172E1	2.6837E1	2.23332E-9	2.51116E-3	2.51116E-3	6.3074E-3	2.42387E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.18515E-1	-7.99203E-1	-9.13222E0	-9.14328E0	4.36306E-3	9.56535E-2	2.73339E1	-3.26819E1	-3.2587E1	2.68394E1	2.23915E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.40918E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18348E-1	-7.99489E-1	-9.13212E0	-9.14323E0	4.72069E-3	9.56774E-2	2.73688E1	-3.26981E1	-3.26536E1	2.68412E1	2.23623E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.41756E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.18253E-1	-7.98988E-1	-9.13229E0	-9.14328E0	4.72069E-3	9.59873E-2	2.737E1	-3.26897E1	-3.25717E1	2.69067E1	2.23623E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41546E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.183E-1	-7.99322E-1	-9.13227E0	-9.14314E0	4.19617E-3	9.5582E-2	2.72762E1	-3.26691E1	-3.26343E1	2.68701E1	2.23637E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.42485E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18014E-1	-7.99584E-1	-9.13215E0	-9.14328E0	4.19617E-3	9.59396E-2	2.73237E1	-3.2641E1	-3.2638E1	2.68406E1	2.23915E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.40291E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18157E-1	-7.99322E-1	-9.13205E0	-9.1434E0	4.17233E-3	9.64642E-2	2.7298E1	-3.26685E1	-3.26419E1	2.68395E1	2.2372E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41966E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17943E-1	-7.99179E-1	-9.13234E0	-9.14359E0	4.31538E-3	9.61542E-2	2.73129E1	-3.26849E1	-3.26543E1	2.68106E1	2.23487E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.41611E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.18062E-1	-7.99227E-1	-9.13241E0	-9.14342E0	4.57764E-3	9.59873E-2	2.72786E1	-3.26231E1	-3.2616E1	2.6846E1	2.23429E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.42177E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18276E-1	-7.99561E-1	-9.13227E0	-9.14321E0	4.8399E-3	9.56535E-2	2.73814E1	-3.26957E1	-3.26404E1	2.6795E1	2.23964E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.42437E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.18372E-1	-7.99251E-1	-9.13241E0	-9.1435E0	4.673E-3	9.58681E-2	2.73339E1	-3.26657E1	-3.25996E1	2.68034E1	2.24402E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.40708E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18586E-1	-7.99322E-1	-9.13222E0	-9.14354E0	4.43459E-3	9.5892E-2	2.73104E1	-3.26655E1	-3.26478E1	2.68487E1	2.23915E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.41966E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.18658E-1	-7.98845E-1	-9.13234E0	-9.14357E0	4.52995E-3	9.61065E-2	2.73482E1	-3.26437E1	-3.26107E1	2.67535E1	2.23869E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.41405E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.18586E-1	-7.99036E-1	-9.13205E0	-9.1434E0	4.33922E-3	9.59396E-2	2.73786E1	-3.26419E1	-3.26395E1	2.68286E1	2.23964E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.41405E-2