[Scan]
initial_time=2016-01-15T21:15:50
final_time=2016-01-15T21:16:09
ip_count=19
run=1023
dataset=2
scan=129
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.18491E-1
ql1_imon=1.37119E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=1.96354E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=2.2192E-10
ql4_vset=
ql4_vmon=-9.1435E0
ql4_imon=7.1466E-11
mult1=-9.54888E-9
mult2=-2.606E-9
rf_tmon=-4.2094E-3
rf_agc=3.31141E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.67387E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19887E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.86809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04453E1
cs_ea1_imon=2.5851E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36775E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.5065E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.96396E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.34519E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.24661E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.36231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.19034E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.97585E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.36353E-8
tplens_vset=1.4E-1
tplens_vmon=1.6871E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26315E1
iondef3_imon=1.5202E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.54651E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03028E2
lens6_imon=2.98075E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.15262E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.79922E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44256E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19648E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.43067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68192E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.40988E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.9068E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.38998E-4
mask2_vset=0.0E0
mask2_vmon=-1.86662E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.40083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.91056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.03673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23314E0
defgridb_imon=5.83268E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33397E1
os_fil1_imon=9.41171E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6555E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=9.95176E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66812E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76878E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.42437E-2
chamber_ion_pmon=2.23392E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44275E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.18467E-1	-7.98917E-1	-9.13236E0	-9.14352E0	4.31538E-3	9.58443E-2	2.73476E1	-3.26372E1	-3.25995E1	2.68105E1	2.23915E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.42809E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.18634E-1	-7.98678E-1	-9.13239E0	-9.14354E0	4.45843E-3	9.59396E-2	2.7329E1	-3.26664E1	-3.26407E1	2.68325E1	2.23678E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.41817E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.18491E-1	-7.98655E-1	-9.13229E0	-9.14357E0	4.3869E-3	9.5892E-2	2.73804E1	-3.26364E1	-3.26411E1	2.68192E1	2.24757E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.41265E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18586E-1	-7.98774E-1	-9.13227E0	-9.14323E0	4.41074E-3	9.56535E-2	2.7334E1	-3.26531E1	-3.26508E1	2.68047E1	2.23563E-9	2.51617E-3	2.51617E-3	6.31808E-3	2.42666E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.18467E-1	-7.98702E-1	-9.13243E0	-9.14316E0	4.31538E-3	9.59158E-2	2.73314E1	-3.26499E1	-3.26297E1	2.68275E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.18396E-1	-7.98774E-1	-9.13253E0	-9.14352E0	4.31538E-3	9.6035E-2	2.73476E1	-3.26431E1	-3.25806E1	2.68319E1	2.23863E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.41265E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.1861E-1	-7.98583E-1	-9.13239E0	-9.14369E0	4.45843E-3	9.6035E-2	2.73183E1	-3.26747E1	-3.2599E1	2.68364E1	2.24277E-9	2.52026E-3	2.52026E-3	6.32099E-3	2.41475E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.18586E-1	-7.98655E-1	-9.13248E0	-9.14352E0	4.48227E-3	9.58204E-2	2.73237E1	-3.26386E1	-3.2641E1	2.68508E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.18825E-1	-7.98392E-1	-9.13253E0	-9.14333E0	4.07696E-3	9.58681E-2	2.73128E1	-3.2688E1	-3.26396E1	2.68556E1	2.24597E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.42387E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.18467E-1	-7.98464E-1	-9.13239E0	-9.14323E0	4.02927E-3	9.59158E-2	2.72854E1	-3.26787E1	-3.26312E1	2.67989E1	2.26365E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.42437E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.18396E-1	-7.98273E-1	-9.13243E0	-9.14309E0	3.91006E-3	9.56059E-2	2.73248E1	-3.26915E1	-3.26012E1	2.68668E1	2.26654E-9	2.52553E-3	2.52553E-3	6.30212E-3	2.42892E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.18205E-1	-7.98798E-1	-9.13236E0	-9.14326E0	3.93391E-3	9.59396E-2	2.73213E1	-3.26338E1	-3.26434E1	2.68755E1	2.26348E-9	2.51045E-3	2.51045E-3	6.33021E-3	2.43817E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.18014E-1	-7.98702E-1	-9.1321E0	-9.1434E0	4.31538E-3	9.58443E-2	2.73448E1	-3.26284E1	-3.26158E1	2.68605E1	2.23791E-9	2.51622E-3	2.51622E-3	6.3157E-3	2.42894E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.18324E-1	-7.98655E-1	-9.13217E0	-9.14338E0	4.43459E-3	9.55343E-2	2.72979E1	-3.26825E1	-3.26218E1	2.68382E1	2.22461E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41966E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.18419E-1	-7.9875E-1	-9.13219E0	-9.14335E0	4.33922E-3	9.57966E-2	2.72907E1	-3.26729E1	-3.25719E1	2.68695E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.18348E-1	-7.98798E-1	-9.13239E0	-9.14354E0	4.36306E-3	9.60112E-2	2.73303E1	-3.26681E1	-3.26296E1	2.68424E1	2.23915E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.40918E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18348E-1	-7.99036E-1	-9.13227E0	-9.14316E0	4.33922E-3	9.59635E-2	2.73021E1	-3.26573E1	-3.2614E1	2.68202E1	2.24207E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.42387E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.18086E-1	-7.98965E-1	-9.13246E0	-9.14335E0	4.57764E-3	9.58204E-2	2.73517E1	-3.26502E1	-3.2629E1	2.68256E1	2.24109E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.40918E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.183E-1	-7.98726E-1	-9.13248E0	-9.14338E0	4.60148E-3	9.61304E-2	2.73346E1	-3.26673E1	-3.26142E1	2.68522E1	2.23773E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.41611E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.18491E-1	-7.9906E-1	-9.13236E0	-9.1435E0	4.45843E-3	9.62496E-2	2.73357E1	-3.26499E1	-3.26315E1	2.68192E1	2.23392E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.42437E-2