[Scan]
initial_time=2016-01-15T21:16:16
final_time=2016-01-15T21:16:36
ip_count=19
run=1023
dataset=2
scan=130
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.18276E-1
ql1_imon=1.3609E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.00125E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=1.91224E-10
ql4_vset=
ql4_vmon=-9.14342E0
ql4_imon=7.06553E-11
mult1=-1.01968E-8
mult2=-2.45868E-9
rf_tmon=-5.02859E-3
rf_agc=3.25304E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.69345E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63674E0
bslens_imon=2.38171E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20309E1
lens5a_imon=1.97106E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05031E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.85915E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.01926E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05087E1
cs_ea1_imon=2.53629E-5
lens1_vset=-5.0E0
lens1_vmon=-5.26422E0
lens1_imon=2.84752E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64823E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.52471E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8451E1
cs_ef1a_imon=2.95368E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.34117E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.26246E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15068E1
os_ea1_imon=2.34371E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63462E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22023E0
cs_ionrep_imon=1.20525E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02012E1
cs_anode1_imon=2.98356E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20363E0
olens4_imon=3.35784E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-1.28111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.48752E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26301E1
iondef2_imon=1.5633E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03036E2
lens6_imon=2.98283E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.08728E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30076E0
ionrepsh_imon=1.75658E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33698E1
lens5b_imon=2.19493E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.1191E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41548E0
os_ea2_imon=-8.12923E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00345E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.15385E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0673E0
os_ef2alow_imon=-2.64756E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96652E-1
os_ef2bup_imon=-5.25748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1095E1
os_restr2_imon=3.44056E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.2892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.24333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73959E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.11561E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.45528E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.89212E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1452E0
cs_ionaccel_imon=-1.72662E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47337E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-8.09154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82693E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86425E1
mask2_imon=-7.36173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92571E3
multa_neg_imon=8.26345E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.81735E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.85559E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50801E0
defgridb_imon=6.36544E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33414E1
os_fil1_imon=9.41325E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0719E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66082E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30841E1
cs_fil1_imon=9.95945E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62401E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67304E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23262E-2
os_fil2_imon=-2.81399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65526E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38391E-1
cs_fil2_imon=-2.72131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03196E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22666E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06701E-1
res40_imon=-2.53635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.18491E-1	-7.98893E-1	-9.13267E0	-9.14326E0	4.45843E-3	9.61065E-2	2.73222E1	-3.26797E1	-3.25776E1	2.68346E1	2.2345E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.43707E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.18324E-1	-7.98821E-1	-9.13234E0	-9.1434E0	4.50611E-3	9.60588E-2	2.73743E1	-3.26738E1	-3.27087E1	2.6843E1	2.23773E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.42851E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18205E-1	-7.99036E-1	-9.13215E0	-9.14338E0	4.52995E-3	9.62496E-2	2.7301E1	-3.26434E1	-3.26753E1	2.68256E1	2.23863E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.41907E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.18276E-1	-7.99108E-1	-9.13222E0	-9.14333E0	4.22001E-3	9.64403E-2	2.73565E1	-3.26223E1	-3.26762E1	2.68475E1	2.23825E-9	2.51182E-3	2.51182E-3	6.30212E-3	2.42282E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.18396E-1	-7.98845E-1	-9.13227E0	-9.14323E0	4.33922E-3	9.61781E-2	2.72184E1	-3.2636E1	-3.2636E1	2.68134E1	2.23764E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.41265E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.18205E-1	-7.9875E-1	-9.13212E0	-9.14357E0	4.52995E-3	9.60112E-2	2.72198E1	-3.26615E1	-3.26573E1	2.6852E1	2.23773E-9	2.52061E-3	2.52061E-3	6.28056E-3	2.41405E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.18348E-1	-7.99036E-1	-9.13224E0	-9.1435E0	4.17233E-3	9.61542E-2	2.72616E1	-3.26358E1	-3.26609E1	2.68506E1	2.2372E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.41756E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18372E-1	-7.98821E-1	-9.13222E0	-9.14323E0	4.07696E-3	9.59635E-2	2.73328E1	-3.26278E1	-3.26225E1	2.68372E1	2.23332E-9	2.5199E-3	2.5199E-3	6.28006E-3	2.40918E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.18253E-1	-7.99084E-1	-9.13205E0	-9.14338E0	4.17233E-3	9.62019E-2	2.73339E1	-3.26523E1	-3.25385E1	2.68339E1	2.23138E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.41966E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.18181E-1	-7.99084E-1	-9.1325E0	-9.1433E0	4.14848E-3	9.59158E-2	2.73187E1	-3.26296E1	-3.26508E1	2.68648E1	2.23138E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.42387E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18396E-1	-7.98965E-1	-9.13272E0	-9.14316E0	4.43459E-3	9.58204E-2	2.73682E1	-3.26783E1	-3.25785E1	2.68484E1	2.2372E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.42598E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.18443E-1	-7.99203E-1	-9.13265E0	-9.1433E0	4.26769E-3	9.61542E-2	2.74078E1	-3.27047E1	-3.25924E1	2.68406E1	2.23773E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.42644E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.18229E-1	-7.98941E-1	-9.13241E0	-9.14328E0	4.45843E-3	9.62019E-2	2.73231E1	-3.26482E1	-3.26554E1	2.6837E1	2.23866E-9	2.52045E-3	2.52045E-3	6.31014E-3	2.42598E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.18157E-1	-7.99012E-1	-9.13248E0	-9.14328E0	4.673E-3	9.59873E-2	2.73594E1	-3.26201E1	-3.2649E1	2.68046E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18253E-1	-7.99084E-1	-9.1327E0	-9.14352E0	4.8399E-3	9.60827E-2	2.74938E1	-3.27029E1	-3.25665E1	2.68286E1	2.24109E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.41337E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.18276E-1	-7.98941E-1	-9.1325E0	-9.14321E0	4.72069E-3	9.60112E-2	2.72702E1	-3.26494E1	-3.26446E1	2.68502E1	2.24499E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.42387E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18372E-1	-7.99084E-1	-9.13277E0	-9.14311E0	4.72069E-3	9.60827E-2	2.74847E1	-3.26428E1	-3.25918E1	2.68459E1	2.23429E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.42387E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18467E-1	-7.98821E-1	-9.13229E0	-9.14335E0	4.8399E-3	9.6035E-2	2.74105E1	-3.26457E1	-3.26422E1	2.683E1	2.23583E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.4223E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.18658E-1	-7.98821E-1	-9.13255E0	-9.14326E0	4.52995E-3	9.61542E-2	2.73853E1	-3.26832E1	-3.26272E1	2.68175E1	2.2363E-9	2.52115E-3	2.52115E-3	6.32356E-3	2.41508E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.18276E-1	-7.98869E-1	-9.13253E0	-9.14342E0	4.52995E-3	9.62496E-2	2.73959E1	-3.26301E1	-3.25894E1	2.68298E1