[Scan]
initial_time=2016-01-15T21:16:43
final_time=2016-01-15T21:17:02
ip_count=19
run=1023
dataset=2
scan=131
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.18419E-1
ql1_imon=1.36672E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=1.98771E-9
ql3_vset=
ql3_vmon=-9.13239E0
ql3_imon=2.36201E-10
ql4_vset=
ql4_vmon=-9.14335E0
ql4_imon=9.46999E-11
mult1=-8.75459E-9
mult2=-2.8526E-9
rf_tmon=-3.94317E-3
rf_agc=3.39226E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.69196E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62889E0
bslens_imon=2.24215E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.88035E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02406E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04387E1
cs_ea1_imon=2.54869E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37196E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.47153E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.95927E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.35075E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11628E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.32915E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.06415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.20584E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=3.0E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.35728E-8
tplens_vset=1.4E-1
tplens_vmon=1.67568E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.48342E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0304E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.58204E-2
ql6_imon=4.24957E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=1.77903E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.20153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45878E0
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71486E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.44293E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73977E1
iondef1_imon=1.12509E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.52303E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.92597E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56711E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82707E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.21698E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50195E3
multb_neg_imon=6.47436E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44969E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33424E1
os_fil1_imon=9.4069E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07443E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.95176E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62132E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67003E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74288E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6618E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.41817E-2
chamber_ion_pmon=2.23297E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.1186E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.18205E-1	-7.99203E-1	-9.13243E0	-9.14342E0	4.60148E-3	9.59635E-2	2.73514E1	-3.26536E1	-3.26693E1	2.68581E1	2.23678E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.41405E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.18563E-1	-7.99131E-1	-9.1321E0	-9.14314E0	4.55379E-3	9.60588E-2	2.73394E1	-3.26787E1	-3.26095E1	2.68725E1	2.23418E-9	2.51915E-3	2.51915E-3	6.33538E-3	2.42443E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.18372E-1	-7.98869E-1	-9.13181E0	-9.14314E0	4.36306E-3	9.60112E-2	2.73063E1	-3.26729E1	-3.26214E1	2.68256E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18276E-1	-7.99108E-1	-9.13212E0	-9.14314E0	4.81606E-3	9.57251E-2	2.73363E1	-3.26687E1	-3.26008E1	2.68088E1	2.23918E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.40664E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18348E-1	-7.99012E-1	-9.13215E0	-9.14345E0	4.45843E-3	9.61304E-2	2.73417E1	-3.26585E1	-3.26332E1	2.68346E1	2.23526E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.41966E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.18443E-1	-7.98893E-1	-9.13193E0	-9.14297E0	4.41074E-3	9.58443E-2	2.73358E1	-3.26413E1	-3.2629E1	2.68214E1	2.24155E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.40583E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.18586E-1	-7.98893E-1	-9.13191E0	-9.1435E0	4.36306E-3	9.59396E-2	2.72751E1	-3.27059E1	-3.25611E1	2.68532E1	2.23818E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.41337E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.18658E-1	-7.98702E-1	-9.13212E0	-9.14321E0	4.60148E-3	9.58681E-2	2.73598E1	-3.26939E1	-3.25948E1	2.6822E1	2.23915E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.42809E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18849E-1	-7.98845E-1	-9.13203E0	-9.14311E0	4.74453E-3	9.59396E-2	2.73285E1	-3.26524E1	-3.26561E1	2.68298E1	2.23818E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.40499E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.18586E-1	-7.98988E-1	-9.13203E0	-9.14323E0	4.33922E-3	9.57966E-2	2.73369E1	-3.26687E1	-3.26212E1	2.68881E1	2.23963E-9	2.52045E-3	2.52045E-3	6.31563E-3	2.41546E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.18634E-1	-7.98774E-1	-9.13222E0	-9.14328E0	4.24385E-3	9.59396E-2	2.72456E1	-3.26428E1	-3.26056E1	2.6831E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.18348E-1	-7.98893E-1	-9.13186E0	-9.14345E0	4.36306E-3	9.5892E-2	2.74067E1	-3.2678E1	-3.26548E1	2.68526E1	2.2372E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.41966E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.18372E-1	-7.98678E-1	-9.13234E0	-9.14347E0	4.1008E-3	9.59396E-2	2.73604E1	-3.26747E1	-3.26164E1	2.68376E1	2.24207E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.41756E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.18372E-1	-7.98845E-1	-9.13203E0	-9.14357E0	4.36306E-3	9.59873E-2	2.72402E1	-3.26585E1	-3.26104E1	2.68346E1	2.23332E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.40918E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.18396E-1	-7.98988E-1	-9.13222E0	-9.14347E0	4.3869E-3	9.58681E-2	2.73912E1	-3.26744E1	-3.26006E1	2.68154E1	2.23623E-9	2.50898E-3	2.50898E-3	6.29645E-3	2.42598E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.18706E-1	-7.98917E-1	-9.13217E0	-9.14328E0	4.3869E-3	9.56297E-2	2.73778E1	-3.26789E1	-3.26464E1	2.68442E1	2.23915E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.41966E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.18539E-1	-7.9906E-1	-9.13191E0	-9.14328E0	4.31538E-3	9.56535E-2	2.72835E1	-3.26422E1	-3.2617E1	2.68346E1	2.23235E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.42387E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.18181E-1	-7.99322E-1	-9.13198E0	-9.14338E0	4.64916E-3	9.60588E-2	2.72733E1	-3.26867E1	-3.26482E1	2.68725E1	2.24012E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.42177E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.18372E-1	-7.99251E-1	-9.13205E0	-9.14319E0	4.24385E-3	9.59396E-2	2.73546E1	-3.26596E1	-3.26331E1	2.68233E1	2.23773E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.40378E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.18419E-1	-7.98965E-1	-9.13239E0	-9.14335E0	4.48227E-3	9.58204E-2	2.73977E1	-3.26726E1	-3.26266E1	2.6828E1	2.23297E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.41817E-2