[Scan]
initial_time=2016-01-15T21:17:10
final_time=2016-01-15T21:17:29
ip_count=19
run=1023
dataset=2
scan=132
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.18419E-1
ql1_imon=1.36182E-8
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=2.0027E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=2.09332E-10
ql4_vset=
ql4_vmon=-9.1434E0
ql4_imon=7.236E-11
mult1=-9.19856E-9
mult2=-2.55493E-9
rf_tmon=-5.99046E-3
rf_agc=3.20358E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.718E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54042E1
cs_ef1b_imon=2.85409E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.01865E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04471E1
cs_ea1_imon=2.56779E-5
lens1_vset=-5.0E0
lens1_vmon=-5.23677E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.98335E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.53894E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84715E1
cs_ef1a_imon=2.95324E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.33959E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11693E1
os_restr1_imon=4.25091E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.37745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63504E1
os_ef1bup_imon=3.07625E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.17772E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.932E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01772E1
cs_anode1_imon=2.97821E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.34115E-8
tplens_vset=1.4E-1
tplens_vmon=1.67087E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03053E2
lens6_imon=2.97996E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.13285E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2515E0
ionrepsh_imon=1.7729E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.14998E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74905E1
cs_ef2b_imon=3.12068E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44677E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71172E1
cs_ef2a_imon=3.16511E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06404E0
os_ef2alow_imon=-2.59734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35164E-1
os_ef2bup_imon=-5.37701E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11576E1
os_restr2_imon=3.43794E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01723E1
cs_anode2_imon=2.24638E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73874E1
iondef1_imon=1.12798E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.11101E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.41344E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.88578E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16502E0
cs_ionaccel_imon=-1.72341E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56674E1
einzel_imon=7.66581E-6
window_vset=0.0E0
window_vmon=2.18691E-1
window_imon=-8.45808E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.39014E-4
mask2_vset=0.0E0
mask2_vmon=-1.86417E1
mask2_imon=-8.89871E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92444E3
multa_neg_imon=9.81615E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93664E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49956E3
multb_neg_imon=7.91995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6151E0
defgridb_imon=5.74256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33436E1
os_fil1_imon=9.41257E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06809E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6574E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=9.95621E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67078E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.67651E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86449E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68113E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37237E-1
cs_fil2_imon=-2.73159E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30145E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.42851E-2
chamber_ion_pmon=2.23297E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.02483E-1
res40_imon=-2.57898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.18515E-1	-7.99274E-1	-9.13253E0	-9.14333E0	4.62532E-3	9.58204E-2	2.72829E1	-3.26812E1	-3.26693E1	2.68686E1	2.23963E-9	2.51136E-3	2.51136E-3	6.3074E-3	2.42765E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09673E0	-8.18801E-1	-7.9906E-1	-9.13248E0	-9.14328E0	4.50611E-3	9.58443E-2	2.73619E1	-3.26622E1	-3.26491E1	2.68425E1	2.23922E-9	2.5165E-3	2.5165E-3	6.32273E-3	2.41597E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.18729E-1	-7.98869E-1	-9.13222E0	-9.14319E0	4.72069E-3	9.57251E-2	2.73523E1	-3.26803E1	-3.25593E1	2.68587E1	2.22319E-9	2.51411E-3	2.51411E-3	6.31902E-3	2.41337E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.18467E-1	-7.99036E-1	-9.13236E0	-9.1434E0	4.33922E-3	9.59635E-2	2.73853E1	-3.26685E1	-3.25824E1	2.68111E1	2.23076E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.40865E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.18586E-1	-7.99346E-1	-9.13246E0	-9.14319E0	4.55379E-3	9.58681E-2	2.73559E1	-3.26609E1	-3.25574E1	2.68487E1	2.23623E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.42598E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.18706E-1	-7.99012E-1	-9.13258E0	-9.14342E0	4.62532E-3	9.59873E-2	2.73784E1	-3.26368E1	-3.26008E1	2.68334E1	2.24161E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.43626E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18753E-1	-7.98845E-1	-9.13267E0	-9.14347E0	4.50611E-3	9.58204E-2	2.73982E1	-3.26783E1	-3.25743E1	2.68556E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.42437E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.18801E-1	-7.98941E-1	-9.13227E0	-9.14347E0	4.64916E-3	9.59158E-2	2.73729E1	-3.2649E1	-3.26284E1	2.68204E1	2.23623E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.43442E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18563E-1	-7.99036E-1	-9.13217E0	-9.14316E0	4.45843E-3	9.5892E-2	2.73363E1	-3.26933E1	-3.26374E1	2.68593E1	2.2372E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.42809E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18563E-1	-7.98988E-1	-9.13231E0	-9.14307E0	4.52995E-3	9.58443E-2	2.73093E1	-3.26482E1	-3.26939E1	2.68418E1	2.23869E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.42024E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.18658E-1	-7.98726E-1	-9.13241E0	-9.14326E0	4.43459E-3	9.58443E-2	2.72756E1	-3.26089E1	-3.26691E1	2.68629E1	2.24304E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41966E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.18682E-1	-7.98941E-1	-9.13248E0	-9.14319E0	4.55379E-3	9.57012E-2	2.728E1	-3.27246E1	-3.26113E1	2.68334E1	2.23526E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.40499E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.18539E-1	-7.98893E-1	-9.13239E0	-9.14304E0	4.57764E-3	9.59396E-2	2.73912E1	-3.27056E1	-3.25912E1	2.68593E1	2.2372E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.41337E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.18491E-1	-7.98821E-1	-9.13224E0	-9.14307E0	4.57764E-3	9.6035E-2	2.73688E1	-3.26597E1	-3.26573E1	2.6831E1	2.24109E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41337E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.1861E-1	-7.98702E-1	-9.13236E0	-9.14326E0	4.29153E-3	9.60112E-2	2.7269E1	-3.26187E1	-3.2675E1	2.68178E1	2.23332E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.40918E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18515E-1	-7.98845E-1	-9.1321E0	-9.14369E0	4.36306E-3	9.59158E-2	2.73027E1	-3.26809E1	-3.26354E1	2.68352E1	2.22945E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.41756E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.18586E-1	-7.98988E-1	-9.13229E0	-9.1435E0	4.3869E-3	9.57012E-2	2.73351E1	-3.27275E1	-3.26284E1	2.68124E1	2.2372E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.41756E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.18682E-1	-7.98893E-1	-9.13231E0	-9.14354E0	4.48227E-3	9.58204E-2	2.73552E1	-3.26018E1	-3.26567E1	2.68151E1	2.23821E-9	2.51847E-3	2.51847E-3	6.2886E-3	2.40891E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.18634E-1	-7.98798E-1	-9.132E0	-9.14357E0	4.3869E-3	9.59158E-2	2.73075E1	-3.26797E1	-3.26136E1	2.68575E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.18419E-1	-7.99108E-1	-9.13224E0	-9.1434E0	4.60148E-3	9.62496E-2	2.73874E1	-3.26657E1	-3.26176E1	2.68418E1	2.23297E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.42851E-2