[Scan]
initial_time=2016-01-15T21:17:36
final_time=2016-01-15T21:17:56
ip_count=19
run=1023
dataset=2
scan=133
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08737E-4
ql1_vset=
ql1_vmon=-8.18086E-1
ql1_imon=1.36509E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=1.93778E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=2.3576E-10
ql4_vset=
ql4_vmon=-9.1429E0
ql4_imon=6.19411E-11
mult1=-8.86188E-9
mult2=-2.60803E-9
rf_tmon=-6.03365E-3
rf_agc=3.22754E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.68992E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6261E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19594E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12542E2
lens4a_imon=2.05327E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=2.84827E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.01926E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=2.54645E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31357E0
lens1_imon=3.09187E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.48392E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.96324E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.34136E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.24409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15553E1
os_ea1_imon=2.34895E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16597E0
cs_ionrep_imon=1.18377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93275E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.97189E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20368E0
olens4_imon=3.34984E-8
tplens_vset=1.4E-1
tplens_vmon=1.64261E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.53028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03038E2
lens6_imon=2.98282E-4
ql6_vset=1.0E-1
ql6_vmon=9.6035E-2
ql6_imon=4.17634E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=1.76424E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34118E1
lens5b_imon=2.20737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4503E0
os_ea2_imon=-9.85532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06188E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11454E1
os_restr2_imon=3.43788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.27097E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.23308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73988E1
iondef1_imon=1.07158E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.40813E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.88759E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.15541E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82718E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-9.11223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=8.24525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.52509E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.909E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.95775E0
defgridb_imon=5.49866E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3341E1
os_fil1_imon=9.43087E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06981E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65525E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=9.95921E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61957E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67248E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93689E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.75006E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22692E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.41269E-2
chamber_ion_pmon=2.23637E-9
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40052E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16955E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.1861E-1	-7.99155E-1	-9.13217E0	-9.14338E0	4.33922E-3	9.60827E-2	2.73213E1	-3.26597E1	-3.26206E1	2.68532E1	2.26654E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.41405E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.18467E-1	-7.99322E-1	-9.13239E0	-9.14342E0	4.43459E-3	9.62734E-2	2.73345E1	-3.26217E1	-3.26223E1	2.68244E1	2.2577E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.4302E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18253E-1	-7.99179E-1	-9.13215E0	-9.14357E0	4.62532E-3	9.63926E-2	2.73491E1	-3.26538E1	-3.26121E1	2.68447E1	2.24304E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41546E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18181E-1	-7.98941E-1	-9.13217E0	-9.1434E0	4.50611E-3	9.6035E-2	2.73106E1	-3.26738E1	-3.26248E1	2.68304E1	2.26654E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.42282E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.18372E-1	-7.9875E-1	-9.13227E0	-9.14354E0	4.55379E-3	9.59158E-2	2.72854E1	-3.26648E1	-3.26109E1	2.684E1	2.26654E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.43195E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.18086E-1	-7.98726E-1	-9.13208E0	-9.14347E0	4.69685E-3	9.58443E-2	2.74268E1	-3.25948E1	-3.26241E1	2.68438E1	2.25305E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.41199E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18157E-1	-7.99227E-1	-9.13227E0	-9.1434E0	4.69685E-3	9.57966E-2	2.72915E1	-3.26461E1	-3.2606E1	2.67943E1	2.23468E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.40626E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.183E-1	-7.98941E-1	-9.13236E0	-9.14309E0	4.76837E-3	9.59158E-2	2.73434E1	-3.26579E1	-3.25818E1	2.68448E1	2.23773E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.40994E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.18253E-1	-7.99084E-1	-9.13243E0	-9.14321E0	4.22001E-3	9.56774E-2	2.72794E1	-3.26089E1	-3.26034E1	2.68298E1	2.23623E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.41127E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.183E-1	-7.9906E-1	-9.132E0	-9.14333E0	4.62532E-3	9.6035E-2	2.73033E1	-3.26825E1	-3.26663E1	2.68226E1	2.25672E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.40291E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.18253E-1	-7.98845E-1	-9.13198E0	-9.14342E0	4.48227E-3	9.62496E-2	2.73305E1	-3.26419E1	-3.2606E1	2.68448E1	2.26654E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.41127E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.18276E-1	-7.98869E-1	-9.13219E0	-9.1433E0	4.36306E-3	9.60588E-2	2.73832E1	-3.26567E1	-3.2647E1	2.67976E1	2.26365E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.41199E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18086E-1	-7.98917E-1	-9.13243E0	-9.14323E0	4.33922E-3	9.61304E-2	2.73169E1	-3.27033E1	-3.26071E1	2.68359E1	2.26654E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.41756E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18038E-1	-7.98893E-1	-9.13224E0	-9.14338E0	4.33922E-3	9.61065E-2	2.72829E1	-3.26476E1	-3.26296E1	2.68623E1	2.24499E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.42598E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.183E-1	-7.99179E-1	-9.13227E0	-9.14309E0	4.36306E-3	9.59873E-2	2.73556E1	-3.26506E1	-3.26092E1	2.68034E1	2.23583E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.40378E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.18396E-1	-7.99155E-1	-9.13222E0	-9.14326E0	4.81606E-3	9.58681E-2	2.73438E1	-3.26687E1	-3.26368E1	2.68332E1	2.2372E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.41966E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18324E-1	-7.99227E-1	-9.13219E0	-9.14333E0	4.93526E-3	9.59158E-2	2.73157E1	-3.26965E1	-3.26391E1	2.67789E1	2.23138E-9	2.52093E-3	2.52093E-3	6.34385E-3	2.41933E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.18372E-1	-7.99155E-1	-9.13219E0	-9.14323E0	4.76837E-3	9.59158E-2	2.73213E1	-3.26801E1	-3.25797E1	2.68569E1	2.23344E-9	2.5199E-3	2.5199E-3	6.32483E-3	2.42226E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.18229E-1	-7.98774E-1	-9.13212E0	-9.1433E0	4.57764E-3	9.5892E-2	2.73352E1	-3.26689E1	-3.26434E1	2.68394E1	2.24251E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.40583E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.18086E-1	-7.98893E-1	-9.13203E0	-9.1429E0	4.33922E-3	9.6035E-2	2.73988E1	-3.26554E1	-3.26272E1	2.6837E1	2.23637E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.41269E-2