[Scan]
initial_time=2016-01-15T21:18:03
final_time=2016-01-15T21:18:22
ip_count=19
run=1023
dataset=2
scan=134
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.18539E-1
ql1_imon=1.36036E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=1.98377E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=1.81723E-10
ql4_vset=
ql4_vmon=-9.14354E0
ql4_imon=5.04255E-11
mult1=-8.10128E-9
mult2=-2.61617E-9
rf_tmon=-5.15826E-3
rf_agc=3.12286E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.6796E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69276E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19783E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.87891E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04689E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=2.51884E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34365E0
lens1_imon=3.12372E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.52073E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84809E1
cs_ef1a_imon=2.94522E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.3471E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.25598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14663E1
os_ea1_imon=2.35072E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=1.21846E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91982E2
cs_nozzle_imon=1.93371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.35252E-8
tplens_vset=1.4E-1
tplens_vmon=1.65913E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27031E1
iondef2_imon=1.55541E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.97783E-4
ql6_vset=1.0E-1
ql6_vmon=9.59158E-2
ql6_imon=4.14509E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=1.78795E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34124E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.1128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4155E0
os_ea2_imon=-9.9969E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06168E2
lens4b_imon=2.00895E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.2515E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73271E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.11116E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.40798E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.91405E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17579E0
cs_ionaccel_imon=-1.67887E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.38965E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.59753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.17823E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30811E0
defgridb_imon=6.03665E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33417E1
os_fil1_imon=9.41819E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07419E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65806E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3086E1
cs_fil1_imon=9.95789E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61675E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67323E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60025E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22727E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.40291E-2
chamber_ion_pmon=2.25574E-9
chamber_cvt_pmon=2.52977E-3
foreline_cvt_pmon=2.52977E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.74018E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.18419E-1	-7.98988E-1	-9.13231E0	-9.14321E0	4.57764E-3	9.60588E-2	2.72895E1	-3.26236E1	-3.26398E1	2.68256E1	2.2372E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.41756E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18682E-1	-7.98893E-1	-9.13246E0	-9.14335E0	4.57764E-3	9.60112E-2	2.7291E1	-3.27001E1	-3.26076E1	2.684E1	2.23773E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.42644E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.18229E-1	-7.98702E-1	-9.13243E0	-9.14311E0	4.41074E-3	9.59396E-2	2.73555E1	-3.26353E1	-3.26179E1	2.68262E1	2.23566E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.42121E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.18086E-1	-7.9875E-1	-9.13241E0	-9.14326E0	4.3869E-3	9.57012E-2	2.73275E1	-3.26779E1	-3.26461E1	2.68202E1	2.24106E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.41067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.18348E-1	-7.99227E-1	-9.13222E0	-9.14311E0	4.41074E-3	9.59873E-2	2.72817E1	-3.26951E1	-3.26573E1	2.68542E1	2.23332E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41756E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18467E-1	-7.99108E-1	-9.13212E0	-9.14319E0	4.33922E-3	9.58204E-2	2.73568E1	-3.26711E1	-3.2617E1	2.68253E1	2.23107E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.41199E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.18467E-1	-7.98917E-1	-9.13222E0	-9.14347E0	4.52995E-3	9.5892E-2	2.73213E1	-3.27005E1	-3.26248E1	2.68532E1	2.23915E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18348E-1	-7.99131E-1	-9.13215E0	-9.14309E0	4.45843E-3	9.6035E-2	2.73505E1	-3.26526E1	-3.26018E1	2.68794E1	2.23138E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.40499E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.18563E-1	-7.98631E-1	-9.13227E0	-9.1433E0	4.24385E-3	9.57489E-2	2.73247E1	-3.26682E1	-3.26327E1	2.68235E1	2.23202E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.41611E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.18491E-1	-7.99155E-1	-9.13229E0	-9.14323E0	4.64916E-3	9.6035E-2	2.73682E1	-3.27027E1	-3.25959E1	2.68707E1	2.23369E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.41479E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.18634E-1	-7.98845E-1	-9.13224E0	-9.14326E0	4.52995E-3	9.57966E-2	2.73122E1	-3.26797E1	-3.26296E1	2.68526E1	2.24251E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.41817E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.18396E-1	-7.98893E-1	-9.1325E0	-9.14323E0	4.62532E-3	9.60112E-2	2.73063E1	-3.26639E1	-3.26092E1	2.68238E1	2.23487E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.42851E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18634E-1	-7.98893E-1	-9.13234E0	-9.14302E0	4.60148E-3	9.57251E-2	2.73387E1	-3.26921E1	-3.25984E1	2.68436E1	2.23526E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.42177E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.18253E-1	-7.9875E-1	-9.13234E0	-9.14316E0	4.48227E-3	9.57727E-2	2.72656E1	-3.26183E1	-3.26467E1	2.68001E1	2.23818E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.40499E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.18419E-1	-7.98845E-1	-9.13219E0	-9.14323E0	4.48227E-3	9.59873E-2	2.72312E1	-3.25245E1	-3.26056E1	2.68358E1	2.23623E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.41546E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.18396E-1	-7.98941E-1	-9.13224E0	-9.14299E0	4.60148E-3	9.56297E-2	2.73195E1	-3.26482E1	-3.26416E1	2.68076E1	2.23678E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.41817E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18253E-1	-7.98941E-1	-9.13224E0	-9.14299E0	4.41074E-3	9.58443E-2	2.73822E1	-3.26718E1	-3.26069E1	2.68267E1	2.22848E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.42809E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.18491E-1	-7.98345E-1	-9.13231E0	-9.14328E0	4.31538E-3	9.60827E-2	2.72874E1	-3.26838E1	-3.26236E1	2.68202E1	2.24764E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.41674E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18515E-1	-7.9875E-1	-9.13258E0	-9.14347E0	4.17233E-3	9.59158E-2	2.7352E1	-3.26729E1	-3.26218E1	2.68556E1	2.26848E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.41817E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.18539E-1	-7.98893E-1	-9.13203E0	-9.14354E0	4.36306E-3	9.59158E-2	2.73271E1	-3.27031E1	-3.26609E1	2.68436E1	2.25574E-9	2.52977E-3	2.52977E-3	6.29645E-3	2.40291E-2