[Scan]
initial_time=2016-01-15T21:18:30
final_time=2016-01-15T21:18:49
ip_count=19
run=1023
dataset=2
scan=135
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.183E-1
ql1_imon=1.36508E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.01489E-9
ql3_vset=
ql3_vmon=-9.13241E0
ql3_imon=2.02346E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=7.69496E-11
mult1=-9.70427E-9
mult2=-2.83838E-9
rf_tmon=-6.47712E-3
rf_agc=3.21379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.68692E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54553E1
cs_ef1b_imon=2.88035E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04435E1
cs_ea1_imon=2.58077E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34612E0
lens1_imon=2.82975E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.93945E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.50578E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.95711E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34545E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11694E1
os_restr1_imon=4.2585E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.34429E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.05478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.20188E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.97802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20365E0
olens4_imon=3.34766E-8
tplens_vset=1.4E-1
tplens_vmon=1.6913E0
tplens_imon=-5.94952E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.9814E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.14907E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27553E0
ionrepsh_imon=1.79381E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74898E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46779E0
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.14236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04014E0
os_ef2alow_imon=-2.28433E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11628E1
os_restr2_imon=3.40977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.23272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.12473E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.37738E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.91359E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.46623E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82749E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-9.61679E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92594E3
multa_neg_imon=7.63516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.40226E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.24582E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33411E1
os_fil1_imon=9.42168E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65784E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=9.95513E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.672E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69918E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22704E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.43058E-2
chamber_ion_pmon=2.23107E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.96533E-1
res40_imon=-2.80331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.18825E-1	-7.98845E-1	-9.13229E0	-9.14292E0	4.26769E-3	9.57966E-2	2.73546E1	-3.26549E1	-3.26325E1	2.68233E1	2.25786E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.4223E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.18372E-1	-7.98774E-1	-9.13212E0	-9.14297E0	4.33922E-3	9.59158E-2	2.73124E1	-3.26487E1	-3.26529E1	2.68575E1	2.26556E-9	2.53196E-3	2.53196E-3	6.31837E-3	2.41127E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.18276E-1	-7.9875E-1	-9.13236E0	-9.14316E0	4.31538E-3	9.6035E-2	2.73452E1	-3.26585E1	-3.26077E1	2.68829E1	2.26654E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.40918E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.18205E-1	-7.98821E-1	-9.13234E0	-9.1433E0	4.26769E-3	9.60112E-2	2.73178E1	-3.26903E1	-3.26133E1	2.67914E1	2.26751E-9	2.53031E-3	2.53031E-3	6.28056E-3	2.40378E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18086E-1	-7.98559E-1	-9.13227E0	-9.14311E0	4.33922E-3	9.60827E-2	2.73231E1	-3.26765E1	-3.26044E1	2.68599E1	2.25786E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.41611E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.18276E-1	-7.98416E-1	-9.13212E0	-9.14299E0	4.31538E-3	9.6035E-2	2.73694E1	-3.26909E1	-3.25888E1	2.68941E1	2.23773E-9	2.52061E-3	2.52061E-3	6.28592E-3	2.4223E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.18062E-1	-7.98512E-1	-9.13203E0	-9.14335E0	4.41074E-3	9.55343E-2	2.72913E1	-3.26272E1	-3.26567E1	2.68677E1	2.23915E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.18253E-1	-7.98941E-1	-9.13222E0	-9.14319E0	4.29153E-3	9.57251E-2	2.73267E1	-3.265E1	-3.26212E1	2.68394E1	2.23526E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.41127E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.18253E-1	-7.98845E-1	-9.13239E0	-9.14338E0	4.43459E-3	9.5582E-2	2.73345E1	-3.2626E1	-3.25858E1	2.68617E1	2.23623E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.40708E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.18586E-1	-7.98965E-1	-9.13229E0	-9.14328E0	4.22001E-3	9.58681E-2	2.73183E1	-3.26783E1	-3.26212E1	2.68707E1	2.24207E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.41337E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.18491E-1	-7.98893E-1	-9.13198E0	-9.14342E0	4.31538E-3	9.57727E-2	2.73159E1	-3.26416E1	-3.27203E1	2.68154E1	2.24499E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.41756E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.18563E-1	-7.98655E-1	-9.1321E0	-9.14342E0	4.36306E-3	9.60827E-2	2.7337E1	-3.26189E1	-3.26626E1	2.68124E1	2.23332E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41127E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.18467E-1	-7.98702E-1	-9.13239E0	-9.14299E0	4.57764E-3	9.56535E-2	2.73105E1	-3.26741E1	-3.265E1	2.68672E1	2.23526E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.40918E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.18467E-1	-7.98965E-1	-9.13224E0	-9.14328E0	4.33922E-3	9.58681E-2	2.73222E1	-3.26585E1	-3.26502E1	2.68288E1	2.23583E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.41817E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18515E-1	-7.9906E-1	-9.13234E0	-9.14323E0	4.19617E-3	9.60112E-2	2.72348E1	-3.26591E1	-3.27984E1	2.68593E1	2.23869E-9	2.51417E-3	2.51417E-3	6.29128E-3	2.41199E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.183E-1	-7.98559E-1	-9.13239E0	-9.14328E0	4.60148E-3	9.5892E-2	2.73231E1	-3.26651E1	-3.26338E1	2.68695E1	2.23369E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.41693E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18229E-1	-7.98774E-1	-9.13253E0	-9.1435E0	4.88758E-3	9.57251E-2	2.73339E1	-3.26645E1	-3.25803E1	2.68358E1	2.23392E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.41611E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18229E-1	-7.98869E-1	-9.13246E0	-9.14326E0	4.24385E-3	9.58204E-2	2.73526E1	-3.26451E1	-3.26063E1	2.6843E1	2.23818E-9	2.51662E-3	2.51662E-3	6.26916E-3	2.41966E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.18253E-1	-7.98631E-1	-9.13246E0	-9.1433E0	4.31538E-3	9.59635E-2	2.72967E1	-3.26663E1	-3.262E1	2.68394E1	2.23869E-9	2.52707E-3	2.52707E-3	6.31278E-3	2.42024E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.183E-1	-7.98869E-1	-9.13241E0	-9.14328E0	4.19617E-3	9.58443E-2	2.73363E1	-3.26458E1	-3.25948E1	2.68142E1	2.23107E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.43058E-2