[Scan]
initial_time=2016-01-15T21:19:23
final_time=2016-01-15T21:19:42
ip_count=19
run=1023
dataset=2
scan=137
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.18682E-1
ql1_imon=1.3614E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=1.95223E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=1.86348E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=8.39591E-11
mult1=-8.42796E-9
mult2=-2.78648E-9
rf_tmon=-6.35095E-3
rf_agc=2.91398E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.66322E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68259E0
bslens_imon=2.3741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=2.01366E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.85188E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02073E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.55652E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36766E0
lens1_imon=2.72671E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65053E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04002E1
cs_ea2_imon=1.5145E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.97765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.35517E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.25454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15116E1
os_ea1_imon=2.35855E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20925E0
cs_ionrep_imon=1.19936E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93541E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.99351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.35998E-8
tplens_vset=1.4E-1
tplens_vmon=1.67571E0
tplens_imon=-3.91646E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25834E1
iondef3_imon=1.49871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.5549E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03037E2
lens6_imon=2.98287E-4
ql6_vset=1.0E-1
ql6_vmon=9.59873E-2
ql6_imon=4.15068E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27291E0
ionrepsh_imon=1.76794E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33468E1
lens5b_imon=2.16131E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45044E0
os_ea2_imon=-7.73635E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.41626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29965E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.10056E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.36778E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.89944E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82702E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86134E1
mask2_imon=-8.42748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.53463E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.51354E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.03143E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56596E0
defgridb_imon=5.95892E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33433E1
os_fil1_imon=9.43033E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07407E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65909E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=9.969E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61969E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6698E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1343E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66656E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.69813E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22616E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=2.41265E-2
chamber_ion_pmon=2.24062E-9
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40039E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14553E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18539E-1	-7.98988E-1	-9.13234E0	-9.14347E0	4.14848E-3	9.60827E-2	2.73311E1	-3.26661E1	-3.26661E1	2.68653E1	2.23468E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.41693E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.18467E-1	-7.99012E-1	-9.13219E0	-9.14345E0	4.14848E-3	9.59635E-2	2.73516E1	-3.26376E1	-3.26334E1	2.68244E1	2.23392E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.42437E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.18443E-1	-7.98869E-1	-9.132E0	-9.1435E0	4.14848E-3	9.59873E-2	2.73074E1	-3.26545E1	-3.26402E1	2.68104E1	2.23764E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.41907E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18324E-1	-7.98941E-1	-9.13236E0	-9.14335E0	4.62532E-3	9.59396E-2	2.73479E1	-3.26419E1	-3.26125E1	2.68358E1	2.23825E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.40865E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.18372E-1	-7.98941E-1	-9.13241E0	-9.14314E0	4.41074E-3	9.57489E-2	2.73252E1	-3.26638E1	-3.26024E1	2.68671E1	2.2372E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.40918E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18181E-1	-7.98917E-1	-9.13236E0	-9.14345E0	4.673E-3	9.57489E-2	2.73431E1	-3.26376E1	-3.26174E1	2.68294E1	2.23138E-9	2.52977E-3	2.52977E-3	6.31288E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.18348E-1	-7.98821E-1	-9.13227E0	-9.14321E0	4.43459E-3	9.57489E-2	2.73057E1	-3.26591E1	-3.26206E1	2.68448E1	2.24597E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.42387E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.1861E-1	-7.98631E-1	-9.13224E0	-9.14333E0	4.57764E-3	9.59158E-2	2.73544E1	-3.26669E1	-3.26032E1	2.68389E1	2.23429E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.42598E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.18706E-1	-7.98798E-1	-9.13219E0	-9.14321E0	4.31538E-3	9.58204E-2	2.73499E1	-3.26596E1	-3.2613E1	2.68737E1	2.24207E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.41127E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.18467E-1	-7.99084E-1	-9.13227E0	-9.14304E0	4.52995E-3	9.60112E-2	2.73193E1	-3.26372E1	-3.26791E1	2.67674E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.41817E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.18443E-1	-7.99298E-1	-9.13224E0	-9.14309E0	4.22001E-3	9.58204E-2	2.73015E1	-3.26392E1	-3.2629E1	2.68262E1	2.24251E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.42851E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.18276E-1	-7.99131E-1	-9.1325E0	-9.14328E0	4.3869E-3	9.59396E-2	2.73128E1	-3.26655E1	-3.26284E1	2.68285E1	2.23566E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.41479E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.18586E-1	-7.98869E-1	-9.13227E0	-9.14316E0	4.45843E-3	9.60588E-2	2.73153E1	-3.26296E1	-3.2638E1	2.68412E1	2.23487E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.42437E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.18396E-1	-7.98464E-1	-9.13246E0	-9.14319E0	4.55379E-3	9.58681E-2	2.73424E1	-3.26981E1	-3.26056E1	2.68292E1	2.23869E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.42024E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.18276E-1	-7.98702E-1	-9.13255E0	-9.14342E0	4.45843E-3	9.59873E-2	2.74319E1	-3.28006E1	-3.2695E1	2.68208E1	2.2372E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41546E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.18181E-1	-7.98774E-1	-9.13248E0	-9.14328E0	4.48227E-3	9.58681E-2	2.73588E1	-3.26915E1	-3.2616E1	2.68377E1	2.23583E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.40583E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.18515E-1	-7.99036E-1	-9.13224E0	-9.14333E0	4.52995E-3	9.5892E-2	2.73309E1	-3.26669E1	-3.26332E1	2.68316E1	2.23332E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.42177E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.18467E-1	-7.99084E-1	-9.132E0	-9.14295E0	4.64916E-3	9.59635E-2	2.73451E1	-3.26886E1	-3.26092E1	2.68151E1	2.23678E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.41611E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.18491E-1	-7.98941E-1	-9.13217E0	-9.14326E0	4.69685E-3	9.62496E-2	2.73664E1	-3.26452E1	-3.26326E1	2.68575E1	2.23918E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.41471E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.18682E-1	-7.98845E-1	-9.13236E0	-9.14328E0	4.43459E-3	9.59873E-2	2.73279E1	-3.26885E1	-3.25834E1	2.68256E1	2.24062E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.41265E-2