[Scan]
initial_time=2016-01-15T21:20:16
final_time=2016-01-15T21:20:36
ip_count=19
run=1023
dataset=2
scan=139
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0883E-4
ql1_vset=
ql1_vmon=-8.18515E-1
ql1_imon=1.36131E-8
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=2.04875E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=1.71912E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=7.16329E-11
mult1=-9.99324E-9
mult2=-2.72061E-9
rf_tmon=-4.57852E-3
rf_agc=3.30932E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.66602E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67279E0
bslens_imon=2.42552E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=2.00154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04817E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53898E1
cs_ef1b_imon=2.84779E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02463E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04786E1
cs_ea1_imon=2.5613E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36644E0
lens1_imon=2.41083E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65263E1
os_ef1alow_imon=3.00048E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.51413E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84438E1
cs_ef1a_imon=2.95258E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.35494E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11404E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.34863E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63928E1
os_ef1bup_imon=3.06448E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2472E0
cs_ionrep_imon=1.20597E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93468E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01578E1
cs_anode1_imon=2.97878E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.36394E-8
tplens_vset=1.4E-1
tplens_vmon=1.66837E0
tplens_imon=-2.07998E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26699E1
iondef3_imon=1.4965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.55454E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03038E2
lens6_imon=2.98015E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.0852E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27903E0
ionrepsh_imon=1.79291E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33774E1
lens5b_imon=2.19253E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75013E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4535E0
os_ea2_imon=-7.84654E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00491E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70946E1
cs_ef2a_imon=3.13896E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05082E0
os_ef2alow_imon=-2.43958E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.51275E-1
os_ef2bup_imon=-5.16792E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11273E1
os_restr2_imon=3.43088E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23104E2
cs_ionfoca_imon=6.29598E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01946E1
cs_anode2_imon=2.22502E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.11121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.10824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.36027E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.89427E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17755E0
cs_ionaccel_imon=-2.07281E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47294E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56773E1
einzel_imon=7.82632E-6
window_vset=0.0E0
window_vmon=2.42547E-1
window_imon=-1.12219E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.86637E1
mask2_imon=-8.00332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=6.91389E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.48416E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=6.91022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45564E0
defgridb_imon=5.92954E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33442E1
os_fil1_imon=9.42576E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0761E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65902E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30767E1
cs_fil1_imon=9.96201E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62091E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6705E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26571E-2
os_fil2_imon=-2.96191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79264E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33685E-1
cs_fil2_imon=-2.7623E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.2473E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2247E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31879E-3
inlet_lpb_pmon=2.41845E-2
chamber_ion_pmon=2.23407E-9
chamber_cvt_pmon=2.51384E-3
foreline_cvt_pmon=2.51384E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36731E-1
res40_imon=-2.31608E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18586E-1	-7.98655E-1	-9.13234E0	-9.1433E0	4.50611E-3	9.5892E-2	2.73169E1	-3.26266E1	-3.26266E1	2.68267E1	2.2426E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.42121E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18372E-1	-7.9844E-1	-9.13255E0	-9.14326E0	4.14848E-3	9.56535E-2	2.73792E1	-3.26585E1	-3.26376E1	2.68545E1	2.23202E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.41611E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.18276E-1	-7.98535E-1	-9.13219E0	-9.14328E0	4.17233E-3	9.56535E-2	2.73352E1	-3.26503E1	-3.26196E1	2.68141E1	2.24459E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.41265E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.18443E-1	-7.98678E-1	-9.13229E0	-9.14352E0	4.33922E-3	9.59635E-2	2.7302E1	-3.26548E1	-3.26199E1	2.68333E1	2.23637E-9	2.51287E-3	2.51287E-3	6.31798E-3	2.42892E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18563E-1	-7.98607E-1	-9.13229E0	-9.14338E0	4.41074E-3	9.59396E-2	2.73069E1	-3.2636E1	-3.26431E1	2.684E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.42598E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18324E-1	-7.98607E-1	-9.13243E0	-9.14319E0	4.43459E-3	9.56535E-2	2.73207E1	-3.26512E1	-3.26206E1	2.68893E1	2.24499E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.42177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.18539E-1	-7.99108E-1	-9.13248E0	-9.14314E0	4.24385E-3	9.54151E-2	2.73155E1	-3.26388E1	-3.26075E1	2.68423E1	2.23915E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.40918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.18491E-1	-7.98988E-1	-9.13243E0	-9.14316E0	4.55379E-3	9.56774E-2	2.73105E1	-3.26549E1	-3.26266E1	2.68706E1	2.23825E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.41674E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.18276E-1	-7.9875E-1	-9.1325E0	-9.14278E0	4.26769E-3	9.55582E-2	2.72821E1	-3.26207E1	-3.26077E1	2.68123E1	2.24207E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.41337E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.18348E-1	-7.9875E-1	-9.1326E0	-9.14302E0	4.50611E-3	9.5439E-2	2.73057E1	-3.2634E1	-3.26223E1	2.68382E1	2.22726E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.40583E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.183E-1	-7.98392E-1	-9.13246E0	-9.14328E0	4.69685E-3	9.58443E-2	2.73523E1	-3.26997E1	-3.26762E1	2.6831E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.40708E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.18348E-1	-7.98512E-1	-9.13243E0	-9.14323E0	4.64916E-3	9.57727E-2	2.73189E1	-3.26356E1	-3.26398E1	2.68286E1	2.23915E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.41546E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.18324E-1	-7.98893E-1	-9.13227E0	-9.14335E0	4.57764E-3	9.56535E-2	2.73387E1	-3.26703E1	-3.26248E1	2.68382E1	2.2372E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.41337E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.18229E-1	-7.99012E-1	-9.13246E0	-9.14345E0	4.64916E-3	9.59158E-2	2.72831E1	-3.26689E1	-3.26395E1	2.68034E1	2.23773E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.40378E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.18467E-1	-7.98869E-1	-9.13236E0	-9.14302E0	4.52995E-3	9.55343E-2	2.73496E1	-3.26783E1	-3.2605E1	2.68502E1	2.23468E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.41693E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.18396E-1	-7.98893E-1	-9.13203E0	-9.14323E0	4.41074E-3	9.5892E-2	2.73322E1	-3.26697E1	-3.26119E1	2.67962E1	2.24304E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.41756E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.183E-1	-7.9875E-1	-9.13212E0	-9.14328E0	4.26769E-3	9.57489E-2	2.73267E1	-3.26771E1	-3.2641E1	2.68106E1	2.23392E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.41199E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.18372E-1	-7.98869E-1	-9.13222E0	-9.14314E0	4.43459E-3	9.56297E-2	2.73319E1	-3.26175E1	-3.26141E1	2.68692E1	2.23665E-9	2.5147E-3	2.5147E-3	6.28511E-3	2.41693E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18157E-1	-7.98988E-1	-9.13234E0	-9.14328E0	4.48227E-3	9.56774E-2	2.72914E1	-3.2651E1	-3.26915E1	2.68319E1	2.23831E-9	2.52058E-3	2.52058E-3	6.31251E-3	2.42184E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.18515E-1	-7.99084E-1	-9.13208E0	-9.14316E0	4.48227E-3	9.56059E-2	2.73405E1	-3.26837E1	-3.26699E1	2.6828E1	2.23407E-9	2.51384E-3	2.51384E-3	6.31879E-3	2.41845E-2