[Scan]
initial_time=2016-01-15T21:21:09
final_time=2016-01-15T21:21:29
ip_count=19
run=1023
dataset=2
scan=141
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.18443E-1
ql1_imon=1.35504E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.99668E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=1.50299E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=4.71592E-11
mult1=-9.53661E-9
mult2=-2.72599E-9
rf_tmon=-6.13771E-3
rf_agc=3.13878E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.6974E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62433E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.87444E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04563E1
cs_ea1_imon=2.55636E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38554E0
lens1_imon=2.69899E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65176E1
os_ef1alow_imon=2.98148E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.5094E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84707E1
cs_ef1a_imon=2.9714E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.34534E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.24995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.35036E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63375E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19842E0
cs_ionrep_imon=1.20076E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=2.99746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.36393E-8
tplens_vset=1.4E-1
tplens_vmon=1.6314E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26309E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2634E1
iondef2_imon=1.53488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03045E2
lens6_imon=2.9807E-4
ql6_vset=1.0E-1
ql6_vmon=9.58681E-2
ql6_imon=4.12478E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=1.78441E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.1741E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74588E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40193E0
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06168E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.15733E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0812E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.12889E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11071E1
os_restr2_imon=3.42318E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.24125E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73271E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.10345E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.38418E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.90879E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14404E0
cs_ionaccel_imon=-1.87606E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.54883E-6
window_vset=0.0E0
window_vmon=2.48963E-1
window_imon=-9.27312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.8686E1
mask2_imon=-6.42342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.37809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=5.99772E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.98168E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54139E0
defgridb_imon=6.24548E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33405E1
os_fil1_imon=9.42298E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0719E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.658E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30841E1
cs_fil1_imon=9.95331E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62644E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67248E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.57651E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53951E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2264E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.41611E-2
chamber_ion_pmon=2.23487E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.61147E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.18706E-1	-7.98774E-1	-9.13181E0	-9.14307E0	4.69685E-3	9.62019E-2	2.73098E1	-3.26638E1	-3.26219E1	2.69403E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.41405E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.18682E-1	-7.98631E-1	-9.13193E0	-9.14314E0	4.45843E-3	9.60827E-2	2.73773E1	-3.2667E1	-3.26199E1	2.68112E1	2.23773E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.40994E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09294E0	-8.18634E-1	-7.9875E-1	-9.13219E0	-9.14335E0	4.62532E-3	9.59158E-2	2.73381E1	-3.26562E1	-3.26488E1	2.68331E1	2.23369E-9	2.51359E-3	2.51359E-3	6.30182E-3	2.41265E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.18801E-1	-7.98965E-1	-9.13217E0	-9.14326E0	4.31538E-3	9.6035E-2	2.7346E1	-3.26735E1	-3.26122E1	2.68328E1	2.2369E-9	2.51886E-3	2.51886E-3	6.3126E-3	2.41138E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18801E-1	-7.98798E-1	-9.13205E0	-9.14333E0	4.45843E-3	9.57966E-2	2.73175E1	-3.26703E1	-3.26101E1	2.68372E1	2.23526E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.41966E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18825E-1	-7.98702E-1	-9.13246E0	-9.1434E0	4.45843E-3	9.61065E-2	2.73614E1	-3.26774E1	-3.26334E1	2.6825E1	2.23964E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.41405E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.18706E-1	-7.99179E-1	-9.13253E0	-9.14323E0	4.86374E-3	9.57966E-2	2.73129E1	-3.26867E1	-3.26146E1	2.68157E1	2.23468E-9	2.51804E-3	2.51804E-3	6.34099E-3	2.41693E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.18658E-1	-7.98702E-1	-9.13243E0	-9.14316E0	4.45843E-3	9.61781E-2	2.72961E1	-3.26987E1	-3.26308E1	2.68292E1	2.25378E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.4302E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18729E-1	-7.98726E-1	-9.13208E0	-9.14309E0	4.55379E-3	9.6035E-2	2.73429E1	-3.26212E1	-3.26476E1	2.6822E1	2.24499E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.41127E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.18753E-1	-7.98631E-1	-9.13219E0	-9.14297E0	4.86374E-3	9.57012E-2	2.73352E1	-3.2685E1	-3.25888E1	2.68587E1	2.23773E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.40994E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.18539E-1	-7.98845E-1	-9.13239E0	-9.14309E0	4.72069E-3	9.59396E-2	2.7379E1	-3.26687E1	-3.26164E1	2.68172E1	2.23915E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.41756E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.18706E-1	-7.98917E-1	-9.13231E0	-9.14288E0	4.91142E-3	9.5892E-2	2.73381E1	-3.26344E1	-3.26681E1	2.6852E1	2.24109E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.40918E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.19087E-1	-7.98893E-1	-9.13262E0	-9.14319E0	4.8399E-3	9.59396E-2	2.7364E1	-3.26849E1	-3.25924E1	2.68274E1	2.23869E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.41611E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.18491E-1	-7.98821E-1	-9.13255E0	-9.14309E0	4.95911E-3	9.6035E-2	2.73862E1	-3.26461E1	-3.26092E1	2.68183E1	2.23941E-9	2.52256E-3	2.52256E-3	6.31541E-3	2.41031E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18276E-1	-7.99036E-1	-9.13262E0	-9.14304E0	4.76837E-3	9.61781E-2	2.74641E1	-3.27324E1	-3.25163E1	2.68153E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18419E-1	-7.98917E-1	-9.13222E0	-9.14326E0	4.57764E-3	9.62496E-2	2.73594E1	-3.26585E1	-3.26366E1	2.68821E1	2.23549E-9	2.51642E-3	2.51642E-3	6.33648E-3	2.41781E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18729E-1	-7.98798E-1	-9.13234E0	-9.14321E0	4.673E-3	9.60112E-2	2.73319E1	-3.26372E1	-3.26618E1	2.68004E1	2.23818E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.41127E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.18801E-1	-7.98893E-1	-9.13219E0	-9.1433E0	4.60148E-3	9.6035E-2	2.72763E1	-3.26164E1	-3.26392E1	2.68343E1	2.23741E-9	2.5216E-3	2.5216E-3	6.32273E-3	2.41402E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.18682E-1	-7.98655E-1	-9.13196E0	-9.14354E0	4.72069E-3	9.58681E-2	2.73914E1	-3.26666E1	-3.26052E1	2.6768E1	2.23583E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.41405E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.18443E-1	-7.98726E-1	-9.13224E0	-9.14316E0	5.05447E-3	9.58681E-2	2.73271E1	-3.2634E1	-3.26309E1	2.68484E1	2.23487E-9	2.52492E-3	2.52492E-3	6.29128E-3	2.41611E-2