[Scan]
initial_time=2016-01-15T21:21:36
final_time=2016-01-15T21:21:56
ip_count=19
run=1023
dataset=2
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08702E-4
ql1_vset=
ql1_vmon=-8.18419E-1
ql1_imon=1.3654E-8
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=1.9698E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=1.94311E-10
ql4_vset=
ql4_vmon=-9.1433E0
ql4_imon=7.60555E-11
mult1=-9.89692E-9
mult2=-2.69067E-9
rf_tmon=-4.04378E-3
rf_agc=3.42889E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.70846E-9
bslens_vset=-6.2E0
bslens_vmon=-6.72201E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=2.00326E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.04812E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.86954E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.01851E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.56599E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38758E0
lens1_imon=2.8622E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.49929E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=2.98594E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.35365E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=4.24841E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.33383E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63257E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30257E0
cs_ionrep_imon=1.20296E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91974E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=3.00036E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.35939E-8
tplens_vset=1.4E-1
tplens_vmon=1.67147E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.47946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.98267E-4
ql6_vset=1.0E-1
ql6_vmon=9.58204E-2
ql6_imon=4.0715E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3254E0
ionrepsh_imon=1.77434E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47561E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00316E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.44797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.24989E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74409E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68603E1
iondef4_imon=1.07945E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.41872E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.89048E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02156E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=2.3296E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82725E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.20977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.19317E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.16651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54893E0
defgridb_imon=5.9192E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33418E1
os_fil1_imon=9.42276E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=9.95711E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62408E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67323E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85643E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22661E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.18086E-1	-7.98774E-1	-9.13196E0	-9.14304E0	4.55379E-3	9.56297E-2	2.73771E1	-3.26756E1	-3.26484E1	2.68208E1	2.23818E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.41337E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.1811E-1	-7.98869E-1	-9.1321E0	-9.14354E0	5.03063E-3	9.58204E-2	2.73045E1	-3.26657E1	-3.26116E1	2.6843E1	2.2406E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.42024E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.18133E-1	-7.98917E-1	-9.13198E0	-9.14316E0	4.86374E-3	9.6035E-2	2.73712E1	-3.2649E1	-3.26502E1	2.67966E1	2.23526E-9	2.50898E-3	2.50898E-3	6.32936E-3	2.41546E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18181E-1	-7.98965E-1	-9.13222E0	-9.14328E0	4.64916E-3	9.59158E-2	2.73499E1	-3.26779E1	-3.26001E1	2.6825E1	2.24012E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.41067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.183E-1	-7.98702E-1	-9.13208E0	-9.14326E0	4.86374E-3	9.62257E-2	2.73177E1	-3.26615E1	-3.26452E1	2.6834E1	2.23623E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.40918E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.18372E-1	-7.99012E-1	-9.13234E0	-9.1433E0	4.86374E-3	9.58443E-2	2.72522E1	-3.26536E1	-3.2629E1	2.68508E1	2.2372E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.40918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.18253E-1	-7.99108E-1	-9.13246E0	-9.14381E0	4.72069E-3	9.56297E-2	2.74144E1	-3.26152E1	-3.26104E1	2.6849E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.42177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.18062E-1	-7.98678E-1	-9.13217E0	-9.14338E0	4.72069E-3	9.57966E-2	2.73784E1	-3.26248E1	-3.26272E1	2.68478E1	2.23623E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.42177E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.18253E-1	-7.9875E-1	-9.13215E0	-9.14338E0	4.673E-3	9.57727E-2	2.72204E1	-3.26927E1	-3.26194E1	2.68412E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41546E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.18181E-1	-7.98893E-1	-9.13203E0	-9.14309E0	4.86374E-3	9.57489E-2	2.74072E1	-3.26773E1	-3.26248E1	2.68847E1	2.24207E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41127E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.18276E-1	-7.98869E-1	-9.13212E0	-9.1434E0	4.93526E-3	9.58204E-2	2.72862E1	-3.2688E1	-3.2682E1	2.68671E1	2.23583E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.43681E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.18324E-1	-7.98893E-1	-9.13234E0	-9.14354E0	4.74453E-3	9.59158E-2	2.7233E1	-3.26428E1	-3.2638E1	2.67992E1	2.23392E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.42437E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.18348E-1	-7.98917E-1	-9.13241E0	-9.14342E0	4.64916E-3	9.57727E-2	2.73556E1	-3.26512E1	-3.25828E1	2.68464E1	2.23623E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.40708E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.18443E-1	-7.98845E-1	-9.1325E0	-9.1435E0	4.55379E-3	9.57251E-2	2.7411E1	-3.26824E1	-3.25839E1	2.6836E1	2.24538E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.40788E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.18586E-1	-7.98774E-1	-9.13222E0	-9.14311E0	4.52995E-3	9.5892E-2	2.73887E1	-3.27907E1	-3.24981E1	2.68082E1	2.23637E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.41067E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.18563E-1	-7.98798E-1	-9.13217E0	-9.14304E0	4.24385E-3	9.59158E-2	2.72119E1	-3.26472E1	-3.26413E1	2.68346E1	2.24459E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.41052E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18443E-1	-7.98869E-1	-9.13222E0	-9.14273E0	4.36306E-3	9.57966E-2	2.73317E1	-3.26886E1	-3.26585E1	2.68294E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.41756E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18372E-1	-7.99108E-1	-9.13229E0	-9.14307E0	4.72069E-3	9.56774E-2	2.73124E1	-3.26199E1	-3.26156E1	2.68269E1	2.23874E-9	2.5199E-3	2.5199E-3	6.3282E-3	2.41535E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.18276E-1	-7.98965E-1	-9.13224E0	-9.14345E0	4.55379E-3	9.58204E-2	2.73464E1	-3.26927E1	-3.2603E1	2.68058E1	2.24037E-9	2.5234E-3	2.5234E-3	6.31847E-3	2.42255E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18419E-1	-7.99084E-1	-9.13224E0	-9.1433E0	4.24385E-3	9.58204E-2	2.74409E1	-3.26855E1	-3.26254E1	2.68603E1