[Scan]
initial_time=2016-01-15T21:22:03
final_time=2016-01-15T21:22:22
ip_count=19
run=1023
dataset=2
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.18467E-1
ql1_imon=1.36083E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=2.03947E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.86121E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=5.53608E-11
mult1=-9.46345E-9
mult2=-2.64675E-9
rf_tmon=-5.07119E-3
rf_agc=3.30692E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.69251E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.19889E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19544E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54181E1
cs_ef1b_imon=2.87891E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04327E1
cs_ea1_imon=2.55049E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3287E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.51767E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.94017E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.34373E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11688E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.34357E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64146E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.19178E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=2.97693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.37322E-8
tplens_vset=1.4E-1
tplens_vmon=1.65705E0
tplens_imon=-2.02012E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.98317E-4
ql6_vset=1.0E-1
ql6_vmon=9.5439E-2
ql6_imon=4.12868E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=1.77362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34108E1
lens5b_imon=2.15647E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74399E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45277E0
os_ea2_imon=-8.61719E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71612E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.44437E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.28594E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.25218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73442E1
iondef1_imon=1.1132E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68617E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.44193E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.90005E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.64194E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82722E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.96967E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33396E1
os_fil1_imon=9.41357E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07762E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6578E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.94942E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73269E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22701E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.42387E-2
chamber_ion_pmon=2.24694E-9
chamber_cvt_pmon=2.50898E-3
foreline_cvt_pmon=2.50898E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11549E-1
res40_imon=-2.64113E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.18253E-1	-7.98845E-1	-9.13241E0	-9.14302E0	4.52995E-3	9.57727E-2	2.73339E1	-3.26711E1	-3.26248E1	2.68478E1	2.24207E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41546E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.18372E-1	-7.98917E-1	-9.13224E0	-9.14342E0	4.62532E-3	9.5892E-2	2.73075E1	-3.26517E1	-3.26468E1	2.6835E1	2.24207E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.40918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.18372E-1	-7.9875E-1	-9.13219E0	-9.14307E0	4.86374E-3	9.57012E-2	2.73222E1	-3.26225E1	-3.26107E1	2.68343E1	2.24161E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.40626E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18324E-1	-7.9875E-1	-9.13246E0	-9.14333E0	4.81606E-3	9.57251E-2	2.72968E1	-3.26484E1	-3.26183E1	2.68166E1	2.23107E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.42024E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.18443E-1	-7.98702E-1	-9.13224E0	-9.14311E0	4.86374E-3	9.56297E-2	2.73173E1	-3.26572E1	-3.2694E1	2.68208E1	2.23583E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.43266E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18419E-1	-7.99108E-1	-9.13229E0	-9.14302E0	4.62532E-3	9.56297E-2	2.7295E1	-3.26758E1	-3.26255E1	2.68501E1	2.23705E-9	2.51937E-3	2.51937E-3	6.31007E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.18348E-1	-7.99036E-1	-9.13231E0	-9.1433E0	4.88758E-3	9.58204E-2	2.73946E1	-3.26688E1	-3.25929E1	2.68465E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18443E-1	-7.98869E-1	-9.13219E0	-9.14323E0	4.62532E-3	9.56297E-2	2.73198E1	-3.2629E1	-3.26537E1	2.6801E1	2.24064E-9	2.52106E-3	2.52106E-3	6.31321E-3	2.41337E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18348E-1	-7.98917E-1	-9.13241E0	-9.14314E0	4.55379E-3	9.57727E-2	2.73069E1	-3.26719E1	-3.26291E1	2.68569E1	2.23235E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.41966E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.18396E-1	-7.98678E-1	-9.13255E0	-9.14316E0	4.17233E-3	9.57489E-2	2.72926E1	-3.26515E1	-3.26405E1	2.68685E1	2.23526E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.40082E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.18396E-1	-7.98845E-1	-9.13231E0	-9.14326E0	4.673E-3	9.58204E-2	2.73216E1	-3.26213E1	-3.26083E1	2.68522E1	2.23848E-9	2.52144E-3	2.52144E-3	6.31203E-3	2.41042E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18396E-1	-7.98917E-1	-9.13239E0	-9.14295E0	4.3869E-3	9.57489E-2	2.73181E1	-3.26301E1	-3.26313E1	2.68496E1	2.2406E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.40583E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.18563E-1	-7.98988E-1	-9.13239E0	-9.14309E0	4.62532E-3	9.56297E-2	2.73496E1	-3.26464E1	-3.26146E1	2.68208E1	2.24251E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.43058E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.18563E-1	-7.98631E-1	-9.13241E0	-9.14285E0	4.41074E-3	9.59635E-2	2.73159E1	-3.26843E1	-3.25888E1	2.68124E1	2.24304E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.40918E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.1861E-1	-7.98941E-1	-9.13219E0	-9.14328E0	4.24385E-3	9.59158E-2	2.74851E1	-3.28782E1	-3.25501E1	2.68334E1	2.23138E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.41337E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18467E-1	-7.98893E-1	-9.13191E0	-9.14302E0	4.19617E-3	9.58681E-2	2.73334E1	-3.26608E1	-3.26449E1	2.68665E1	2.23235E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.40291E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.1861E-1	-7.98798E-1	-9.13227E0	-9.14333E0	4.64916E-3	9.57251E-2	2.7334E1	-3.26472E1	-3.26343E1	2.68412E1	2.23623E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.40708E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.18777E-1	-7.99203E-1	-9.132E0	-9.14326E0	4.69685E-3	9.59635E-2	2.73652E1	-3.26885E1	-3.26062E1	2.68466E1	2.23869E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.40788E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.18706E-1	-7.99084E-1	-9.13184E0	-9.14323E0	4.69685E-3	9.58204E-2	2.73511E1	-3.26502E1	-3.26284E1	2.68412E1	2.24442E-9	2.51525E-3	2.51525E-3	6.35059E-3	2.41199E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.18467E-1	-7.98988E-1	-9.13231E0	-9.14271E0	4.72069E-3	9.5439E-2	2.73442E1	-3.26476E1	-3.26296E1	2.68617E1	2.24694E-9	2.50898E-3	2.50898E-3	6.31837E-3	2.42387E-2