[Scan]
initial_time=2016-01-15T21:22:29
final_time=2016-01-15T21:22:49
ip_count=19
run=1023
dataset=2
scan=144
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.18348E-1
ql1_imon=1.36103E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=2.01071E-9
ql3_vset=
ql3_vmon=-9.13217E0
ql3_imon=1.86932E-10
ql4_vset=
ql4_vmon=-9.14335E0
ql4_imon=5.86629E-11
mult1=-9.95196E-9
mult2=-2.67274E-9
rf_tmon=-3.39011E-3
rf_agc=3.51262E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.75437E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69077E0
bslens_imon=2.38274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19568E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54151E1
cs_ef1b_imon=2.87422E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04219E1
cs_ea1_imon=2.57356E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4008E0
lens1_imon=2.51973E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.52092E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84658E1
cs_ef1a_imon=2.96468E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.35481E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.24517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=2.35979E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.1907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02115E1
cs_anode1_imon=2.99604E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20372E0
olens4_imon=3.36156E-8
tplens_vset=1.4E-1
tplens_vmon=1.67628E0
tplens_imon=-1.80383E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.54002E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03011E2
lens6_imon=2.98057E-4
ql6_vset=1.0E-1
ql6_vmon=9.59635E-2
ql6_imon=4.13592E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.77723E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.111E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00774E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.3456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.42887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.25674E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72667E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67933E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.4281E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.89359E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-6.22906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8273E2
mask1_imon=2.38951E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.59332E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.07278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54593E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3342E1
os_fil1_imon=9.42756E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.09077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65562E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30784E1
cs_fil1_imon=9.95308E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62588E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67091E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22571E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50282E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.18419E-1	-7.98965E-1	-9.13212E0	-9.14307E0	4.57764E-3	9.60588E-2	2.7334E1	-3.26425E1	-3.26325E1	2.68563E1	2.2372E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.42387E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.1861E-1	-7.98774E-1	-9.13224E0	-9.14307E0	4.673E-3	9.61065E-2	2.73381E1	-3.26573E1	-3.26116E1	2.6792E1	2.24251E-9	2.51793E-3	2.51793E-3	6.32087E-3	2.41817E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.1861E-1	-7.98631E-1	-9.13255E0	-9.14299E0	4.43459E-3	9.6035E-2	2.72744E1	-3.26393E1	-3.26463E1	2.68621E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.18729E-1	-7.98559E-1	-9.13258E0	-9.14283E0	4.3869E-3	9.58443E-2	2.73159E1	-3.26573E1	-3.26362E1	2.68683E1	2.26461E-9	2.52815E-3	2.52815E-3	6.33436E-3	2.40788E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.18729E-1	-7.98655E-1	-9.13243E0	-9.14319E0	4.48227E-3	9.59158E-2	2.73411E1	-3.26633E1	-3.26002E1	2.68701E1	2.26654E-9	2.52757E-3	2.52757E-3	6.33486E-3	2.41546E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.18443E-1	-7.98368E-1	-9.13253E0	-9.14328E0	4.62532E-3	9.60112E-2	2.73139E1	-3.26838E1	-3.26083E1	2.68148E1	2.26654E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.41546E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.18467E-1	-7.98655E-1	-9.13241E0	-9.14299E0	4.62532E-3	9.58681E-2	2.73051E1	-3.26549E1	-3.26302E1	2.68352E1	2.2569E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.40583E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.18276E-1	-7.98559E-1	-9.1326E0	-9.14314E0	4.64916E-3	9.59396E-2	2.72835E1	-3.26663E1	-3.2626E1	2.68244E1	2.24499E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.40499E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.18372E-1	-7.98774E-1	-9.13227E0	-9.14307E0	4.76837E-3	9.59396E-2	2.73104E1	-3.26537E1	-3.26178E1	2.68597E1	2.24987E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.41546E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.18253E-1	-7.98607E-1	-9.13234E0	-9.14299E0	4.81606E-3	9.60112E-2	2.73279E1	-3.26897E1	-3.2611E1	2.67896E1	2.25518E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.41876E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.18419E-1	-7.98821E-1	-9.13198E0	-9.14326E0	4.81606E-3	9.61542E-2	2.7352E1	-3.27059E1	-3.25906E1	2.68316E1	2.24402E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.41966E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18419E-1	-7.98893E-1	-9.13236E0	-9.14292E0	4.88758E-3	9.62496E-2	2.7352E1	-3.26699E1	-3.26176E1	2.68779E1	2.23072E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.41907E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.18467E-1	-7.98917E-1	-9.13224E0	-9.14299E0	4.74453E-3	9.62734E-2	2.73605E1	-3.26307E1	-3.26248E1	2.68178E1	2.23818E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.41337E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18753E-1	-7.98869E-1	-9.13222E0	-9.14323E0	4.41074E-3	9.60112E-2	2.73417E1	-3.26356E1	-3.26428E1	2.68496E1	2.24442E-9	2.51632E-3	2.51632E-3	6.29128E-3	2.41611E-2
1.8E1	2.0E0	1.0E0	7.27E2	5.0E2	-2.09487E0	-8.18658E-1	-7.98583E-1	-9.13222E0	-9.14321E0	4.45843E-3	9.56535E-2	2.737E1	-3.27378E1	-3.2739E1	2.6846E1	2.23915E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.4302E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18777E-1	-7.98893E-1	-9.13184E0	-9.14328E0	4.43459E-3	9.58204E-2	2.72889E1	-3.26416E1	-3.26573E1	2.68611E1	2.24012E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.41337E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18825E-1	-7.98535E-1	-9.13177E0	-9.14326E0	4.31538E-3	9.57012E-2	2.73764E1	-3.26925E1	-3.25978E1	2.68333E1	2.23624E-9	2.5223E-3	2.5223E-3	6.30998E-3	2.42158E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18515E-1	-7.98821E-1	-9.13208E0	-9.14302E0	4.31538E-3	9.57966E-2	2.73279E1	-3.26897E1	-3.26266E1	2.68058E1	2.23526E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.4302E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.18491E-1	-7.98512E-1	-9.13227E0	-9.1433E0	4.50611E-3	9.59635E-2	2.73393E1	-3.26927E1	-3.26236E1	2.6849E1	2.23964E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.41199E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.18348E-1	-7.98798E-1	-9.13217E0	-9.14335E0	4.43459E-3	9.59635E-2	2.72667E1	-3.26591E1	-3.26201E1	2.67933E1