[Scan]
initial_time=2016-01-15T21:22:56
final_time=2016-01-15T21:23:15
ip_count=19
run=1023
dataset=2
scan=145
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.18324E-1
ql1_imon=1.36257E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=2.00031E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=1.93369E-10
ql4_vset=
ql4_vmon=-9.14333E0
ql4_imon=4.58717E-11
mult1=-9.27081E-9
mult2=-2.78249E-9
rf_tmon=-2.87818E-3
rf_agc=3.5821E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=1.70963E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19352E1
lens5a_imon=2.00903E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04772E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.88792E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04543E1
cs_ea1_imon=2.54184E-5
lens1_vset=-5.0E0
lens1_vmon=-5.399E0
lens1_imon=2.62788E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.50073E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.33862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.2549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1575E1
os_ea1_imon=2.3396E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21665E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91964E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.98522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.35197E-8
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2614E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03032E2
lens6_imon=2.98047E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.19666E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30617E0
ionrepsh_imon=1.80318E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.16044E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48942E0
os_ea2_imon=-5.76927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00342E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71528E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11514E1
os_restr2_imon=3.43248E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.27008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.20641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72576E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68441E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.37543E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.87665E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17399E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.91849E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8274E2
mask1_imon=2.38911E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-4.57124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92688E3
multa_neg_imon=6.91056E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.34819E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.32513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25419E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33387E1
os_fil1_imon=9.41633E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07335E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65837E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30761E1
cs_fil1_imon=9.94942E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66975E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80101E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2271E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.40708E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.72216E-1
res40_imon=-2.342E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.18467E-1	-7.98845E-1	-9.132E0	-9.1433E0	4.48227E-3	9.61781E-2	2.73381E1	-3.26704E1	-3.26328E1	2.68464E1	2.23818E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.40918E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18515E-1	-7.98678E-1	-9.13193E0	-9.14326E0	4.33922E-3	9.58204E-2	2.7307E1	-3.26387E1	-3.26025E1	2.68487E1	2.23825E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.41269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18729E-1	-7.98917E-1	-9.13203E0	-9.1435E0	4.43459E-3	9.5439E-2	2.73364E1	-3.26492E1	-3.2699E1	2.68007E1	2.23709E-9	2.51611E-3	2.51611E-3	6.3245E-3	2.42282E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.18777E-1	-7.98678E-1	-9.13215E0	-9.14307E0	4.52995E-3	9.58681E-2	2.73375E1	-3.26585E1	-3.26561E1	2.68803E1	2.23544E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.42688E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.18563E-1	-7.99012E-1	-9.13219E0	-9.14283E0	4.74453E-3	9.57489E-2	2.73345E1	-3.26428E1	-3.26014E1	2.68629E1	2.24402E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.42177E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.18563E-1	-7.9906E-1	-9.13191E0	-9.14292E0	4.36306E-3	9.56535E-2	2.73417E1	-3.26867E1	-3.25996E1	2.67902E1	2.24062E-9	2.51804E-3	2.51804E-3	6.34661E-3	2.42336E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.18563E-1	-7.99012E-1	-9.13222E0	-9.14338E0	4.57764E-3	9.57489E-2	2.72721E1	-3.26614E1	-3.26608E1	2.68605E1	2.23869E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.42437E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.18634E-1	-7.98798E-1	-9.132E0	-9.14323E0	4.52995E-3	9.55105E-2	2.73081E1	-3.26783E1	-3.25737E1	2.68514E1	2.2372E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.40708E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.1861E-1	-7.99131E-1	-9.13188E0	-9.14314E0	4.8399E-3	9.56059E-2	2.72895E1	-3.2647E1	-3.26242E1	2.68794E1	2.23623E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.42809E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.18682E-1	-7.99084E-1	-9.13184E0	-9.14311E0	4.74453E-3	9.58443E-2	2.72898E1	-3.26349E1	-3.26142E1	2.68611E1	2.24036E-9	2.51972E-3	2.51972E-3	6.33461E-3	2.41683E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18229E-1	-7.99084E-1	-9.132E0	-9.14297E0	4.33922E-3	9.58681E-2	2.7324E1	-3.26602E1	-3.25877E1	2.67878E1	2.2406E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.4223E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.18396E-1	-7.99012E-1	-9.13227E0	-9.14333E0	4.64916E-3	9.61065E-2	2.73163E1	-3.27034E1	-3.26023E1	2.68809E1					
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.18276E-1	-7.99036E-1	-9.13227E0	-9.14335E0	4.43459E-3	9.62257E-2	2.73323E1	-3.26642E1	-3.26689E1	2.67926E1	2.23963E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.40839E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.18372E-1	-7.99012E-1	-9.13217E0	-9.14357E0	4.55379E-3	9.59873E-2	2.73261E1	-3.26242E1	-3.26591E1	2.68599E1	2.2406E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.41199E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.183E-1	-7.98988E-1	-9.13231E0	-9.14361E0	4.52995E-3	9.57489E-2	2.73484E1	-3.26242E1	-3.25431E1	2.68022E1	2.24109E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.41966E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18253E-1	-7.9906E-1	-9.13224E0	-9.14323E0	4.41074E-3	9.59635E-2	2.73215E1	-3.26829E1	-3.26467E1	2.68277E1	2.24233E-9	2.51915E-3	2.51915E-3	6.3323E-3	2.41135E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.18443E-1	-7.98941E-1	-9.13227E0	-9.14338E0	4.33922E-3	9.60588E-2	2.72702E1	-3.26416E1	-3.2632E1	2.68328E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.18706E-1	-7.98559E-1	-9.13231E0	-9.14326E0	4.31538E-3	9.57489E-2	2.73965E1	-3.26708E1	-3.26054E1	2.68875E1	2.2406E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.43473E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.18467E-1	-7.98774E-1	-9.13224E0	-9.14338E0	4.17233E-3	9.60588E-2	2.72877E1	-3.26266E1	-3.26362E1	2.68328E1	2.23818E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.41127E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.18324E-1	-7.98774E-1	-9.13212E0	-9.14333E0	4.12464E-3	9.60827E-2	2.72576E1	-3.2614E1	-3.26362E1	2.68441E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.40708E-2