[Scan]
initial_time=2016-01-15T21:23:23
final_time=2016-01-15T21:23:42
ip_count=19
run=1023
dataset=2
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.17943E-1
ql1_imon=1.35874E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=2.06498E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=1.46449E-10
ql4_vset=
ql4_vmon=-9.14307E0
ql4_imon=5.54562E-11
mult1=-9.32806E-9
mult2=-2.71582E-9
rf_tmon=-4.50936E-3
rf_agc=3.3916E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.68682E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.32146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.88936E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.57284E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34793E0
lens1_imon=2.63148E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.51082E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=2.95927E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.3518E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1155E1
os_restr1_imon=4.24625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.33636E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.177E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.98126E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2037E0
olens4_imon=3.35545E-8
tplens_vset=1.4E-1
tplens_vmon=1.68409E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26566E1
iondef2_imon=1.55048E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03041E2
lens6_imon=2.98072E-4
ql6_vset=1.0E-1
ql6_vmon=9.59635E-2
ql6_imon=4.15216E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=1.77579E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44436E0
os_ea2_imon=-8.40089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00807E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71606E1
cs_ef2a_imon=3.14272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.46303E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.42635E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73773E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68207E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.39001E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.88959E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.71851E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.39567E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.68563E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.10883E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55495E0
defgridb_imon=5.93722E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33396E1
os_fil1_imon=9.41297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65478E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=9.95519E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62432E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6706E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91573E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.57469E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29816E-3
inlet_lpb_pmon=2.4335E-2
chamber_ion_pmon=2.2352E-9
chamber_cvt_pmon=2.52421E-3
foreline_cvt_pmon=2.52421E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91127E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18205E-1	-7.98655E-1	-9.13219E0	-9.14311E0	4.22001E-3	9.61304E-2	2.73269E1	-3.26915E1	-3.26054E1	2.6831E1	2.23429E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.43442E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.18276E-1	-7.98655E-1	-9.13217E0	-9.14309E0	4.52995E-3	9.62973E-2	2.73504E1	-3.26523E1	-3.25948E1	2.68286E1	2.23011E-9	2.52061E-3	2.52061E-3	6.28592E-3	2.41611E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.18443E-1	-7.98702E-1	-9.13224E0	-9.14345E0	4.31538E-3	9.62734E-2	2.73584E1	-3.27378E1	-3.26405E1	2.68267E1	2.23526E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41337E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18563E-1	-7.98631E-1	-9.13229E0	-9.14347E0	4.60148E-3	9.60827E-2	2.73003E1	-3.26825E1	-3.2641E1	2.68635E1	2.242E-9	2.52553E-3	2.52553E-3	6.31798E-3	2.41471E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.18467E-1	-7.98655E-1	-9.13239E0	-9.14338E0	4.50611E-3	9.60112E-2	2.7321E1	-3.26231E1	-3.2629E1	2.68352E1	2.23915E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.40918E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.18324E-1	-7.98535E-1	-9.13246E0	-9.14352E0	4.17233E-3	9.6035E-2	2.73177E1	-3.26963E1	-3.26158E1	2.68607E1	2.2406E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.40788E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.18253E-1	-7.98559E-1	-9.13224E0	-9.14376E0	4.673E-3	9.59396E-2	2.73219E1	-3.26735E1	-3.26068E1	2.68601E1	2.2372E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.18133E-1	-7.98655E-1	-9.13212E0	-9.14354E0	4.62532E-3	9.59158E-2	2.73099E1	-3.26008E1	-3.26512E1	2.68587E1	2.24109E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.42387E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18038E-1	-7.98821E-1	-9.13224E0	-9.14347E0	4.673E-3	9.60588E-2	2.73305E1	-3.26608E1	-3.25753E1	2.6843E1	2.23818E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41966E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.18515E-1	-7.98845E-1	-9.13246E0	-9.14345E0	4.41074E-3	9.57966E-2	2.73399E1	-3.26843E1	-3.26567E1	2.68226E1	2.23526E-9	2.5068E-3	2.5068E-3	6.31837E-3	2.41337E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.183E-1	-7.98845E-1	-9.13241E0	-9.14342E0	4.62532E-3	9.57727E-2	2.73117E1	-3.26609E1	-3.26464E1	2.68611E1	2.23487E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.41817E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18181E-1	-7.98678E-1	-9.13231E0	-9.14357E0	4.45843E-3	9.54628E-2	2.73417E1	-3.26464E1	-3.26536E1	2.68556E1	2.23332E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41966E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18253E-1	-7.9906E-1	-9.13203E0	-9.1433E0	4.43459E-3	9.5892E-2	2.73222E1	-3.26703E1	-3.26408E1	2.68583E1	2.23623E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.41966E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18253E-1	-7.99322E-1	-9.13241E0	-9.14333E0	4.41074E-3	9.5892E-2	2.73293E1	-3.26608E1	-3.26579E1	2.67964E1	2.23964E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.42024E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.18229E-1	-7.98965E-1	-9.13224E0	-9.14335E0	4.64916E-3	9.59158E-2	2.73087E1	-3.26735E1	-3.27227E1	2.68478E1	2.23623E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.41127E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.1811E-1	-7.9906E-1	-9.1321E0	-9.14345E0	4.76837E-3	9.60588E-2	2.73302E1	-3.26756E1	-3.26223E1	2.68282E1	2.24207E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.40708E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.18419E-1	-7.99274E-1	-9.13179E0	-9.1433E0	4.57764E-3	9.61542E-2	2.72791E1	-3.27068E1	-3.2613E1	2.6796E1	2.2372E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.18133E-1	-7.99298E-1	-9.13186E0	-9.14316E0	5.00679E-3	9.59873E-2	2.73057E1	-3.27033E1	-3.26071E1	2.68412E1	2.23818E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41127E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.18086E-1	-7.98917E-1	-9.13229E0	-9.14307E0	4.76837E-3	9.60588E-2	2.73405E1	-3.2628E1	-3.2629E1	2.68313E1	2.23825E-9	2.52342E-3	2.52342E-3	6.3074E-3	2.41876E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17943E-1	-7.99036E-1	-9.13205E0	-9.14307E0	4.72069E-3	9.59635E-2	2.73773E1	-3.26566E1	-3.26272E1	2.68207E1	2.2352E-9	2.52421E-3	2.52421E-3	6.29816E-3	2.4335E-2