[Scan]
initial_time=2016-01-15T21:24:16
final_time=2016-01-15T21:24:36
ip_count=19
run=1023
dataset=2
scan=148
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.183E-1
ql1_imon=1.36562E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.95825E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.94454E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=7.03573E-11
mult1=-9.94508E-9
mult2=-2.6727E-9
rf_tmon=-7.86503E-3
rf_agc=2.92059E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.70763E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63023E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=2.00067E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=2.85404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=2.55707E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34778E0
lens1_imon=2.79102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65083E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.51754E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.9654E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34421E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.25923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.32523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63299E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28572E0
cs_ionrep_imon=1.19227E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.97081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20368E0
olens4_imon=3.36521E-8
tplens_vset=1.4E-1
tplens_vmon=1.69039E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.51577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26338E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03044E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.60588E-2
ql6_imon=4.14296E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30814E0
ionrepsh_imon=1.79114E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47626E0
os_ea2_imon=-8.54574E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.14416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.30956E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.26731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.09069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67839E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.40918E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.92649E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.95637E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82702E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.62231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.88965E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.88257E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=9.41976E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07179E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65817E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30754E1
cs_fil1_imon=9.96654E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62462E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67034E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75465E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41546E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.47879E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.18372E-1	-7.98774E-1	-9.13236E0	-9.14304E0	4.91142E-3	9.59396E-2	2.73484E1	-3.26518E1	-3.26302E1	2.68785E1	2.23869E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.41405E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.18419E-1	-7.98941E-1	-9.13208E0	-9.14328E0	4.95911E-3	9.5892E-2	2.7344E1	-3.26579E1	-3.26077E1	2.6836E1	2.23623E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41546E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.18324E-1	-7.98941E-1	-9.13186E0	-9.14321E0	4.72069E-3	9.56774E-2	2.7357E1	-3.26797E1	-3.26272E1	2.68538E1	2.24155E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.40788E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18419E-1	-7.99322E-1	-9.13193E0	-9.14347E0	5.17368E-3	9.62257E-2	2.7308E1	-3.26461E1	-3.26343E1	2.68447E1	2.24155E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.43266E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.18753E-1	-7.99203E-1	-9.13219E0	-9.1434E0	4.86374E-3	9.58443E-2	2.73135E1	-3.26741E1	-3.26314E1	2.68641E1	2.2406E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.42851E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18515E-1	-7.98869E-1	-9.13219E0	-9.14323E0	4.95911E-3	9.58681E-2	2.73157E1	-3.26573E1	-3.26419E1	2.68647E1	2.23915E-9	2.52318E-3	2.52318E-3	6.27461E-3	2.43442E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.18586E-1	-7.98965E-1	-9.13212E0	-9.14309E0	4.55379E-3	9.6035E-2	2.73267E1	-3.26326E1	-3.2611E1	2.68833E1	2.23429E-9	2.5188E-3	2.5188E-3	6.30466E-3	2.42282E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18682E-1	-7.9875E-1	-9.13203E0	-9.14326E0	4.52995E-3	9.57251E-2	2.73385E1	-3.26761E1	-3.26274E1	2.68277E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.1861E-1	-7.98774E-1	-9.13243E0	-9.14297E0	4.36306E-3	9.58681E-2	2.73392E1	-3.2725E1	-3.25619E1	2.68933E1	2.23594E-9	2.51476E-3	2.51476E-3	6.32888E-3	2.42488E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.183E-1	-7.9875E-1	-9.13229E0	-9.14292E0	4.41074E-3	9.6035E-2	2.73552E1	-3.26921E1	-3.25912E1	2.68364E1	2.2375E-9	2.51498E-3	2.51498E-3	6.3148E-3	2.41431E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18181E-1	-7.98869E-1	-9.13241E0	-9.14319E0	4.41074E-3	9.64403E-2	2.73321E1	-3.26789E1	-3.26675E1	2.68028E1	2.23332E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.41337E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.18372E-1	-7.98893E-1	-9.13241E0	-9.14302E0	4.48227E-3	9.62019E-2	2.7311E1	-3.26838E1	-3.26543E1	2.68647E1	2.23773E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.42024E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18324E-1	-7.98702E-1	-9.13229E0	-9.14319E0	4.41074E-3	9.57727E-2	2.73249E1	-3.2629E1	-3.26296E1	2.6816E1	2.23869E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.4223E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.18229E-1	-7.99012E-1	-9.13219E0	-9.14273E0	4.43459E-3	9.59873E-2	2.72829E1	-3.2617E1	-3.27089E1	2.6816E1	2.24402E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.4429E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.18062E-1	-7.9906E-1	-9.13241E0	-9.14297E0	4.31538E-3	9.62257E-2	2.71951E1	-3.25834E1	-3.2617E1	2.68621E1	2.23332E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.43654E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.18157E-1	-7.98941E-1	-9.13212E0	-9.14288E0	4.45843E-3	9.62734E-2	2.73541E1	-3.26596E1	-3.26089E1	2.68514E1	2.23915E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.40708E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.18038E-1	-7.98678E-1	-9.13205E0	-9.14309E0	4.1008E-3	9.59158E-2	2.73424E1	-3.26849E1	-3.26182E1	2.68563E1	2.23869E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.40994E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.18181E-1	-7.98917E-1	-9.132E0	-9.14307E0	4.26769E-3	9.59635E-2	2.73323E1	-3.26318E1	-3.2659E1	2.68435E1	2.23623E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.41546E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.18181E-1	-7.99012E-1	-9.13196E0	-9.14299E0	4.22001E-3	9.60588E-2	2.73296E1	-3.26578E1	-3.26254E1	2.68424E1	2.23107E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.42644E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.183E-1	-7.98988E-1	-9.13231E0	-9.14316E0	4.19617E-3	9.60588E-2	2.73075E1	-3.26338E1	-3.26356E1	2.67839E1	2.23818E-9	2.51116E-3	2.51116E-3	6.3074E-3	2.41546E-2