[Scan]
initial_time=2016-01-15T21:24:43
final_time=2016-01-15T21:25:02
ip_count=19
run=1023
dataset=2
scan=149
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-8.18324E-1
ql1_imon=1.36615E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.99195E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=1.85955E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=9.84192E-11
mult1=-9.19856E-9
mult2=-2.8244E-9
rf_tmon=-2.13316E-3
rf_agc=3.61575E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.65683E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70102E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.8727E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04599E1
cs_ea1_imon=2.55353E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37374E0
lens1_imon=2.81579E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65147E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0405E1
cs_ea2_imon=1.52108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=2.94812E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.3478E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11477E1
os_restr1_imon=4.27601E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=2.3585E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.06905E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23853E0
cs_ionrep_imon=1.18413E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=2.99885E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.34639E-8
tplens_vset=1.4E-1
tplens_vmon=1.6786E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2632E1
iondef2_imon=1.5586E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03038E2
lens6_imon=2.98006E-4
ql6_vset=1.0E-1
ql6_vmon=9.6035E-2
ql6_imon=4.12027E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31345E0
ionrepsh_imon=1.79255E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48157E0
os_ea2_imon=-7.87326E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.15594E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07599E0
os_ef2alow_imon=-2.36954E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18662E-1
os_ef2bup_imon=-5.13932E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11372E1
os_restr2_imon=3.44577E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29256E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.25202E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73255E1
iondef1_imon=1.11653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.11214E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.41123E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.91965E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13767E0
cs_ionaccel_imon=-1.7857E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47369E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=2.59968E-1
window_imon=-8.1958E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.3922E-4
mask2_vset=0.0E0
mask2_vmon=-1.8661E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16342E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33419E1
os_fil1_imon=9.42368E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06848E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65722E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=9.95904E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62748E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67049E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54716E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97992E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.82899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22481E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.42851E-2
chamber_ion_pmon=2.23678E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65577E-1
res40_imon=-2.55721E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.18133E-1	-7.99036E-1	-9.13229E0	-9.14321E0	4.74453E-3	9.58681E-2	2.73285E1	-3.26609E1	-3.265E1	2.68448E1	2.23583E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.41405E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.18372E-1	-7.98535E-1	-9.13243E0	-9.14335E0	4.86374E-3	9.60112E-2	2.73118E1	-3.2664E1	-3.2634E1	2.68232E1	2.24207E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41546E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.18419E-1	-7.98774E-1	-9.13198E0	-9.14366E0	4.64916E-3	9.58204E-2	2.73317E1	-3.267E1	-3.26202E1	2.68412E1	2.24062E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.41693E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.1861E-1	-7.98941E-1	-9.13196E0	-9.14335E0	4.88758E-3	9.59158E-2	2.73165E1	-3.26609E1	-3.26092E1	2.68502E1	2.24155E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.41405E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.18586E-1	-7.99203E-1	-9.1321E0	-9.14319E0	4.57764E-3	9.60827E-2	2.73063E1	-3.26508E1	-3.26231E1	2.68128E1	2.23964E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.41611E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.18491E-1	-7.99036E-1	-9.13253E0	-9.14309E0	5.05447E-3	9.59396E-2	2.7329E1	-3.27019E1	-3.26199E1	2.6819E1	2.23583E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.42024E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.18491E-1	-7.99108E-1	-9.13227E0	-9.14299E0	4.72069E-3	9.60827E-2	2.73069E1	-3.26573E1	-3.26089E1	2.68629E1	2.24657E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.41907E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18276E-1	-7.98917E-1	-9.13215E0	-9.14307E0	4.45843E-3	9.60588E-2	2.73442E1	-3.26296E1	-3.2614E1	2.68304E1	2.23235E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.40708E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.18563E-1	-7.99131E-1	-9.13188E0	-9.14299E0	4.48227E-3	9.57727E-2	2.73181E1	-3.26738E1	-3.26113E1	2.67854E1	2.23678E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.40994E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.18777E-1	-7.99108E-1	-9.13231E0	-9.1433E0	4.52995E-3	9.57727E-2	2.73458E1	-3.2659E1	-3.26189E1	2.68679E1	2.2406E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.41199E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.18682E-1	-7.98988E-1	-9.13205E0	-9.14307E0	4.41074E-3	9.60827E-2	2.7376E1	-3.26813E1	-3.26416E1	2.68256E1	2.24109E-9	2.53087E-3	2.53087E-3	6.31837E-3	2.41966E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.1861E-1	-7.98988E-1	-9.13227E0	-9.14297E0	4.55379E-3	9.61542E-2	2.72787E1	-3.26711E1	-3.26579E1	2.68292E1	2.23526E-9	2.52428E-3	2.52428E-3	6.32112E-3	2.41442E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.18348E-1	-7.99227E-1	-9.13217E0	-9.14311E0	4.50611E-3	9.62496E-2	2.73778E1	-3.27083E1	-3.26242E1	2.67998E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18396E-1	-7.99179E-1	-9.13219E0	-9.14299E0	4.55379E-3	9.62257E-2	2.73297E1	-3.26494E1	-3.26278E1	2.6825E1	2.23297E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.42851E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.18396E-1	-7.99274E-1	-9.1325E0	-9.14316E0	4.79221E-3	9.6035E-2	2.74006E1	-3.27366E1	-3.26236E1	2.6831E1	2.24012E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41337E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.18205E-1	-7.98965E-1	-9.13239E0	-9.14297E0	4.8399E-3	9.57489E-2	2.73198E1	-3.2649E1	-3.26537E1	2.68134E1	2.24402E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.43231E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.18324E-1	-7.99274E-1	-9.13229E0	-9.14304E0	4.673E-3	9.5892E-2	2.73582E1	-3.2695E1	-3.26248E1	2.68791E1	2.23392E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.43058E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.18396E-1	-7.9906E-1	-9.13188E0	-9.1428E0	4.81606E-3	9.58204E-2	2.73021E1	-3.26679E1	-3.26555E1	2.68202E1	2.24694E-9	2.52867E-3	2.52867E-3	6.30192E-3	2.42387E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.18181E-1	-7.98893E-1	-9.13222E0	-9.14285E0	4.86374E-3	9.58204E-2	2.73562E1	-3.26543E1	-3.26038E1	2.6849E1	2.23773E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.4223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.18324E-1	-7.98988E-1	-9.132E0	-9.14295E0	5.00679E-3	9.6035E-2	2.73255E1	-3.2632E1	-3.26488E1	2.68226E1	2.23678E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.42851E-2