[Scan]
initial_time=2016-01-15T21:25:09
final_time=2016-01-15T21:25:29
ip_count=19
run=1023
dataset=2
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.18515E-1
ql1_imon=1.36589E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.99267E-9
ql3_vset=
ql3_vmon=-9.13227E0
ql3_imon=1.77777E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=7.60198E-11
mult1=-1.02581E-8
mult2=-2.68867E-9
rf_tmon=-2.49365E-3
rf_agc=3.44511E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.70439E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19328E1
lens5a_imon=2.02092E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=2.87386E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04561E1
cs_ea1_imon=2.56275E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32509E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.51983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.95783E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.34715E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.23976E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14921E1
os_ea1_imon=2.36411E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64098E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.20801E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.98486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.36449E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26044E1
iondef3_imon=1.51299E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26909E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03016E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.09313E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24309E0
ionrepsh_imon=1.7866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.15569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49603E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.15065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02229E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.41778E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.93713E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-1.48065E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82764E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.50177E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33416E1
os_fil1_imon=9.43579E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07617E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65548E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30758E1
cs_fil1_imon=9.9693E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62516E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67052E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81776E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.61694E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22397E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.40788E-2
chamber_ion_pmon=2.2406E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.1184E-1
res40_imon=-2.32758E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18753E-1	-7.99203E-1	-9.13196E0	-9.14285E0	4.69685E-3	9.6035E-2	2.73189E1	-3.27023E1	-3.26398E1	2.67836E1	2.23526E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.41337E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.18634E-1	-7.98941E-1	-9.13205E0	-9.14309E0	4.64916E-3	9.59635E-2	2.73297E1	-3.26579E1	-3.26008E1	2.68526E1	2.23041E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.43654E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.18515E-1	-7.99084E-1	-9.13215E0	-9.14307E0	4.88758E-3	9.59396E-2	2.7323E1	-3.26517E1	-3.26445E1	2.68479E1	2.2372E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41966E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18324E-1	-7.9906E-1	-9.13222E0	-9.14304E0	4.41074E-3	9.56774E-2	2.73243E1	-3.26627E1	-3.25912E1	2.69007E1	2.24012E-9	2.52262E-3	2.52262E-3	6.31251E-3	2.42772E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.18491E-1	-7.99298E-1	-9.13227E0	-9.1433E0	4.41074E-3	9.57966E-2	2.73352E1	-3.2688E1	-3.2616E1	2.6783E1	2.23526E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.4302E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.18467E-1	-7.99155E-1	-9.13205E0	-9.14333E0	4.72069E-3	9.58204E-2	2.73057E1	-3.26573E1	-3.25882E1	2.68833E1	2.23915E-9	2.51225E-3	2.51225E-3	6.32386E-3	2.42177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.18658E-1	-7.99131E-1	-9.13208E0	-9.14314E0	4.45843E-3	9.61781E-2	2.73315E1	-3.2638E1	-3.26038E1	2.6801E1	2.24347E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.4223E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.18181E-1	-7.98655E-1	-9.13224E0	-9.14311E0	4.17233E-3	9.59396E-2	2.73302E1	-3.26884E1	-3.26107E1	2.68851E1	2.23429E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.4302E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.18014E-1	-7.98631E-1	-9.13239E0	-9.1434E0	4.12464E-3	9.56535E-2	2.73252E1	-3.26437E1	-3.26679E1	2.6816E1	2.23665E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.4255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.18086E-1	-7.98678E-1	-9.13231E0	-9.14357E0	4.33922E-3	9.56535E-2	2.73123E1	-3.26837E1	-3.26242E1	2.68238E1	2.23583E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.42851E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.18157E-1	-7.98678E-1	-9.13227E0	-9.14335E0	4.22001E-3	9.60588E-2	2.73558E1	-3.26537E1	-3.2626E1	2.67845E1	2.2372E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.43231E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.18229E-1	-7.9875E-1	-9.13208E0	-9.1435E0	4.22001E-3	9.58681E-2	2.73111E1	-3.26861E1	-3.25828E1	2.67914E1	2.23678E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.42851E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.18253E-1	-7.98678E-1	-9.13212E0	-9.1434E0	4.33922E-3	9.6035E-2	2.73405E1	-3.27003E1	-3.26242E1	2.68689E1	2.2372E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.42809E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.18086E-1	-7.98726E-1	-9.13203E0	-9.14326E0	4.43459E-3	9.59396E-2	2.72873E1	-3.26444E1	-3.26334E1	2.68647E1	2.23297E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.43058E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18133E-1	-7.98726E-1	-9.13231E0	-9.14314E0	4.52995E-3	9.61781E-2	2.72727E1	-3.26413E1	-3.25947E1	2.68448E1	2.23369E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.40626E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.18181E-1	-7.98631E-1	-9.13234E0	-9.14304E0	4.48227E-3	9.60112E-2	2.73027E1	-3.26296E1	-3.26236E1	2.6786E1	2.23526E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.40708E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.18253E-1	-7.9875E-1	-9.13219E0	-9.14309E0	4.91142E-3	9.6035E-2	2.73057E1	-3.27306E1	-3.25689E1	2.68617E1	2.23202E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.40994E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.18229E-1	-7.98678E-1	-9.1326E0	-9.14295E0	4.88758E-3	9.58681E-2	2.73472E1	-3.26861E1	-3.26374E1	2.67804E1	2.23764E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.42121E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.18062E-1	-7.98988E-1	-9.13243E0	-9.14321E0	4.81606E-3	9.59873E-2	2.73198E1	-3.26714E1	-3.26278E1	2.68743E1	2.23678E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.43058E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.18515E-1	-7.9875E-1	-9.13227E0	-9.14321E0	4.72069E-3	9.60827E-2	2.73057E1	-3.26909E1	-3.26044E1	2.6825E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.40788E-2