[Scan]
initial_time=2016-01-15T21:25:36
final_time=2016-01-15T21:25:56
ip_count=19
run=1023
dataset=2
scan=151
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.18729E-1
ql1_imon=1.36241E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.99894E-9
ql3_vset=
ql3_vmon=-9.13227E0
ql3_imon=1.5794E-10
ql4_vset=
ql4_vmon=-9.1433E0
ql4_imon=5.78403E-11
mult1=-1.04989E-8
mult2=-2.7246E-9
rf_tmon=-6.69342E-3
rf_agc=3.18255E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.69996E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70519E0
bslens_imon=2.30343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19262E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.88143E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04549E1
cs_ea1_imon=2.56059E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32509E0
lens1_imon=3.10734E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.95459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.51407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.94666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.35557E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.34285E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.05802E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.20008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.98811E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.35812E-8
tplens_vset=1.4E-1
tplens_vmon=1.65405E0
tplens_imon=-8.66537E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.51839E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.56057E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03033E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.18713E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32059E0
ionrepsh_imon=1.79345E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34204E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48041E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71612E1
cs_ef2a_imon=3.14812E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.34921E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.42455E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.25001E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.1186E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68839E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.41794E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.8893E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.67887E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47021E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.96174E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-7.16609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82743E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.42607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.09081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.42426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65763E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=9.95825E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63483E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66892E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61282E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22496E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.4255E-2
chamber_ion_pmon=2.26755E-9
chamber_cvt_pmon=2.51915E-3
foreline_cvt_pmon=2.51915E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45787E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.18324E-1	-7.9875E-1	-9.13191E0	-9.14314E0	4.52995E-3	9.61542E-2	2.73543E1	-3.26521E1	-3.26173E1	2.68597E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.42437E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.18467E-1	-7.9875E-1	-9.13227E0	-9.14304E0	4.19617E-3	9.59158E-2	2.7321E1	-3.27038E1	-3.25825E1	2.68587E1	2.23544E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.42892E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18539E-1	-7.98821E-1	-9.13234E0	-9.14319E0	4.45843E-3	9.58204E-2	2.73181E1	-3.26461E1	-3.26048E1	2.68647E1	2.23863E-9	2.5225E-3	2.5225E-3	6.29067E-3	2.43195E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.18729E-1	-7.98583E-1	-9.13219E0	-9.1433E0	4.24385E-3	9.57489E-2	2.73207E1	-3.26903E1	-3.26086E1	2.68328E1	2.23773E-9	2.52169E-3	2.52169E-3	6.34518E-3	2.41817E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.18563E-1	-7.98726E-1	-9.13219E0	-9.14321E0	4.1008E-3	9.59396E-2	2.73293E1	-3.26579E1	-3.26266E1	2.67926E1	2.2372E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.42177E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.18706E-1	-7.98607E-1	-9.13205E0	-9.14352E0	4.52995E-3	9.56774E-2	2.73285E1	-3.26777E1	-3.26362E1	2.69007E1	2.23487E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.42437E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.18348E-1	-7.98845E-1	-9.13222E0	-9.14352E0	4.55379E-3	9.6035E-2	2.73106E1	-3.2675E1	-3.26027E1	2.67902E1	2.24037E-9	2.52174E-3	2.52174E-3	6.3157E-3	2.42149E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.18491E-1	-7.9875E-1	-9.1321E0	-9.1435E0	4.55379E-3	9.59396E-2	2.73363E1	-3.26488E1	-3.26416E1	2.68779E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.18324E-1	-7.98893E-1	-9.13246E0	-9.14369E0	4.69685E-3	9.57251E-2	2.73387E1	-3.26801E1	-3.26603E1	2.68629E1	2.23915E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.42598E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.18348E-1	-7.98965E-1	-9.13234E0	-9.14364E0	4.50611E-3	9.60827E-2	2.7346E1	-3.26849E1	-3.2629E1	2.6831E1	2.25672E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.42387E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.18396E-1	-7.98917E-1	-9.13234E0	-9.14342E0	4.43459E-3	9.60588E-2	2.73201E1	-3.26975E1	-3.26056E1	2.68232E1	2.26753E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.42809E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18563E-1	-7.98655E-1	-9.13265E0	-9.14314E0	4.64916E-3	9.58204E-2	2.73141E1	-3.26627E1	-3.26074E1	2.6822E1	2.26654E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.4302E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18729E-1	-7.98965E-1	-9.13253E0	-9.14323E0	4.62532E-3	9.61065E-2	2.72996E1	-3.26646E1	-3.26327E1	2.67613E1	2.26851E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.43442E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.18586E-1	-7.98845E-1	-9.13241E0	-9.14328E0	4.45843E-3	9.62734E-2	2.73269E1	-3.26885E1	-3.2662E1	2.68004E1	2.26654E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.41907E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18563E-1	-7.98774E-1	-9.1325E0	-9.14297E0	4.26769E-3	9.5892E-2	2.71945E1	-3.25647E1	-3.26999E1	2.68683E1	2.26461E-9	2.51096E-3	2.51096E-3	6.31278E-3	2.41405E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.18682E-1	-7.9844E-1	-9.13227E0	-9.14299E0	4.41074E-3	9.57966E-2	2.73442E1	-3.26681E1	-3.26212E1	2.68617E1	2.26457E-9	2.51225E-3	2.51225E-3	6.32386E-3	2.43231E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.18729E-1	-7.98559E-1	-9.1325E0	-9.14309E0	4.45843E-3	9.57489E-2	2.73134E1	-3.26679E1	-3.26449E1	2.68953E1	2.25966E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.41756E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.18753E-1	-7.98941E-1	-9.13253E0	-9.1433E0	4.8399E-3	9.58681E-2	2.73561E1	-3.2677E1	-3.26179E1	2.68041E1	2.26654E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41337E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.18706E-1	-7.99012E-1	-9.1325E0	-9.14295E0	5.03063E-3	9.59396E-2	2.73063E1	-3.26383E1	-3.2637E1	2.6834E1	2.26654E-9	2.52613E-3	2.52613E-3	6.34385E-3	2.40742E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.18729E-1	-7.98631E-1	-9.13227E0	-9.1433E0	4.62532E-3	9.56059E-2	2.73117E1	-3.26879E1	-3.26314E1	2.68839E1	2.26755E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.4255E-2