[Scan]
initial_time=2016-01-15T21:26:03
final_time=2016-01-15T21:26:22
ip_count=19
run=1023
dataset=2
scan=152
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-8.18706E-1
ql1_imon=1.36421E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=2.00608E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=1.86324E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=1.40738E-10
mult1=-9.14471E-9
mult2=-2.68014E-9
rf_tmon=-5.35303E-3
rf_agc=3.28903E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.70356E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.17005E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.0483E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53858E1
cs_ef1b_imon=2.85255E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02514E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04399E1
cs_ea1_imon=2.54689E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35994E0
lens1_imon=2.75765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.95646E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04201E1
cs_ea2_imon=1.50686E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.96653E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.34389E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11807E1
os_restr1_imon=4.26107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.37313E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.07531E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=1.19431E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93658E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02024E1
cs_anode1_imon=2.98947E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.35285E-8
tplens_vset=1.4E-1
tplens_vmon=1.69551E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26313E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03029E2
lens6_imon=2.98209E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.19092E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.35484E0
ionrepsh_imon=1.78804E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33417E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43715E0
os_ea2_imon=-8.36484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.16289E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06614E0
os_ef2alow_imon=-2.42515E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.49939E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.43847E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23115E2
cs_ionfoca_imon=6.27657E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.25237E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.10588E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.40251E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.91908E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-1.70229E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47539E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56805E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=2.68656E-1
window_imon=-1.08717E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.65679E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.78439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=9.42078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06791E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65589E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30832E1
cs_fil1_imon=9.95244E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61833E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67332E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74429E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37393E-1
cs_fil2_imon=-2.42013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06092E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22512E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.43058E-2
chamber_ion_pmon=2.23392E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.43944E-1
res40_imon=-2.60238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.18229E-1	-7.98607E-1	-9.13193E0	-9.14311E0	4.86374E-3	9.63688E-2	2.73629E1	-3.26508E1	-3.26449E1	2.68448E1	2.26654E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.42809E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.18396E-1	-7.98798E-1	-9.13193E0	-9.14311E0	4.81606E-3	9.59158E-2	2.73334E1	-3.26663E1	-3.26385E1	2.68508E1	2.26751E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.4223E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.183E-1	-7.98798E-1	-9.13188E0	-9.14323E0	4.55379E-3	9.61781E-2	2.73375E1	-3.26883E1	-3.2605E1	2.68321E1	2.26654E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.41229E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.18276E-1	-7.98798E-1	-9.13191E0	-9.14311E0	4.673E-3	9.6035E-2	2.73275E1	-3.26962E1	-3.2616E1	2.68154E1	2.26654E-9	2.52096E-3	2.52096E-3	6.29941E-3	2.39913E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.18324E-1	-7.9906E-1	-9.13219E0	-9.14316E0	4.36306E-3	9.59396E-2	2.73216E1	-3.26726E1	-3.26437E1	2.68401E1	2.26654E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.40994E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.18276E-1	-7.98631E-1	-9.13222E0	-9.14345E0	4.24385E-3	9.57966E-2	2.73369E1	-3.26867E1	-3.26386E1	2.69403E1	2.26654E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.41405E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.18467E-1	-7.98869E-1	-9.13203E0	-9.14354E0	4.1008E-3	9.58204E-2	2.73201E1	-3.26554E1	-3.2602E1	2.68226E1	2.26654E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.42177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.18443E-1	-7.99298E-1	-9.13215E0	-9.1434E0	4.14848E-3	9.62734E-2	2.73098E1	-3.26248E1	-3.26278E1	2.69001E1	2.26654E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.41756E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.18348E-1	-7.99155E-1	-9.13196E0	-9.14316E0	4.02927E-3	9.59158E-2	2.73104E1	-3.26514E1	-3.26054E1	2.69061E1	2.26654E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.42024E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.18372E-1	-7.98821E-1	-9.13222E0	-9.1433E0	4.02927E-3	9.61304E-2	2.73478E1	-3.26591E1	-3.26771E1	2.6741E1	2.26558E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.42024E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.18276E-1	-7.98535E-1	-9.13231E0	-9.1429E0	4.12464E-3	9.58204E-2	2.73532E1	-3.2614E1	-3.2629E1	2.68818E1	2.26654E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.41546E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.18324E-1	-7.98965E-1	-9.13239E0	-9.14347E0	4.07696E-3	9.56535E-2	2.73183E1	-3.26368E1	-3.26603E1	2.68064E1	2.26457E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.42387E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.18419E-1	-7.9906E-1	-9.1321E0	-9.1434E0	4.26769E-3	9.57489E-2	2.73339E1	-3.2638E1	-3.26356E1	2.67998E1	2.26457E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.40708E-2
1.7E1	4.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18729E-1	-7.98774E-1	-9.13227E0	-9.14357E0	4.24385E-3	9.6035E-2	2.73429E1	-3.2644E1	-3.26428E1	2.69235E1	2.23623E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.41337E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.18753E-1	-7.9875E-1	-9.13219E0	-9.1435E0	4.02927E-3	9.61065E-2	2.72648E1	-3.26729E1	-3.27762E1	2.67689E1	2.2372E-9	2.51771E-3	2.51771E-3	6.31563E-3	2.42072E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.18586E-1	-7.98512E-1	-9.13205E0	-9.14345E0	4.36306E-3	9.64642E-2	2.7321E1	-3.26337E1	-3.26231E1	2.69026E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18586E-1	-7.98488E-1	-9.13198E0	-9.14366E0	4.43459E-3	9.60827E-2	2.72937E1	-3.26633E1	-3.26356E1	2.68154E1	2.23964E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.42644E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.18515E-1	-7.98845E-1	-9.132E0	-9.14316E0	4.31538E-3	9.57251E-2	2.73287E1	-3.26561E1	-3.26425E1	2.68395E1	2.23429E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.42809E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.19016E-1	-7.98869E-1	-9.13215E0	-9.14314E0	4.17233E-3	9.6035E-2	2.73375E1	-3.26915E1	-3.26142E1	2.68418E1	2.23964E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.4223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.18706E-1	-7.98893E-1	-9.13219E0	-9.14314E0	4.50611E-3	9.58443E-2	2.73216E1	-3.26313E1	-3.26307E1	2.6831E1	2.23392E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.43058E-2