[Scan]
initial_time=2016-01-15T21:26:29
final_time=2016-01-15T21:26:49
ip_count=19
run=1023
dataset=2
scan=153
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.18276E-1
ql1_imon=1.36318E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=2.04905E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=2.06816E-10
ql4_vset=
ql4_vmon=-9.14319E0
ql4_imon=6.26326E-11
mult1=-9.64702E-9
mult2=-2.5938E-9
rf_tmon=-5.67247E-3
rf_agc=3.24469E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.74298E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19412E1
lens5a_imon=2.01227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=2.86557E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=2.56671E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34192E0
lens1_imon=2.80091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64963E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.54687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.9445E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.33923E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.2531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.32915E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28695E0
cs_ionrep_imon=1.17448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.35063E-8
tplens_vset=1.4E-1
tplens_vmon=1.62581E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26376E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26682E1
iondef2_imon=1.55444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03061E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.17223E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=1.78155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-8.00434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.43175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.26972E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73149E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.46376E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.92788E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.614E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.64194E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-8.64372E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=8.00647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.63298E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=6.11387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33387E1
os_fil1_imon=9.4239E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=9.94984E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67155E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81519E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22561E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27577E-3
inlet_lpb_pmon=2.41269E-2
chamber_ion_pmon=2.26749E-9
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.18181E-1	-7.9906E-1	-9.13208E0	-9.1434E0	4.17233E-3	9.60588E-2	2.73352E1	-3.26738E1	-3.26284E1	2.68256E1	2.24012E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.42598E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18205E-1	-7.9906E-1	-9.13277E0	-9.1434E0	4.43459E-3	9.60112E-2	2.73382E1	-3.26787E1	-3.26395E1	2.68653E1	2.23487E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.42644E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.18539E-1	-7.99084E-1	-9.1325E0	-9.14323E0	4.57764E-3	9.59158E-2	2.73558E1	-3.26726E1	-3.26413E1	2.68829E1	2.23665E-9	2.5225E-3	2.5225E-3	6.29067E-3	2.42336E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.18563E-1	-7.98774E-1	-9.13246E0	-9.1434E0	4.64916E-3	9.59635E-2	2.73122E1	-3.26602E1	-3.26018E1	2.68268E1	2.23544E-9	2.51287E-3	2.51287E-3	6.32328E-3	2.43095E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.18539E-1	-7.99179E-1	-9.13243E0	-9.14311E0	4.45843E-3	9.58204E-2	2.73461E1	-3.26493E1	-3.26095E1	2.68118E1	2.23915E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.43231E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18419E-1	-7.99155E-1	-9.1325E0	-9.14316E0	4.33922E-3	9.58443E-2	2.73118E1	-3.26615E1	-3.26346E1	2.68406E1	2.23963E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.43195E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.18348E-1	-7.98798E-1	-9.1327E0	-9.14307E0	4.43459E-3	9.6035E-2	2.73033E1	-3.26549E1	-3.26266E1	2.68621E1	2.24062E-9	2.52027E-3	2.52027E-3	6.33538E-3	2.4255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18539E-1	-7.99274E-1	-9.13243E0	-9.14295E0	4.43459E-3	9.58681E-2	2.73183E1	-3.265E1	-3.25984E1	2.68032E1	2.23297E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.43058E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.18443E-1	-7.98726E-1	-9.13253E0	-9.14316E0	4.22001E-3	9.58443E-2	2.7299E1	-3.26621E1	-3.26542E1	2.68815E1	2.24207E-9	2.52099E-3	2.52099E-3	6.28006E-3	2.41966E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.18753E-1	-7.98774E-1	-9.1326E0	-9.1434E0	4.29153E-3	9.59396E-2	2.73293E1	-3.26508E1	-3.26254E1	2.68899E1	2.25231E-9	2.51826E-3	2.51826E-3	6.31563E-3	2.43337E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.18372E-1	-7.98774E-1	-9.13222E0	-9.14316E0	4.14848E-3	9.57251E-2	2.73082E1	-3.26511E1	-3.26254E1	2.67409E1					
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18181E-1	-7.98655E-1	-9.13215E0	-9.14354E0	4.12464E-3	9.57966E-2	2.73517E1	-3.26349E1	-3.26219E1	2.68803E1	2.26654E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.4302E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.18419E-1	-7.98631E-1	-9.1321E0	-9.14352E0	4.14848E-3	9.57251E-2	2.73122E1	-3.26408E1	-3.26225E1	2.67341E1	2.26753E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.4302E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.18419E-1	-7.98702E-1	-9.13227E0	-9.1433E0	4.07696E-3	9.58204E-2	2.72704E1	-3.26471E1	-3.26482E1	2.68798E1	2.26654E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.42851E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18133E-1	-7.98798E-1	-9.13219E0	-9.14323E0	4.26769E-3	9.58681E-2	2.71546E1	-3.25163E1	-3.27078E1	2.68627E1	2.26654E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.42731E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18467E-1	-7.98988E-1	-9.13239E0	-9.14328E0	4.17233E-3	9.58204E-2	2.73375E1	-3.27115E1	-3.26301E1	2.68496E1	2.26654E-9	2.52266E-3	2.52266E-3	6.34301E-3	2.42396E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.18777E-1	-7.98917E-1	-9.13224E0	-9.14335E0	4.33922E-3	9.57012E-2	2.73137E1	-3.26603E1	-3.26144E1	2.67571E1	2.26654E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.41817E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.18491E-1	-7.99108E-1	-9.13205E0	-9.14321E0	4.17233E-3	9.56059E-2	2.73109E1	-3.26585E1	-3.26086E1	2.67885E1	2.26753E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.42177E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.18276E-1	-7.98678E-1	-9.132E0	-9.1434E0	4.48227E-3	9.60827E-2	2.73526E1	-3.26399E1	-3.26208E1	2.68899E1	2.26654E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.41817E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.18276E-1	-7.98774E-1	-9.132E0	-9.14319E0	4.55379E-3	9.60827E-2	2.73149E1	-3.26682E1	-3.26376E1	2.68304E1	2.26749E-9	2.52342E-3	2.52342E-3	6.27577E-3	2.41269E-2