[Scan]
initial_time=2016-01-15T21:27:49
final_time=2016-01-15T21:28:09
ip_count=19
run=1023
dataset=2
scan=156
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.183E-1
ql1_imon=1.3628E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.99239E-9
ql3_vset=
ql3_vmon=-9.13227E0
ql3_imon=1.75977E-10
ql4_vset=
ql4_vmon=-9.14342E0
ql4_imon=8.05378E-11
mult1=-8.87415E-9
mult2=-2.85209E-9
rf_tmon=-4.54609E-3
rf_agc=3.39895E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.6807E-9
bslens_vset=-6.2E0
bslens_vmon=-6.71577E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19276E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=2.86053E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.57122E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36666E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.53418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.94594E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.34585E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11658E1
os_restr1_imon=4.25454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.34081E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92014E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.97369E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.35397E-8
tplens_vset=1.4E-1
tplens_vmon=1.67093E0
tplens_imon=-5.28949E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26181E1
iondef3_imon=1.52037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.54763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.59396E-2
ql6_imon=4.15286E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=1.8152E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74964E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53112E0
os_ea2_imon=-4.44003E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00541E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73186E1
iondef1_imon=1.08432E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68107E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.29376E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.92515E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56735E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-7.16609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.53382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.40829E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33442E1
os_fil1_imon=9.42708E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07203E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6583E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=9.95885E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67195E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6939E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.43231E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.97444E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.18253E-1	-7.98965E-1	-9.132E0	-9.14319E0	4.60148E-3	9.60588E-2	2.72867E1	-3.26468E1	-3.26866E1	2.69103E1	2.25882E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.40994E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18419E-1	-7.98845E-1	-9.13224E0	-9.14319E0	4.79221E-3	9.6035E-2	2.73946E1	-3.26981E1	-3.2635E1	2.67782E1	2.24597E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41546E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.183E-1	-7.98941E-1	-9.13205E0	-9.1435E0	4.86374E-3	9.58443E-2	2.73097E1	-3.26482E1	-3.26408E1	2.69298E1	2.23583E-9	2.51686E-3	2.51686E-3	6.32356E-3	2.41302E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.18419E-1	-7.98893E-1	-9.13198E0	-9.14354E0	4.95911E-3	9.59635E-2	2.73275E1	-3.26667E1	-3.25753E1	2.70544E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.18539E-1	-7.99108E-1	-9.13208E0	-9.14328E0	4.86374E-3	9.6035E-2	2.72689E1	-3.26703E1	-3.26029E1	2.68425E1	2.23869E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.42024E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18515E-1	-7.98869E-1	-9.13236E0	-9.14338E0	4.57764E-3	9.58204E-2	2.73502E1	-3.26416E1	-3.26212E1	2.68148E1	2.23171E-9	2.52027E-3	2.52027E-3	6.35223E-3	2.41052E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18992E-1	-7.99203E-1	-9.13246E0	-9.14314E0	4.72069E-3	9.58443E-2	2.73159E1	-3.26212E1	-3.26248E1	2.6998E1	2.23566E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.41479E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.1892E-1	-7.98845E-1	-9.13205E0	-9.14314E0	4.74453E-3	9.59635E-2	2.73315E1	-3.26603E1	-3.26392E1	2.67367E1	2.23869E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.43473E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.18396E-1	-7.9906E-1	-9.13205E0	-9.14338E0	4.79221E-3	9.59396E-2	2.73417E1	-3.26663E1	-3.26326E1	2.69169E1	2.23665E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.41052E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.18276E-1	-7.98988E-1	-9.13198E0	-9.14338E0	4.48227E-3	9.57251E-2	2.73411E1	-3.26573E1	-3.25989E1	2.67379E1	2.23678E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.41405E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18706E-1	-7.98965E-1	-9.13169E0	-9.14354E0	4.62532E-3	9.57966E-2	2.73478E1	-3.27113E1	-3.25972E1	2.68238E1	2.23526E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.4302E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.18825E-1	-7.99131E-1	-9.13205E0	-9.14311E0	4.79221E-3	9.58204E-2	2.73588E1	-3.26608E1	-3.26531E1	2.68322E1	2.24251E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.41611E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.18491E-1	-7.99108E-1	-9.13236E0	-9.14304E0	4.50611E-3	9.61304E-2	2.73363E1	-3.26813E1	-3.2608E1	2.70304E1	2.23623E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.42387E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.18515E-1	-7.98988E-1	-9.13231E0	-9.14335E0	4.55379E-3	9.6035E-2	2.73322E1	-3.26968E1	-3.25824E1	2.69145E1	2.23964E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.41817E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.18634E-1	-7.99036E-1	-9.13239E0	-9.14338E0	4.33922E-3	9.60112E-2	2.74271E1	-3.27882E1	-3.25846E1	2.67879E1	2.23915E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.41546E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.1861E-1	-7.98845E-1	-9.13239E0	-9.1433E0	4.673E-3	9.5892E-2	2.73682E1	-3.26843E1	-3.2641E1	2.69922E1	2.24155E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.42024E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18729E-1	-7.98893E-1	-9.13231E0	-9.14316E0	4.72069E-3	9.57251E-2	2.73532E1	-3.26392E1	-3.26284E1	2.69976E1	2.23171E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.41479E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.18634E-1	-7.98631E-1	-9.13239E0	-9.14333E0	4.52995E-3	9.61304E-2	2.73387E1	-3.26767E1	-3.26254E1	2.69373E1	2.24155E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.40788E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.18682E-1	-7.98368E-1	-9.13229E0	-9.14335E0	4.36306E-3	9.59396E-2	2.73442E1	-3.26597E1	-3.25834E1	2.67698E1	2.24012E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.41966E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.183E-1	-7.9844E-1	-9.13227E0	-9.14342E0	4.74453E-3	9.59396E-2	2.73186E1	-3.26585E1	-3.26181E1	2.68107E1	2.23818E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.43231E-2