[Scan]
initial_time=2016-01-15T21:28:16
final_time=2016-01-15T21:28:35
ip_count=19
run=1023
dataset=2
scan=157
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08754E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=1.36249E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.06814E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=2.12836E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=8.9848E-11
mult1=-9.86079E-9
mult2=-2.6747E-9
rf_tmon=-4.26008E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.66229E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65932E0
bslens_imon=2.15372E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1959E1
lens5a_imon=2.04268E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04957E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54205E1
cs_ef1b_imon=2.87422E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.01996E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0478E1
cs_ea1_imon=2.58738E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38358E0
lens1_imon=2.73773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0339E1
cs_ea2_imon=1.46969E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84706E1
cs_ef1a_imon=2.95351E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.34735E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11634E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15428E1
os_ea1_imon=2.3681E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63287E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22455E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93343E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.99712E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.37427E-8
tplens_vset=1.4E-1
tplens_vmon=1.69041E0
tplens_imon=-2.06763E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26669E1
iondef3_imon=1.48732E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.55748E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03071E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.09951E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31025E0
ionrepsh_imon=1.77198E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33505E1
lens5b_imon=2.17307E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74363E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51961E0
os_ea2_imon=-5.34892E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.142E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.48105E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11412E1
os_restr2_imon=3.43284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.30075E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.25686E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7352E1
iondef1_imon=1.10386E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68611E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.40506E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.90531E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.67887E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56597E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.28854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=7.02041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=6.79269E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58741E0
defgridb_imon=5.91117E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33395E1
os_fil1_imon=9.42042E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66082E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.95464E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63459E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66905E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30513E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58514E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22637E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.42177E-2
chamber_ion_pmon=2.26753E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.40071E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.1811E-1	-7.98988E-1	-9.13203E0	-9.14314E0	4.50611E-3	9.60112E-2	2.73128E1	-3.26661E1	-3.26319E1	2.70383E1	2.24012E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.41546E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.18181E-1	-7.98917E-1	-9.13231E0	-9.14314E0	4.57764E-3	9.58443E-2	2.73008E1	-3.26603E1	-3.26738E1	2.68743E1	2.23526E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41756E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17919E-1	-7.99203E-1	-9.13234E0	-9.14335E0	4.57764E-3	9.59158E-2	2.73051E1	-3.27049E1	-3.25947E1	2.68742E1	2.23764E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.40839E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.183E-1	-7.99084E-1	-9.13229E0	-9.14323E0	4.3869E-3	9.5582E-2	2.73285E1	-3.26753E1	-3.26374E1	2.67649E1	2.23168E-9	2.51623E-3	2.51623E-3	6.33253E-3	2.41273E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.183E-1	-7.98965E-1	-9.13234E0	-9.14321E0	4.31538E-3	9.57251E-2	2.73616E1	-3.2647E1	-3.26567E1	2.67764E1	2.24161E-9	2.51359E-3	2.51359E-3	6.35786E-3	2.40839E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.18348E-1	-7.99274E-1	-9.13239E0	-9.14338E0	4.52995E-3	9.56774E-2	2.73183E1	-3.26398E1	-3.26218E1	2.69452E1	2.2406E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.40583E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.18229E-1	-7.99394E-1	-9.1321E0	-9.1433E0	4.43459E-3	9.57966E-2	2.7269E1	-3.26693E1	-3.2596E1	2.6816E1	2.26053E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.4255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.18443E-1	-7.99346E-1	-9.13208E0	-9.1434E0	4.50611E-3	9.57489E-2	2.73454E1	-3.26104E1	-3.26669E1	2.69512E1	2.26654E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.41405E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.18443E-1	-7.99298E-1	-9.13224E0	-9.14326E0	4.57764E-3	9.59635E-2	2.73284E1	-3.26249E1	-3.2622E1	2.67636E1	2.26654E-9	2.51248E-3	2.51248E-3	6.3074E-3	2.41052E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.18205E-1	-7.98965E-1	-9.13231E0	-9.14316E0	4.26769E-3	9.5892E-2	2.73388E1	-3.26725E1	-3.26044E1	2.69429E1	2.26654E-9	2.52613E-3	2.52613E-3	6.34907E-3	2.41734E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.17847E-1	-7.99012E-1	-9.13258E0	-9.14304E0	4.43459E-3	9.59396E-2	2.7439E1	-3.27363E1	-3.25623E1	2.67439E1	2.26654E-9	2.51952E-3	2.51952E-3	6.3245E-3	2.40757E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.18038E-1	-7.99417E-1	-9.13236E0	-9.1433E0	4.36306E-3	9.60827E-2	2.73669E1	-3.26217E1	-3.26548E1	2.68581E1	2.2695E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.41966E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.17943E-1	-7.98965E-1	-9.13234E0	-9.14335E0	4.52995E-3	9.61542E-2	2.73411E1	-3.26803E1	-3.26242E1	2.69133E1	2.26654E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.42598E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.18157E-1	-7.99108E-1	-9.13215E0	-9.14328E0	4.55379E-3	9.60588E-2	2.73165E1	-3.26621E1	-3.26062E1	2.67416E1	2.26556E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.42387E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.17895E-1	-7.99108E-1	-9.13205E0	-9.14326E0	4.69685E-3	9.58681E-2	2.73122E1	-3.26644E1	-3.26726E1	2.68593E1	2.26654E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.40788E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18181E-1	-7.98845E-1	-9.13222E0	-9.14335E0	4.50611E-3	9.59396E-2	2.7346E1	-3.26615E1	-3.26524E1	2.684E1	2.26654E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.40708E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.18205E-1	-7.9906E-1	-9.13205E0	-9.14357E0	4.72069E-3	9.57251E-2	2.73219E1	-3.26663E1	-3.25984E1	2.68743E1	2.26654E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.40708E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18062E-1	-7.98798E-1	-9.13222E0	-9.14357E0	4.95911E-3	9.60588E-2	2.72945E1	-3.26661E1	-3.26219E1	2.68343E1	2.26799E-9	2.52276E-3	2.52276E-3	6.31009E-3	2.41611E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.1799E-1	-7.98965E-1	-9.13212E0	-9.1434E0	4.8399E-3	9.58204E-2	2.73694E1	-3.27145E1	-3.26508E1	2.67229E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.18205E-1	-7.9875E-1	-9.13222E0	-9.14316E0	4.95911E-3	9.56059E-2	2.7352E1	-3.26639E1	-3.26669E1	2.68611E1	2.26753E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.42177E-2