[Scan]
initial_time=2016-01-15T21:29:09
final_time=2016-01-15T21:29:29
ip_count=19
run=1023
dataset=2
scan=159
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08738E-4
ql1_vset=
ql1_vmon=-8.18372E-1
ql1_imon=1.36101E-8
ql2_vset=
ql2_vmon=-7.99489E-1
ql2_imon=1.99693E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=2.03812E-10
ql4_vset=
ql4_vmon=-9.14304E0
ql4_imon=5.82337E-11
mult1=-9.63202E-9
mult2=-2.74656E-9
rf_tmon=-6.84363E-3
rf_agc=3.19156E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.67537E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.36275E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19311E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54283E1
cs_ef1b_imon=2.90125E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04493E1
cs_ea1_imon=2.54468E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38141E0
lens1_imon=2.80163E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65023E1
os_ef1alow_imon=2.93873E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03425E1
cs_ea2_imon=1.51613E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.95819E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.35651E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.35532E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.06091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.18661E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93703E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.9964E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.37006E-8
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25882E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.54833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03012E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.15747E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.78618E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.13947E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44146E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06152E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.14884E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32262E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.29256E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.22623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.1144E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68169E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.38254E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.90519E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.30557E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86032E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.24005E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.40829E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33414E1
os_fil1_imon=9.44006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07407E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65359E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=9.96347E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62858E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6755E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22566E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.41756E-2
chamber_ion_pmon=2.23332E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69503E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.18157E-1	-7.98702E-1	-9.13231E0	-9.14323E0	4.673E-3	9.59396E-2	2.73249E1	-3.26428E1	-3.26392E1	2.68725E1	2.26556E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.41337E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.18253E-1	-7.98607E-1	-9.13255E0	-9.1433E0	4.88758E-3	9.59635E-2	2.73255E1	-3.26801E1	-3.26266E1	2.68292E1	2.26751E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.42851E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.18586E-1	-7.98869E-1	-9.13224E0	-9.14354E0	4.93526E-3	9.61542E-2	2.73289E1	-3.26637E1	-3.26196E1	2.68661E1	2.26654E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.42177E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18396E-1	-7.98845E-1	-9.13231E0	-9.14357E0	4.673E-3	9.57251E-2	2.73225E1	-3.26711E1	-3.26398E1	2.68124E1	2.26654E-9	2.51632E-3	2.51632E-3	6.28592E-3	2.42024E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.18324E-1	-7.99012E-1	-9.13212E0	-9.1434E0	4.69685E-3	9.55343E-2	2.73027E1	-3.2629E1	-3.26074E1	2.68725E1	2.26654E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.41127E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18491E-1	-7.98893E-1	-9.13198E0	-9.14326E0	4.50611E-3	9.56059E-2	2.73417E1	-3.26681E1	-3.26164E1	2.67992E1	2.26654E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.42644E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.18706E-1	-7.99108E-1	-9.13212E0	-9.14354E0	4.88758E-3	9.58681E-2	2.73075E1	-3.26627E1	-3.26008E1	2.68172E1	2.26556E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.4302E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.18682E-1	-7.99465E-1	-9.13196E0	-9.14361E0	4.88758E-3	9.57251E-2	2.73063E1	-3.2629E1	-3.26154E1	2.67908E1	2.26654E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.43654E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.18825E-1	-7.99227E-1	-9.13243E0	-9.14347E0	4.81606E-3	9.55105E-2	2.73526E1	-3.2632E1	-3.25924E1	2.69119E1	2.26654E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.41756E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.19135E-1	-7.99131E-1	-9.1321E0	-9.14354E0	5.00679E-3	9.55343E-2	2.73423E1	-3.26956E1	-3.26236E1	2.68286E1	2.26654E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.42437E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.18801E-1	-7.9937E-1	-9.13219E0	-9.14359E0	4.95911E-3	9.56774E-2	2.73796E1	-3.27257E1	-3.26356E1	2.67842E1	2.26654E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.4223E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.18753E-1	-7.99227E-1	-9.13262E0	-9.14338E0	4.93526E-3	9.58204E-2	2.73261E1	-3.2629E1	-3.2626E1	2.68809E1	2.26654E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.40626E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1861E-1	-7.99108E-1	-9.13253E0	-9.14302E0	4.8399E-3	9.61065E-2	2.73369E1	-3.26735E1	-3.26248E1	2.69241E1	2.26654E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.41199E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.18872E-1	-7.99203E-1	-9.13241E0	-9.14326E0	5.07832E-3	9.58204E-2	2.73183E1	-3.26116E1	-3.26368E1	2.66394E1	2.26654E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.41546E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18491E-1	-7.98965E-1	-9.13258E0	-9.14307E0	5.03063E-3	9.58681E-2	2.7347E1	-3.26968E1	-3.25953E1	2.67543E1	2.26753E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.42387E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18467E-1	-7.99179E-1	-9.13239E0	-9.14347E0	4.88758E-3	9.58681E-2	2.73255E1	-3.26825E1	-3.26146E1	2.6798E1	2.24615E-9	2.52189E-3	2.52189E-3	6.32099E-3	2.41787E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18539E-1	-7.9906E-1	-9.1326E0	-9.14328E0	4.50611E-3	9.56774E-2	2.73273E1	-3.26927E1	-3.26062E1	2.68755E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18563E-1	-7.99274E-1	-9.13248E0	-9.14323E0	4.62532E-3	9.58204E-2	2.73196E1	-3.26845E1	-3.26417E1	2.68881E1	2.24012E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.40708E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18682E-1	-7.99203E-1	-9.13219E0	-9.14314E0	4.74453E-3	9.60112E-2	2.73171E1	-3.26422E1	-3.26326E1	2.68641E1	2.24538E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.42644E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.18372E-1	-7.99489E-1	-9.13224E0	-9.14304E0	4.57764E-3	9.58443E-2	2.73171E1	-3.26416E1	-3.25882E1	2.68169E1	2.23332E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41756E-2