[Scan]
initial_time=2016-01-15T22:22:46
final_time=2016-01-15T22:23:05
ip_count=19
run=1023
dataset=3
scan=163
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.19278E-1
ql1_imon=8.64315E-10
ql2_vset=
ql2_vmon=-7.99274E-1
ql2_imon=3.51381E-10
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=9.65261E-10
ql4_vset=
ql4_vmon=-9.14299E0
ql4_imon=6.1456E-10
mult1=-1.02678E-8
mult2=-2.9016E-9
rf_tmon=-5.04629E-3
rf_agc=3.37338E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.39823E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54103E1
cs_ef1b_imon=2.8526E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.51372E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.80452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.55949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.95819E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.91965E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=2.85116E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15486E1
os_ea1_imon=1.85942E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.2062E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91986E2
cs_nozzle_imon=1.93694E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=3.01586E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=8.13842E-10
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26001E1
iondef3_imon=1.53029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27139E1
iondef2_imon=1.54471E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.4533E-2
ql6_imon=4.82106E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31338E0
ionrepsh_imon=1.81833E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17089E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58333E-1
os_ea2_imon=-3.71445E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06167E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.1438E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65162E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27147E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=2.86305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.27225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73647E1
iondef1_imon=1.12762E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.31862E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=3.69537E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.38879E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.53061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19103E0
defgridb_imon=5.99851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=5.05853E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.82448E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66353E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=9.95669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62065E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67393E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.51793E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.2176E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22489E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.19659E-1	-7.99227E-1	-9.13148E0	-9.14309E0	5.4121E-3	9.46045E-2	2.73311E1	-3.26673E1	-3.26443E1	2.68298E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.03185E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.19302E-1	-7.99274E-1	-9.13146E0	-9.14297E0	5.65052E-3	9.46045E-2	2.7392E1	-3.26897E1	-3.26327E1	2.68537E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.19588E-1	-7.98941E-1	-9.13179E0	-9.14323E0	5.22137E-3	9.42945E-2	2.7321E1	-3.26915E1	-3.25812E1	2.6807E1	1.19872E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.1923E-1	-7.99465E-1	-9.13153E0	-9.14307E0	5.29289E-3	9.46522E-2	2.73452E1	-3.26667E1	-3.26443E1	2.68208E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.19278E-1	-7.99036E-1	-9.13155E0	-9.14283E0	5.55515E-3	9.45568E-2	2.73165E1	-3.2641E1	-3.25948E1	2.68334E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.19516E-1	-7.99251E-1	-9.13174E0	-9.14273E0	5.43594E-3	9.43661E-2	2.73493E1	-3.26738E1	-3.26467E1	2.68435E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.19635E-1	-7.99227E-1	-9.1315E0	-9.14273E0	5.55515E-3	9.4676E-2	2.73003E1	-3.26843E1	-3.26272E1	2.68581E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.19612E-1	-7.99179E-1	-9.13162E0	-9.14302E0	5.31673E-3	9.45807E-2	2.73357E1	-3.26407E1	-3.26052E1	2.68647E1	1.19653E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.19445E-1	-7.99179E-1	-9.13136E0	-9.14316E0	5.48363E-3	9.44376E-2	2.73546E1	-3.26602E1	-3.26425E1	2.68358E1	1.20031E-7	2.52473E-3	2.52473E-3	6.30182E-3	3.02813E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.19683E-1	-7.99394E-1	-9.13169E0	-9.14333E0	5.57899E-3	9.44614E-2	2.73584E1	-3.27203E1	-3.26529E1	2.68262E1	1.19851E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.19945E-1	-7.9906E-1	-9.1315E0	-9.14338E0	5.43594E-3	9.44853E-2	2.73381E1	-3.26518E1	-3.25725E1	2.67583E1	1.2035E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.19659E-1	-7.9875E-1	-9.13169E0	-9.14328E0	5.24521E-3	9.48429E-2	2.72998E1	-3.26638E1	-3.26183E1	2.68767E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.19564E-1	-7.99036E-1	-9.13179E0	-9.1429E0	5.05447E-3	9.44138E-2	2.73399E1	-3.26431E1	-3.26384E1	2.68364E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.19325E-1	-7.98869E-1	-9.13184E0	-9.1429E0	5.126E-3	9.44376E-2	2.7346E1	-3.26747E1	-3.25785E1	2.6855E1	1.20055E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.03027E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.19564E-1	-7.9937E-1	-9.13188E0	-9.14302E0	5.43594E-3	9.43422E-2	2.73532E1	-3.26585E1	-3.26116E1	2.68111E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.19445E-1	-7.99036E-1	-9.13181E0	-9.1429E0	5.34058E-3	9.42707E-2	2.72498E1	-3.26326E1	-3.27089E1	2.68382E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.19325E-1	-7.9875E-1	-9.13162E0	-9.14295E0	5.14984E-3	9.45091E-2	2.72945E1	-3.26644E1	-3.26632E1	2.68346E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.19445E-1	-7.99012E-1	-9.13155E0	-9.14319E0	5.24521E-3	9.45568E-2	2.7346E1	-3.26633E1	-3.26092E1	2.68695E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.19612E-1	-7.98631E-1	-9.13155E0	-9.14316E0	5.38826E-3	9.46045E-2	2.73297E1	-3.2641E1	-3.26543E1	2.68028E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.19278E-1	-7.99274E-1	-9.13162E0	-9.14299E0	5.57899E-3	9.4533E-2	2.73647E1	-3.27139E1	-3.26001E1	2.68496E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.99E-1