[Scan]
initial_time=2016-01-15T22:23:12
final_time=2016-01-15T22:23:32
ip_count=19
run=1023
dataset=3
scan=164
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.19683E-1
ql1_imon=8.62336E-10
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=3.23629E-10
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=9.24635E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=6.01065E-10
mult1=-9.09742E-9
mult2=-2.91728E-9
rf_tmon=-4.58026E-3
rf_agc=3.29021E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=4.45616E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67919E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1947E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12577E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.85584E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04316E1
cs_ea1_imon=2.52556E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36489E0
lens1_imon=2.72023E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64879E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.54125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.95099E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.66502E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11646E1
os_restr1_imon=2.86161E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=1.89095E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.21351E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.00396E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=8.70752E-10
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-3.76754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2688E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03008E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.4533E-2
ql6_imon=4.81713E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=1.7837E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.1456E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.12102E-1
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.15425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6384E0
os_ef2alow_imon=-2.36362E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51774E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=2.86197E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.27698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.25218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.119E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.3289E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=3.04687E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.54913E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56615E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.90023E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8271E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.70018E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.3729E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.09848E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.34812E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=4.82427E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.59332E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6631E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=9.94918E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63441E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6752E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.29428E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92676E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.0285E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.19564E-1	-7.98726E-1	-9.13138E0	-9.14304E0	5.48363E-3	9.42707E-2	2.72839E1	-3.26413E1	-3.26396E1	2.68028E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.19421E-1	-7.98917E-1	-9.13131E0	-9.14288E0	5.57899E-3	9.41515E-2	2.73326E1	-3.27019E1	-3.26229E1	2.6852E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.19159E-1	-7.98607E-1	-9.13134E0	-9.14309E0	5.72205E-3	9.45568E-2	2.73352E1	-3.26543E1	-3.26054E1	2.68743E1	1.19872E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.19468E-1	-7.99465E-1	-9.13129E0	-9.14316E0	5.45979E-3	9.44138E-2	2.73375E1	-3.26741E1	-3.26182E1	2.67972E1	1.20004E-7	2.52061E-3	2.52061E-3	6.35059E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.19397E-1	-7.9906E-1	-9.13122E0	-9.14288E0	5.6982E-3	9.43899E-2	2.73614E1	-3.26767E1	-3.2586E1	2.68356E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.19206E-1	-7.99155E-1	-9.13157E0	-9.14311E0	5.8651E-3	9.4676E-2	2.73345E1	-3.26639E1	-3.26218E1	2.68506E1	1.19824E-7	2.51802E-3	2.51802E-3	6.3121E-3	3.00376E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.19302E-1	-7.99322E-1	-9.13165E0	-9.14307E0	5.8651E-3	9.41753E-2	2.73101E1	-3.26988E1	-3.26354E1	2.69104E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.1954E-1	-7.9906E-1	-9.13155E0	-9.1429E0	5.79357E-3	9.41515E-2	2.73454E1	-3.26723E1	-3.25954E1	2.6855E1	1.20038E-7	2.51727E-3	2.51727E-3	6.34037E-3	2.99572E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.19302E-1	-7.99274E-1	-9.1316E0	-9.14271E0	5.72205E-3	9.44376E-2	2.73267E1	-3.26326E1	-3.26278E1	2.68581E1	1.20226E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.19612E-1	-7.99513E-1	-9.13146E0	-9.14288E0	5.84126E-3	9.41753E-2	2.73017E1	-3.26101E1	-3.26943E1	2.68184E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.19635E-1	-7.98988E-1	-9.13153E0	-9.14302E0	5.98431E-3	9.40323E-2	2.73219E1	-3.26585E1	-3.26722E1	2.68816E1	1.19831E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.01237E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.19325E-1	-7.99274E-1	-9.1315E0	-9.14288E0	5.65052E-3	9.408E-2	2.73586E1	-3.26849E1	-3.26032E1	2.68052E1	1.19883E-7	2.51838E-3	2.51838E-3	6.33592E-3	3.02154E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.19612E-1	-7.98559E-1	-9.13155E0	-9.14295E0	5.60284E-3	9.45807E-2	2.7347E1	-3.26756E1	-3.25629E1	2.68214E1	1.19749E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.19302E-1	-7.98798E-1	-9.1316E0	-9.14314E0	5.55515E-3	9.45568E-2	2.73411E1	-3.26747E1	-3.26488E1	2.67896E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.19349E-1	-7.98559E-1	-9.13191E0	-9.14323E0	5.50747E-3	9.43422E-2	2.73574E1	-3.27005E1	-3.26404E1	2.6849E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.19707E-1	-7.99513E-1	-9.13179E0	-9.14319E0	5.67436E-3	9.41992E-2	2.73647E1	-3.26402E1	-3.26343E1	2.68436E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.19349E-1	-7.98845E-1	-9.13172E0	-9.14276E0	5.57899E-3	9.41038E-2	2.73316E1	-3.26744E1	-3.26077E1	2.68041E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.19182E-1	-7.98845E-1	-9.13146E0	-9.14295E0	5.31673E-3	9.4533E-2	2.73315E1	-3.2635E1	-3.26218E1	2.68905E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.19492E-1	-7.98917E-1	-9.13181E0	-9.1428E0	5.57899E-3	9.4533E-2	2.73694E1	-3.26986E1	-3.26012E1	2.68534E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.19683E-1	-7.98869E-1	-9.13179E0	-9.14295E0	5.43594E-3	9.4533E-2	2.73411E1	-3.2688E1	-3.26325E1	2.68058E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00097E-1