[Scan]
initial_time=2016-01-15T22:23:39
final_time=2016-01-15T22:23:59
ip_count=19
run=1023
dataset=3
scan=165
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-8.19254E-1
ql1_imon=8.65722E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=3.41642E-10
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=9.10366E-10
ql4_vset=
ql4_vmon=-9.14304E0
ql4_imon=6.16193E-10
mult1=-9.64406E-9
mult2=-2.81642E-9
rf_tmon=-4.77078E-3
rf_agc=3.25705E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.31895E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63318E0
bslens_imon=2.24949E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=2.01306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53858E1
cs_ef1b_imon=2.84073E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02008E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04557E1
cs_ea1_imon=2.50681E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33835E0
lens1_imon=2.7981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.53736E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84429E1
cs_ef1a_imon=2.9363E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.79424E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=2.8522E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=1.88245E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6349E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=1.21244E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91991E2
cs_nozzle_imon=1.93689E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02006E1
cs_anode1_imon=3.00928E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=8.20518E-10
tplens_vset=1.4E-1
tplens_vmon=1.6491E0
tplens_imon=-4.65239E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25443E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.97964E-4
ql6_vset=1.0E-1
ql6_vmon=9.41515E-2
ql6_imon=4.66549E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=1.80565E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.20631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75051E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2508E-1
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00764E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71275E1
cs_ef2a_imon=3.15524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65462E0
os_ef2alow_imon=-2.40082E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74642E-1
os_ef2bup_imon=-5.25748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11257E1
os_restr2_imon=2.86019E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02041E1
cs_anode2_imon=2.24681E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.11192E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68431E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.26898E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=3.0756E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.162E0
cs_ionaccel_imon=-1.98379E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47372E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56718E1
einzel_imon=7.49323E-6
window_vset=0.0E0
window_vmon=2.66339E-1
window_imon=-5.83262E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.86193E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.77804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.75869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.4418E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53253E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33902E1
os_fil1_imon=5.1038E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00563E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66281E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30741E1
cs_fil1_imon=9.95169E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67564E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.88691E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8483E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.69235E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22503E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.55934E-1
res40_imon=-2.33131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.19135E-1	-7.99251E-1	-9.13148E0	-9.14295E0	5.65052E-3	9.45091E-2	2.73063E1	-3.26661E1	-3.26596E1	2.6813E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.19206E-1	-7.98774E-1	-9.13143E0	-9.14292E0	5.45979E-3	9.42945E-2	2.73369E1	-3.2675E1	-3.26419E1	2.68455E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.18944E-1	-7.98798E-1	-9.13193E0	-9.14302E0	5.88894E-3	9.48191E-2	2.73028E1	-3.267E1	-3.26335E1	2.6879E1	1.19713E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.99083E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.18992E-1	-7.98559E-1	-9.13162E0	-9.14288E0	6.07967E-3	9.45568E-2	2.73092E1	-3.26496E1	-3.26278E1	2.68296E1	1.20074E-7	2.51671E-3	2.51671E-3	6.32609E-3	3.01036E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.19087E-1	-7.99131E-1	-9.13172E0	-9.1428E0	5.74589E-3	9.46999E-2	2.73261E1	-3.27137E1	-3.25954E1	2.68647E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.19206E-1	-7.99155E-1	-9.13193E0	-9.1429E0	5.72205E-3	9.43422E-2	2.73424E1	-3.26861E1	-3.26482E1	2.68238E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.18872E-1	-7.99084E-1	-9.13203E0	-9.14259E0	5.91278E-3	9.44853E-2	2.73285E1	-3.26573E1	-3.2587E1	2.6828E1	1.19809E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.18825E-1	-7.99155E-1	-9.13169E0	-9.14271E0	5.88894E-3	9.4676E-2	2.73346E1	-3.2682E1	-3.26331E1	2.68671E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.18515E-1	-7.98988E-1	-9.13186E0	-9.1428E0	5.65052E-3	9.48191E-2	2.73271E1	-3.26878E1	-3.26187E1	2.68004E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.18992E-1	-7.99203E-1	-9.1315E0	-9.14292E0	5.48363E-3	9.45807E-2	2.73737E1	-3.26891E1	-3.25746E1	2.68797E1	1.19998E-7	2.51512E-3	2.51512E-3	6.31847E-3	3.00355E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.19111E-1	-7.99155E-1	-9.13181E0	-9.14295E0	5.53131E-3	9.43422E-2	2.73075E1	-3.26567E1	-3.26349E1	2.68617E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.19278E-1	-7.99298E-1	-9.13162E0	-9.14285E0	5.6982E-3	9.44853E-2	2.73322E1	-3.26667E1	-3.25847E1	2.68424E1	1.20226E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.19182E-1	-7.98965E-1	-9.13172E0	-9.14292E0	5.74589E-3	9.44853E-2	2.73664E1	-3.26693E1	-3.26482E1	2.68238E1	1.1964E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.006E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.19445E-1	-7.98869E-1	-9.13141E0	-9.14333E0	5.72205E-3	9.46045E-2	2.73448E1	-3.26176E1	-3.26518E1	2.68968E1	1.19766E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.98819E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.1923E-1	-7.99274E-1	-9.13162E0	-9.14314E0	5.74589E-3	9.44376E-2	2.73558E1	-3.26949E1	-3.25993E1	2.6802E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97187E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.19278E-1	-7.99465E-1	-9.13174E0	-9.14333E0	5.74589E-3	9.44376E-2	2.72865E1	-3.26182E1	-3.2614E1	2.6834E1	1.20078E-7	2.52093E-3	2.52093E-3	6.31779E-3	2.99506E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.19278E-1	-7.98917E-1	-9.132E0	-9.14297E0	5.60284E-3	9.45807E-2	2.73284E1	-3.26621E1	-3.26413E1	2.68454E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.19159E-1	-7.98702E-1	-9.13193E0	-9.14323E0	5.72205E-3	9.41515E-2	2.73399E1	-3.26428E1	-3.26451E1	2.68526E1	1.20278E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.03449E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.19206E-1	-7.99012E-1	-9.13205E0	-9.14316E0	5.53131E-3	9.41515E-2	2.73345E1	-3.26789E1	-3.26188E1	2.6836E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.19254E-1	-7.98631E-1	-9.13203E0	-9.14304E0	5.38826E-3	9.41515E-2	2.73363E1	-3.26819E1	-3.25443E1	2.68431E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1