[Scan]
initial_time=2016-01-15T22:24:32
final_time=2016-01-15T22:24:52
ip_count=19
run=1023
dataset=3
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.19159E-1
ql1_imon=8.17323E-10
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=3.90625E-10
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=8.36396E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=6.18899E-10
mult1=-9.02999E-9
mult2=-2.53297E-9
rf_tmon=-2.99234E-3
rf_agc=3.45773E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.93662E-3
ql5_imon=4.76491E-10
bslens_vset=-6.2E0
bslens_vmon=-6.86621E0
bslens_imon=2.27459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.17051E1
lens5a_imon=1.84825E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.0629E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54373E1
cs_ef1b_imon=2.86017E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04901E2
lens23_imon=1.03001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03312E1
cs_ea1_imon=2.34789E-5
lens1_vset=-5.0E0
lens1_vmon=-5.17549E0
lens1_imon=3.09292E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0628E1
cs_ea2_imon=1.69936E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.97261E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.94635E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1176E1
os_restr1_imon=2.86017E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=1.77867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63017E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.034E0
cs_ionrep_imon=1.11248E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91999E2
cs_nozzle_imon=1.94714E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01491E1
cs_anode1_imon=3.02667E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=7.71487E-10
tplens_vset=1.4E-1
tplens_vmon=1.85953E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.36698E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27263E1
iondef2_imon=1.62582E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0321E2
lens6_imon=2.99298E-4
ql6_vset=1.0E-1
ql6_vmon=9.46045E-2
ql6_imon=5.01728E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.65538E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.31783E1
lens5b_imon=2.13628E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.14704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.40646E-1
os_ea2_imon=8.0377E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06259E2
lens4b_imon=1.99923E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61918E0
os_ef2alow_imon=-2.10774E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24744E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11039E1
os_restr2_imon=2.84034E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22813E2
cs_ionfoca_imon=6.19943E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7346E1
iondef1_imon=1.21486E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.10359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.30558E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=2.91705E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1848E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.89327E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-6.91381E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92751E3
multa_neg_imon=8.82479E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93574E3
defgrida_imon=5.83628E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50177E3
multb_neg_imon=6.26167E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.90683E0
defgridb_imon=7.65318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3389E1
os_fil1_imon=4.32573E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.35906E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66357E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.96041E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6263E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67188E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91573E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.77022E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18896E-1	-7.99656E-1	-9.13198E0	-9.14292E0	5.60284E-3	9.42707E-2	2.74957E1	-3.27546E1	-3.24284E1	2.68563E1	1.20069E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.02659E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.18825E-1	-7.98941E-1	-9.13186E0	-9.14295E0	5.74589E-3	9.41038E-2	2.73279E1	-3.26873E1	-3.26182E1	2.68278E1	1.1979E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.19039E-1	-7.99298E-1	-9.13169E0	-9.14278E0	5.48363E-3	9.43422E-2	2.73306E1	-3.26897E1	-3.25837E1	2.68371E1	1.20137E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.99879E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.1892E-1	-7.99489E-1	-9.13157E0	-9.1429E0	5.26905E-3	9.45091E-2	2.73269E1	-3.26514E1	-3.26408E1	2.68719E1	1.20042E-7	2.52236E-3	2.52236E-3	6.30212E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.18992E-1	-7.99561E-1	-9.13169E0	-9.14295E0	5.38826E-3	9.39846E-2	2.73784E1	-3.26669E1	-3.26963E1	2.68244E1	1.19851E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.19039E-1	-7.99084E-1	-9.13155E0	-9.14309E0	5.34058E-3	9.408E-2	2.73754E1	-3.26837E1	-3.26212E1	2.68322E1	1.19851E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.1892E-1	-7.99417E-1	-9.13148E0	-9.14295E0	5.65052E-3	9.41038E-2	2.73552E1	-3.26413E1	-3.26384E1	2.68671E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.19087E-1	-7.99417E-1	-9.13153E0	-9.14314E0	5.6982E-3	9.41038E-2	2.73496E1	-3.25978E1	-3.2632E1	2.68343E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.1861E-1	-7.99346E-1	-9.13141E0	-9.14323E0	5.60284E-3	9.43184E-2	2.73594E1	-3.26254E1	-3.26632E1	2.68556E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.18658E-1	-7.99179E-1	-9.13169E0	-9.14309E0	5.57899E-3	9.4676E-2	2.73454E1	-3.27083E1	-3.2614E1	2.68424E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02922E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.18944E-1	-7.99155E-1	-9.13186E0	-9.14314E0	5.81741E-3	9.44376E-2	2.72925E1	-3.26717E1	-3.26272E1	2.68262E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18658E-1	-7.98774E-1	-9.13162E0	-9.14311E0	6.00815E-3	9.4676E-2	2.73552E1	-3.26856E1	-3.2616E1	2.68563E1	1.19913E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.19087E-1	-7.99036E-1	-9.13174E0	-9.14302E0	5.96046E-3	9.44614E-2	2.73602E1	-3.26713E1	-3.26536E1	2.6834E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.19111E-1	-7.9937E-1	-9.13157E0	-9.14302E0	6.12736E-3	9.43899E-2	2.73399E1	-3.26657E1	-3.26554E1	2.68809E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.19349E-1	-7.99274E-1	-9.13153E0	-9.14278E0	5.34058E-3	9.42469E-2	2.73328E1	-3.27021E1	-3.2616E1	2.68725E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.19182E-1	-7.99084E-1	-9.13141E0	-9.14333E0	5.50747E-3	9.44853E-2	2.7346E1	-3.26741E1	-3.26879E1	2.6854E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.19421E-1	-7.98917E-1	-9.13165E0	-9.14333E0	5.55515E-3	9.43422E-2	2.73429E1	-3.26657E1	-3.26428E1	2.68196E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.19254E-1	-7.98821E-1	-9.1316E0	-9.14311E0	5.62668E-3	9.43899E-2	2.73357E1	-3.27125E1	-3.26212E1	2.68893E1	1.20244E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01475E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.18729E-1	-7.98845E-1	-9.13126E0	-9.14316E0	5.79357E-3	9.44376E-2	2.73664E1	-3.26765E1	-3.26536E1	2.68424E1	1.198E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.19159E-1	-7.98821E-1	-9.13157E0	-9.14297E0	5.93662E-3	9.46045E-2	2.7346E1	-3.27263E1	-3.2611E1	2.68364E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1