[Scan]
initial_time=2016-01-15T22:24:59
final_time=2016-01-15T22:25:18
ip_count=19
run=1023
dataset=3
scan=168
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.18849E-1
ql1_imon=8.24499E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=3.41642E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=7.54821E-10
ql4_vset=
ql4_vmon=-9.14304E0
ql4_imon=6.37424E-10
mult1=-1.12816E-8
mult2=-2.74456E-9
rf_tmon=-2.70995E-3
rf_agc=3.4355E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=4.4198E-10
bslens_vset=-6.2E0
bslens_vmon=-6.74762E0
bslens_imon=2.7981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20662E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04481E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.85043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02475E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05678E1
cs_ea1_imon=2.53972E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32478E0
lens1_imon=2.23887E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65095E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02917E1
cs_ea2_imon=1.51825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.94017E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.54485E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=2.85152E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=1.96917E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=1.18802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93232E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=3.01045E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=8.41475E-10
tplens_vset=1.4E-1
tplens_vmon=1.65205E0
tplens_imon=5.15143E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.51542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.52674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98236E-4
ql6_vset=1.0E-1
ql6_vmon=9.46045E-2
ql6_imon=4.72414E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.37126E0
ionrepsh_imon=1.82901E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.15039E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.71988E-1
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06171E2
lens4b_imon=2.0115E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66123E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45166E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=2.87026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2311E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.08007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68438E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.32896E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=3.63886E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.96895E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=5.91277E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.68248E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.04235E0
defgridb_imon=5.81367E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33898E1
os_fil1_imon=5.40692E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4852E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30695E1
cs_fil1_imon=9.96702E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67481E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.30694E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.97734E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22468E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.2033E-7
chamber_cvt_pmon=2.52867E-3
foreline_cvt_pmon=2.52867E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97734E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.19373E-1	-7.98416E-1	-9.13165E0	-9.14285E0	6.10352E-3	9.46999E-2	2.73706E1	-3.27275E1	-3.26124E1	2.68412E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02133E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.1923E-1	-7.98583E-1	-9.13146E0	-9.14297E0	5.96046E-3	9.45568E-2	2.73182E1	-3.26722E1	-3.26179E1	2.68346E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.19373E-1	-7.99227E-1	-9.13177E0	-9.14299E0	5.81741E-3	9.44138E-2	2.73248E1	-3.26782E1	-3.2586E1	2.68111E1	1.19978E-7	2.52585E-3	2.52585E-3	6.34099E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.19206E-1	-7.99036E-1	-9.13181E0	-9.14309E0	5.76973E-3	9.4676E-2	2.73195E1	-3.26476E1	-3.26464E1	2.6849E1	1.20042E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.19731E-1	-7.98893E-1	-9.13203E0	-9.14321E0	5.79357E-3	9.44853E-2	2.73234E1	-3.26614E1	-3.26236E1	2.68671E1	1.20017E-7	2.51826E-3	2.51826E-3	6.32112E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.19254E-1	-7.99012E-1	-9.13205E0	-9.1433E0	5.43594E-3	9.43661E-2	2.73412E1	-3.26499E1	-3.26376E1	2.6834E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.19588E-1	-7.98655E-1	-9.13162E0	-9.14309E0	5.76973E-3	9.4533E-2	2.73334E1	-3.26396E1	-3.26195E1	2.68556E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09309E0	-8.18849E-1	-7.98917E-1	-9.13157E0	-9.1433E0	5.91278E-3	9.46045E-2	2.7335E1	-3.26564E1	-3.26264E1	2.68465E1	1.19851E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09286E0	-8.19111E-1	-7.99012E-1	-9.13193E0	-9.14323E0	5.65052E-3	9.41753E-2	2.73198E1	-3.26337E1	-3.26142E1	2.68371E1	1.19727E-7	2.52169E-3	2.52169E-3	6.31509E-3	3.01885E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09302E0	-8.19159E-1	-7.98893E-1	-9.13174E0	-9.14311E0	5.74589E-3	9.43661E-2	2.73111E1	-3.2653E1	-3.26356E1	2.68113E1	1.19851E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.02511E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.19254E-1	-7.99155E-1	-9.13179E0	-9.1434E0	5.91278E-3	9.44376E-2	2.73526E1	-3.26795E1	-3.26134E1	2.68343E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.19182E-1	-7.9906E-1	-9.13169E0	-9.14319E0	5.45979E-3	9.44376E-2	2.73219E1	-3.26639E1	-3.26314E1	2.68124E1	1.20158E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.19182E-1	-7.98869E-1	-9.13172E0	-9.14326E0	5.55515E-3	9.45568E-2	2.73303E1	-3.26651E1	-3.26182E1	2.68707E1	1.19978E-7	2.52027E-3	2.52027E-3	6.29624E-3	3.00144E-1
1.7E1	0.0E0	1.0E0	6.87E2	4.7E2	-2.09487E0	-8.19159E-1	-7.98941E-1	-9.13169E0	-9.14319E0	5.8651E-3	9.44376E-2	2.73275E1	-3.26708E1	-3.26325E1	2.68448E1	1.20363E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.19135E-1	-7.98655E-1	-9.13186E0	-9.14319E0	5.45979E-3	9.43422E-2	2.73243E1	-3.26585E1	-3.26188E1	2.68412E1	1.20383E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.19159E-1	-7.98774E-1	-9.13148E0	-9.14338E0	5.31673E-3	9.46522E-2	2.73117E1	-3.26308E1	-3.26302E1	2.68484E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.18634E-1	-7.99131E-1	-9.13157E0	-9.14359E0	5.60284E-3	9.4533E-2	2.73568E1	-3.26717E1	-3.26074E1	2.68124E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.19159E-1	-7.99131E-1	-9.13188E0	-9.14321E0	6.10352E-3	9.46522E-2	2.73271E1	-3.26724E1	-3.26359E1	2.68847E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.19039E-1	-7.98655E-1	-9.13157E0	-9.14335E0	5.48363E-3	9.46522E-2	2.73051E1	-3.2639E1	-3.26301E1	2.68592E1	1.1979E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.97593E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.18849E-1	-7.98631E-1	-9.13172E0	-9.14304E0	5.72205E-3	9.46045E-2	2.73231E1	-3.26795E1	-3.26488E1	2.68438E1	1.2033E-7	2.52867E-3	2.52867E-3	6.32936E-3	2.99E-1