[Scan]
initial_time=2016-01-15T22:25:26
final_time=2016-01-15T22:25:45
ip_count=19
run=1023
dataset=3
scan=169
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.19182E-1
ql1_imon=8.02767E-10
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=3.42989E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=7.32183E-10
ql4_vset=
ql4_vmon=-9.14333E0
ql4_imon=6.46162E-10
mult1=-9.62248E-9
mult2=-2.67515E-9
rf_tmon=-4.36244E-3
rf_agc=3.28019E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=4.16172E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69978E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20133E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54216E1
cs_ef1b_imon=2.84779E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04668E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04459E1
cs_ea1_imon=2.53391E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32509E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.98926E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.54831E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84506E1
cs_ef1a_imon=2.94996E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=4.55916E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.85078E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=1.90052E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63498E1
os_ef1bup_imon=3.07534E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.19647E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93687E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02083E1
cs_anode1_imon=3.01733E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=8.08644E-10
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26829E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26634E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.47714E-2
ql6_imon=5.2104E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29596E0
ionrepsh_imon=1.80895E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33231E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74202E1
cs_ef2b_imon=3.12511E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16275E-1
os_ea2_imon=-5.08433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71931E1
cs_ef2a_imon=3.16703E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60908E0
os_ef2alow_imon=-2.34228E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52721E-1
os_ef2bup_imon=-5.06687E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11148E1
os_restr2_imon=2.86575E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.27441E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01784E1
cs_anode2_imon=2.25983E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72849E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68425E1
iondef4_imon=1.11011E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.28552E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81164E-1
olens1_imon=2.64347E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15509E0
cs_ionaccel_imon=-1.7472E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47567E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56424E1
einzel_imon=7.71029E-6
window_vset=0.0E0
window_vmon=2.54399E-1
window_imon=-6.01975E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82693E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.86013E1
mask2_imon=-6.46886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=8.08217E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=6.87451E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=6.34819E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33902E1
os_fil1_imon=4.29246E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90405E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66485E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30708E1
cs_fil1_imon=9.96525E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62584E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16999E-2
os_fil2_imon=-2.43795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.61958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73527E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31938E-1
cs_fil2_imon=-2.36933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28592E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22533E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.3381E-1
res40_imon=-2.5556E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.18849E-1	-7.99084E-1	-9.13155E0	-9.14314E0	5.74589E-3	9.46999E-2	2.73556E1	-3.26909E1	-3.26014E1	2.6843E1	1.19713E-7	2.52027E-3	2.52027E-3	6.29624E-3	3.02545E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.18944E-1	-7.99274E-1	-9.13141E0	-9.14319E0	5.45979E-3	9.46999E-2	2.73358E1	-3.26492E1	-3.26729E1	2.68395E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.19302E-1	-7.99084E-1	-9.13162E0	-9.14292E0	5.67436E-3	9.48668E-2	2.73191E1	-3.26607E1	-3.26193E1	2.68256E1	1.20142E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.19254E-1	-7.9937E-1	-9.13205E0	-9.14309E0	5.26905E-3	9.48191E-2	2.73192E1	-3.27087E1	-3.26193E1	2.68484E1	1.20127E-7	2.51679E-3	2.51679E-3	6.323E-3	3.01485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.19159E-1	-7.99179E-1	-9.13167E0	-9.14304E0	5.60284E-3	9.46522E-2	2.73411E1	-3.26573E1	-3.2626E1	2.68136E1	1.2033E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.18872E-1	-7.99036E-1	-9.13186E0	-9.14321E0	5.57899E-3	9.49621E-2	2.73326E1	-3.26615E1	-3.26076E1	2.68472E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.19349E-1	-7.98941E-1	-9.13184E0	-9.14309E0	5.81741E-3	9.46522E-2	2.73564E1	-3.26885E1	-3.25894E1	2.68194E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.1923E-1	-7.9906E-1	-9.13203E0	-9.14321E0	5.8651E-3	9.47714E-2	2.73237E1	-3.26218E1	-3.26543E1	2.68523E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.19087E-1	-7.99274E-1	-9.13177E0	-9.14321E0	5.4121E-3	9.44614E-2	2.73562E1	-3.2644E1	-3.26374E1	2.68377E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.19421E-1	-7.99346E-1	-9.132E0	-9.14319E0	5.36442E-3	9.46283E-2	2.73381E1	-3.26717E1	-3.26302E1	2.68556E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.02769E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.18968E-1	-7.98726E-1	-9.13205E0	-9.14314E0	5.96046E-3	9.45807E-2	2.73387E1	-3.26512E1	-3.25996E1	2.68376E1	1.20208E-7	2.52285E-3	2.52285E-3	6.33512E-3	3.01014E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09279E0	-8.18634E-1	-7.98845E-1	-9.13191E0	-9.14295E0	5.88894E-3	9.46522E-2	2.73435E1	-3.26699E1	-3.2605E1	2.68496E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.18849E-1	-7.98965E-1	-9.13196E0	-9.14309E0	5.67436E-3	9.44614E-2	2.7361E1	-3.2653E1	-3.26783E1	2.67824E1	1.19861E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.18634E-1	-7.99036E-1	-9.13203E0	-9.14288E0	6.10352E-3	9.50098E-2	2.73075E1	-3.27119E1	-3.26014E1	2.68308E1	1.19861E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.18682E-1	-7.99131E-1	-9.13184E0	-9.14297E0	5.67436E-3	9.47237E-2	2.73466E1	-3.26909E1	-3.26442E1	2.68267E1	1.20311E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.19016E-1	-7.99322E-1	-9.13198E0	-9.14278E0	5.8651E-3	9.48429E-2	2.73204E1	-3.26629E1	-3.26254E1	2.68426E1	1.1988E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.0223E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.1923E-1	-7.99298E-1	-9.13188E0	-9.14288E0	5.45979E-3	9.46999E-2	2.73393E1	-3.26909E1	-3.2626E1	2.67746E1	1.20076E-7	2.52266E-3	2.52266E-3	6.32518E-3	3.01326E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.19111E-1	-7.99203E-1	-9.13172E0	-9.14297E0	5.36442E-3	9.47475E-2	2.73393E1	-3.26738E1	-3.26172E1	2.68442E1	1.20158E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.19111E-1	-7.99012E-1	-9.13188E0	-9.14319E0	5.43594E-3	9.4676E-2	2.73334E1	-3.26838E1	-3.26054E1	2.68424E1	1.20414E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.19182E-1	-7.99203E-1	-9.13172E0	-9.14333E0	5.74589E-3	9.47714E-2	2.72849E1	-3.26634E1	-3.26829E1	2.68425E1	1.19697E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.9943E-1