[Scan]
initial_time=2016-01-15T22:25:52
final_time=2016-01-15T22:26:12
ip_count=19
run=1023
dataset=3
scan=170
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.18777E-1
ql1_imon=8.0111E-10
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=3.79872E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=6.83451E-10
ql4_vset=
ql4_vmon=-9.14307E0
ql4_imon=6.56259E-10
mult1=-1.05712E-8
mult2=-2.7226E-9
rf_tmon=-3.71333E-3
rf_agc=3.38683E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.17399E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=2.01335E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=2.84719E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04585E1
cs_ea1_imon=2.54617E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3323E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=3.00288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04147E1
cs_ea2_imon=1.51767E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.94522E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.14872E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1158E1
os_restr1_imon=2.85368E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=1.91458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6399E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=1.21846E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93734E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.9982E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=7.88629E-10
tplens_vset=1.4E-1
tplens_vmon=1.65405E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2587E1
iondef3_imon=1.52164E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.56454E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03013E2
lens6_imon=2.97982E-4
ql6_vset=1.0E-1
ql6_vmon=9.46045E-2
ql6_imon=4.86517E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31999E0
ionrepsh_imon=1.82409E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43913E-1
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72099E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58734E0
os_ef2alow_imon=-2.34921E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.10264E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=2.86233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73898E1
iondef1_imon=1.11969E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68611E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.22727E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=3.42309E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56748E1
einzel_imon=7.91129E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-6.04886E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.46212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.34098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.26745E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19705E0
defgridb_imon=6.37703E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33903E1
os_fil1_imon=4.74018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.06784E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66237E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3072E1
cs_fil1_imon=9.95014E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63219E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67394E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.29897E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.79714E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00595E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22526E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.36244E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49681E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.19182E-1	-7.98726E-1	-9.13193E0	-9.14309E0	5.45979E-3	9.46999E-2	2.73306E1	-3.26277E1	-3.26509E1	2.68296E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.18944E-1	-7.98821E-1	-9.13184E0	-9.14304E0	5.50747E-3	9.44614E-2	2.73161E1	-3.26346E1	-3.26358E1	2.6819E1	1.19941E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.19111E-1	-7.98869E-1	-9.13184E0	-9.14304E0	5.81741E-3	9.45091E-2	2.73324E1	-3.26886E1	-3.26095E1	2.68511E1	1.20062E-7	2.51755E-3	2.51755E-3	6.31012E-3	3.01284E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18825E-1	-7.9906E-1	-9.13179E0	-9.14311E0	5.55515E-3	9.47475E-2	2.73117E1	-3.26482E1	-3.2602E1	2.68262E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18777E-1	-7.98917E-1	-9.13215E0	-9.1434E0	5.57899E-3	9.4533E-2	2.73594E1	-3.26496E1	-3.2639E1	2.68501E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.19039E-1	-7.99131E-1	-9.13181E0	-9.14292E0	5.72205E-3	9.46522E-2	2.73135E1	-3.26789E1	-3.2617E1	2.68669E1	1.20174E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.18729E-1	-7.99131E-1	-9.13184E0	-9.14316E0	5.88894E-3	9.4533E-2	2.73448E1	-3.26669E1	-3.26212E1	2.68076E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.18777E-1	-7.98988E-1	-9.13155E0	-9.14319E0	5.98431E-3	9.46999E-2	2.73204E1	-3.27004E1	-3.26472E1	2.68421E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.19063E-1	-7.99203E-1	-9.13196E0	-9.14311E0	5.6982E-3	9.43422E-2	2.73086E1	-3.26585E1	-3.26011E1	2.6869E1	1.19857E-7	2.51746E-3	2.51746E-3	6.3074E-3	3.0137E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.18372E-1	-7.98917E-1	-9.13172E0	-9.14328E0	5.57899E-3	9.44614E-2	2.73804E1	-3.26891E1	-3.26419E1	2.68369E1	1.198E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.18896E-1	-7.99227E-1	-9.13181E0	-9.14335E0	5.62668E-3	9.4676E-2	2.73431E1	-3.25911E1	-3.26174E1	2.6819E1	1.19925E-7	2.51025E-3	2.51025E-3	6.3074E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.18801E-1	-7.99251E-1	-9.13157E0	-9.14295E0	5.79357E-3	9.46522E-2	2.73541E1	-3.27074E1	-3.2662E1	2.68262E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.19016E-1	-7.99322E-1	-9.13167E0	-9.1433E0	5.48363E-3	9.48668E-2	2.7308E1	-3.26555E1	-3.25947E1	2.68905E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.18825E-1	-7.99441E-1	-9.13157E0	-9.1433E0	5.53131E-3	9.45091E-2	2.73333E1	-3.26771E1	-3.26554E1	2.68154E1	1.19705E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18801E-1	-7.99394E-1	-9.13146E0	-9.14302E0	5.34058E-3	9.46283E-2	2.73081E1	-3.26717E1	-3.26152E1	2.68346E1	1.20106E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.18992E-1	-7.9875E-1	-9.13141E0	-9.14264E0	5.24521E-3	9.46999E-2	2.73219E1	-3.26464E1	-3.26332E1	2.68166E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02922E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.18992E-1	-7.98774E-1	-9.13143E0	-9.14283E0	5.36442E-3	9.47475E-2	2.73526E1	-3.27191E1	-3.26002E1	2.68406E1	1.20383E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.1892E-1	-7.98678E-1	-9.13165E0	-9.14285E0	5.55515E-3	9.45568E-2	2.73039E1	-3.27054E1	-3.25802E1	2.68395E1	1.20017E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.18706E-1	-7.98726E-1	-9.1315E0	-9.14302E0	5.45979E-3	9.44853E-2	2.7337E1	-3.2682E1	-3.26844E1	2.68154E1	1.19891E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.97843E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.18777E-1	-7.99036E-1	-9.13131E0	-9.14307E0	5.57899E-3	9.46045E-2	2.73898E1	-3.26579E1	-3.2587E1	2.68611E1	1.19913E-7	2.52209E-3	2.52209E-3	6.36244E-3	2.9952E-1